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Prototype ATLAS IBL modules using the FE-I4A front-end readout chip
Atlas Ibl Collaboration
Journal of Instrumentation 7 (11), P11010, 2012
2082012
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro
Journal of Micromechanics and Microengineering 12 (4), 385, 2002
1362002
Fabrication of novel MEMS microgrippers by deep reactive ion etching with metal hard mask
A Bagolini, S Ronchin, P Bellutti, M Chistè, M Verotti, NP Belfiore
Journal of Microelectromechanical Systems 26 (4), 926-934, 2017
882017
Development of micro-grippers for tissue and cell manipulation with direct morphological comparison
R Cecchi, M Verotti, R Capata, A Dochshanov, GB Broggiato, R Crescenzi, ...
Micromachines 6 (11), 1710-1728, 2015
822015
Development of double-sided full-passing-column 3D sensors at FBK
G Giacomini, A Bagolini, M Boscardin, GF Dalla Betta, F Mattedi, M Povoli, ...
IEEE Transactions on Nuclear Science 60 (3), 2357-2366, 2013
702013
Slim edges in double-sided silicon 3D detectors
M Povoli, A Bagolini, M Boscardin, GF Dalla Betta, G Giacomini, ...
Journal of Instrumentation 7 (01), C01015, 2012
702012
Stress characterization of electroplated gold layers for low temperature surface micromachining
B Margesin, A Bagolini, V Guarnieri, F Giacomozzi, A Faes, R Pal, ...
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 …, 2003
672003
Rib waveguides for mid-infrared silicon photonics
MM Milošević, PS Matavulj, PY Yang, A Bagolini, GZ Mashanovich
Journal of the Optical Society of America B 26 (9), 1760-1766, 2009
582009
Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation
A Bagolini, A Gaiardo, M Crivellari, E Demenev, R Bartali, A Picciotto, ...
Sensors and Actuators B: Chemical 292, 225-232, 2019
502019
New MEMS tweezers for the viscoelastic characterization of soft materials at the microscale
P Di Giamberardino, A Bagolini, P Bellutti, IJ Rudas, M Verotti, F Botta, ...
Micromachines 9 (1), 15, 2017
482017
PECVD low stress silicon nitride analysis and optimization for the fabrication of CMUT devices
A Bagolini, AS Savoia, A Picciotto, M Boscardin, P Bellutti, N Lamberti, ...
Journal of Micromechanics and Microengineering 25 (1), 015012, 2014
442014
Stress and resistivity analysis of electrodeposited gold films for MEMS application
S Kal, A Bagolini, B Margesin, M Zen
Microelectronics journal 37 (11), 1329-1334, 2006
442006
⟨ 1 0 0⟩ bar corner compensation for CMOS compatible anisotropic TMAH etching
R Mukhiya, A Bagolini, B Margesin, M Zen, S Kal
journal of micromechanics and microengineering 16 (11), 2458, 2006
432006
Innovative silicon microgrippers for biomedical applications: Design, mechanical simulation and evaluation of protein fouling
C Potrich, L Lunelli, A Bagolini, P Bellutti, C Pederzolli, M Verotti, ...
Actuators 7 (2), 12, 2018
342018
Development of planar detectors with active edge
M Povoli, A Bagolini, M Boscardin, GF Dalla Betta, G Giacomini, ...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2011
332011
Optimization of a low-power chemoresistive gas sensor: Predictive thermal modelling and mechanical failure analysis
A Gaiardo, D Novel, E Scattolo, M Crivellari, A Picciotto, F Ficorella, ...
Sensors 21 (3), 783, 2021
322021
Simulation and construction of a MEMS CSFH based microgripper
NP Belfiore, GB Broggiato, M Verotti, M Balucani, R Crescenzi, A Bagolini, ...
Int. J. Mech. Control 16 (1), 21-30, 2015
322015
Development of modified 3D detectors at FBK
GF Dalla Betta, A Bagolini, M Boscardin, L Bosisio, P Gabos, G Giacomini, ...
IEEE Nuclear Science Symposuim & Medical Imaging Conference, 382-387, 2010
322010
Development of edgeless n-on-p planar pixel sensors for future ATLAS upgrades
M Bomben, A Bagolini, M Boscardin, L Bosisio, G Calderini, J Chauveau, ...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2013
312013
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
A Persano, F Quaranta, G Capoccia, E Proietti, A Lucibello, R Marcelli, ...
Microsystem Technologies 22, 1741-1746, 2016
292016
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Artikler 1–20