| Soft, entirely photoplastic probes for scanning force microscopy G Genolet, J Brugger, M Despont, U Drechsler, P Vettiger, NF De Rooij, ... Review of scientific instruments 70 (5), 2398-2401, 1999 | 164 | 1999 |
| All-photoplastic, soft cantilever cassette probe for scanning force microscopy G Genolet, M Despont, P Vettiger, D Anselmetti, NF De Rooij Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 50 | 2000 |
| Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications H Rothuizen, U Drechsler, G Genolet, W Häberle, M Lutwyche, R Stutz, ... Microelectronic Engineering 53 (1-4), 509-512, 2000 | 46 | 2000 |
| UV-LIGA: from development to commercialization G Genolet, H Lorenz Micromachines 5 (3), 486-495, 2014 | 40 | 2014 |
| Compact copper/epoxy-based electromagnetic scanner for scanning probe applications H Rothuizen, M Despont, U Drechsler, G Genolet, W Haberle, M Lutwyche, ... Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE …, 2002 | 35 | 2002 |
| Micromachined photoplastic probe for scanning near-field optical microscopy G Genolet, M Despont, P Vettiger, U Staufer, W Noell, NF de Rooij, ... Review of Scientific Instruments 72 (10), 3877-3879, 2001 | 34 | 2001 |
| A life-sized, hydrodynamical, micromechanical inner ear W Hemmert, U Dürig, M Despont, U Drechsler, G Genolet, P Vettiger, ... Biophysics of the Cochlea: from Molecules to Models, 409-416, 2003 | 28 | 2003 |
| New photoplastic fabrication techniques and devices based on high aspect ratio photoresist G Genolet EPFL, 2001 | 28 | 2001 |
| Microstructures G Cross, M Despont, UT Duerig, G Genolet, R Schlittler, P Vettiger US Patent 7,351,604, 2008 | 10 | 2008 |
| Microstructures G Cross, M Despont, UT Duerig, G Genolet, R Schlittler, P Vettiger US Patent 7,351,604, 2008 | 10 | 2008 |
| Porous silicon sacrificial layer technique for the fabrication of free standing membrane resonators and cantilever arrays GA Racine, G Genolet, PA Clerc, M Despont, P Vettiger, NF De Rooij Eurosensors XI 11th European Conf. On Solid-State Transducers 1 (CONF), 285-288, 1997 | 9 | 1997 |
| Micromachined photoplastic probes for scanning probe microscopy G Genolet, M Despont, P Vettiger, NF de Rooij Sensors Update 9 (1), 3-19, 2001 | 5 | 2001 |
| Novel micromachined photoplastic probe for scanning near-field optical microscopy G Genolet, T Cueni, MP Bernal, M Despont, U Staufer, W Noell, P Vettiger, ... Eurosensors XIV 14th European Conference on Solid-State Transducers, 641-644, 2000 | 2 | 2000 |
| New designs for submillimetric press-fitting L Charvier, F Bourgeois, J Jacot, G Genolet, H Lorenz International Precision Assembly Seminar, 67-74, 2008 | 1 | 2008 |
| New functionalities for micromechanical watch parts given by LIGA technology design freedom G Genolet, H Lorenz MST NEWS, 16-34, 2004 | 1 | 2004 |
| Review UV-LIGA: From Development to Commercialization G Genolet, H Lorenz | | 2014 |
| Schnellstes Fertigungsverfahren für Epoxid-Removal: Remote Plasma-Anlage zum effektiven Entfernen von sehr resistenten Epoxy-Resists wie SU-8 J Mathuni, R Engelke, B LÖCHEL, M Gutsche, G Genolet Galvanotechnik 100 (7), 2009 | | 2009 |
| Schnelles Removal von SU-8-Photoresist R ENGELKE, J MATHUNI, BL GUTSCHE, G GENOLET | | 2008 |
| force microscopy G Genolet, M Despont, P Vettiger, D Anselmetti, NF Rooij | | |
| Advancing manufacturing route for multi-level diffractive optical elements by combining nanoimprint lithography and LiGA process L Jacot-Descombes, A Schleunitz, MW Thesen, G Grützner, T Bagnoud, ... | | |
