متابعة
Jean-Paul Booth
Jean-Paul Booth
Research Director, LPP-CNRS
بريد إلكتروني تم التحقق منه على lpp.polytechnique.fr - الصفحة الرئيسية
عنوان
عدد مرات الاقتباسات
عدد مرات الاقتباسات
السنة
Standing wave and skin effects in large-area, high-frequency capacitive discharges‏
MA Lieberman, JP Booth, P Chabert, JM Rax, MM Turner‏
Plasma Sources Science and Technology 11 (3), 283, 2002‏
4032002
production and loss mechanisms in fluorocarbon discharges: Fluorine-poor conditions and polymerization‏
G Cunge, JP Booth‏
Journal of Applied Physics 85 (8), 3952-3959, 1999‏
2291999
Oxygen and fluorine atom kinetics in electron cyclotron resonance plasmas by time‐resolved actinometry‏
JP Booth, N Sadeghi‏
Journal of applied physics 70 (2), 611-620, 1991‏
2091991
radical production and loss in a reactive ion etching plasma: Fluorine rich conditions‏
JP Booth, G Cunge, P Chabert, N Sadeghi‏
Journal of Applied Physics 85 (6), 3097-3107, 1999‏
1951999
A novel electrostatic probe method for ion flux measurements‏
NSJ Braithwaite, JP Booth, G Cunge‏
Plasma Sources Science and Technology 5 (4), 677, 1996‏
1941996
Spatially and temporally resolved laser‐induced fluorescence measurements of CF2 and CF radicals in a CF4 rf plasma‏
JP Booth, G Hancock, ND Perry, MJ Toogood‏
Journal of applied physics 66 (11), 5251-5257, 1989‏
1901989
Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm‏
JP Booth, O Joubert, J Pelletier, N Sadeghi‏
Journal of applied physics 69 (2), 618-626, 1991‏
1541991
Ion flux nonuniformities in large-area high-frequency capacitive discharges‏
A Perret, P Chabert, JP Booth, J Jolly, J Guillon, P Auvray‏
Applied physics letters 83 (2), 243-245, 2003‏
1502003
Electron beam pulses produced by helicon‐wave excitation‏
AR Ellingboe, RW Boswell, JP Booth, N Sadeghi‏
Physics of Plasmas 2 (6), 1807-1809, 1995‏
1331995
Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by sawtooth voltage waveforms‏
B Bruneau, T Gans, D O’Connell, A Greb, EV Johnson, JP Booth‏
Physical review letters 114 (12), 125002, 2015‏
1322015
Ion energy uniformity in high-frequency capacitive discharges‏
A Perret, P Chabert, J Jolly, JP Booth‏
Applied Physics Letters 86 (2), 2005‏
1262005
Electron heating in capacitively coupled plasmas revisited‏
T Lafleur, P Chabert, JP Booth‏
Plasma Sources Science and Technology 23 (3), 035010, 2014‏
1112014
Absolute radical densities in etching plasmas determined by broad-band UV absorption spectroscopy‏
JP Booth, G Cunge, F Neuilly, N Sadeghi‏
Plasma Sources Science and Technology 7 (3), 423, 1998‏
1101998
Optical and electrical diagnostics of fluorocarbon plasmaetching processes‏
JP Booth‏
Plasma Sources Science and Technology 8 (2), 249, 1999‏
1091999
Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring‏
T Lafleur, PA Delattre, EV Johnson, JP Booth‏
Applied Physics Letters 101 (12), 2012‏
992012
Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux‏
JP Booth, G Curley, D Marić, P Chabert‏
Plasma Sources Science and Technology 19 (1), 015005, 2009‏
992009
Chemical kinetics in an atmospheric pressure helium plasma containing humidity‏
S Schröter, A Wijaikhum, AR Gibson, A West, HL Davies, N Minesi, ...‏
Physical Chemistry Chemical Physics 20 (37), 24263-24286, 2018‏
962018
Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms‏
T Lafleur, RW Boswell, JP Booth‏
Applied Physics Letters 100 (19), 2012‏
952012
Laser induced fluorescence detection of CF and CF2 radicals in a CF4/O2 plasma‏
JP Booth, G Hancock, ND Perry‏
Applied physics letters 50 (6), 318-319, 1987‏
951987
Secondary electron induced asymmetry in capacitively coupled plasmas‏
T Lafleur, P Chabert, JP Booth‏
Journal of Physics D: Applied Physics 46 (13), 135201, 2013‏
912013
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مقالات 1–20