Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications R Abdolvand, HM Lavasani, GK Ho, F Ayazi
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008
254 2008 High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 12 (4), 487-496, 2003
248 2003 Micromachined resonators: A review R Abdolvand, B Bahreyni, JEY Lee, F Nabki
Micromachines 7 (9), 160, 2016
242 2016 Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators GK Ho, R Abdolvand, A Sivapurapu, S Humad, F Ayazi
Journal of microelectromechanical systems 17 (2), 512-520, 2008
230 2008 An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon R Abdolvand, F Ayazi
Sensors and Actuators A: Physical 144 (1), 109-116, 2008
191 2008 In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators BP Harrington, R Abdolvand
Journal of Micromechanics and Microengineering 21 (8), 085021, 2011
180 2011 A 4.5-mW Closed-Loop BV Amini, R Abdolvand, F Ayazi
IEEE Journal of Solid-State Circuits 41 (12), 2983-2991, 2006
172 2006 Piezoelectric on semiconductor-on-insulator microelectromechanical resonators F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad
US Patent 6,909,221, 2005
165 2005 Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators F Ayazi, GKF Ho, R Abdolvand
US Patent 7,639,105, 2009
164 2009 Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass R Abdolvand, BV Amini, F Ayazi
Journal of microelectromechanical systems 16 (5), 1036-1043, 2007
162 2007 Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators G Piazza, R Abdolvand, GK Ho, F Ayazi
Sensors and Actuators A: Physical 111 (1), 71-78, 2004
129 2004 Quality factor in trench-refilled polysilicon beam resonators R Abdolvand, H Johari, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 15 (3), 471-478, 2006
109 2006 Methods of forming oxide masks with submicron openings and microstructures formed thereby F Ayazi, R Abdolvand, SP Anaraki
US Patent 7,056,757, 2006
103 2006 High frequency micromechanical piezo-on-silicon block resonators S Humad, R Abdolvand, GK Ho, G Piazza, F Ayazi
IEEE International Electron Devices Meeting 2003, 39.3. 1-39.3. 4, 2003
99 2003 A 76 dB HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi
IEEE journal of solid-state circuits 46 (1), 224-235, 2010
95 2010 Piezo-on-diamond resonators and resonator systems F Ayazi, R Abdolvand
US Patent 7,812,692, 2010
86 2010 Turnover temperature point in extensional-mode highly doped silicon microresonators M Shahmohammadi, BP Harrington, R Abdolvand
IEEE transactions on electron devices 60 (3), 1213-1220, 2013
76 2013 Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q BP Harrington, M Shahmohammadi, R Abdolvand
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010
66 2010 7E-4 enhanced power handling and quality factor in thin-film piezoelectric-on-substrate resonators R Abdolvand, F Ayazi
2007 IEEE Ultrasonics Symposium Proceedings, 608-611, 2007
63 2007 High-order composite bulk acoustic resonators GK Ho, R Abdolvand, F Ayazi
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems …, 2007
59 2007