Sputtering target with ultra-fine, oriented grains and method of making same JA Dunlop, J Yuan, JK Kardokus, RA Emigh US Patent 5,590,389, 1996 | 71 | 1996 |
Sputtering target with ultra-fine, oriented grains and method of making same JA Dunlop, J Yuan, JK Kardokus, RA Emigh US Patent 5,809,393, 1998 | 58 | 1998 |
Method for making tungsten-titanium sputtering targets and product JA Dunlop, H Rensing US Patent 4,838,935, 1989 | 51 | 1989 |
Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor JA Dunlop, M Goldstein, GB Feldewerth, C Shim, S Schittny US Patent 6,030,514, 2000 | 40 | 2000 |
Sputtering target with ultra-fine, oriented grains and method of making same JA Dunlop, J Yuan, JK Kardokus, RA Emigh US Patent 5,780,755, 1998 | 31 | 1998 |
Effects of Ti–W target processing methods on defect generation during very large scale integrated device fabrication J Dunlop, E Waterman, T Brat Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10 (2 …, 1992 | 12 | 1992 |
Effects of aluminum silicon copper sputtering target processing methods on thin film uniformity and process control during very large scale integrated device fabrication JA Dunlop, BY Pouliquen, TJ Drinnon, DT Wilcoxen, JC Huneke, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11 (4 …, 1993 | 6 | 1993 |
Tungsten-titanium sputtering target processing effects on particle generation and thin film properties for VLSI applications E Waterman, J Dunlop, T Brat Seventh International IEEE Conference on VLSI Multilevel Interconnection …, 1990 | 6 | 1990 |
Method for making low alpha count lead JA Dunlop, RW Smyth, GW Toop US Patent 4,770,698, 1988 | 6 | 1988 |
Ultrapure materials for alpha particle-sensitive applications JA Dunlop, KE Ritala, JR Gibbard, R Beauprie, B Pouliquen, JH Reeves, ... JOM 41, 18-21, 1989 | 4 | 1989 |
Sputtering coil product and method of making JA Dunlop, KT Hubert, JC Ruzicka, ANA Wragg, MD Blondell, WP Jardee, ... US Patent App. 15/746,647, 2018 | 3 | 2018 |
Method for making low alpha count lead JA Dunlop, EFG Milner, RW Smyth, GW Toop US Patent 4,915,802, 1990 | 3 | 1990 |
Method for making low alpha count lead JA Dunlop, RW Smyth, GW Toop US Patent App. 07/406,063, 1990 | 2 | 1990 |
Method for making low alpha count lead JA Dunlop, EFG Milner, RW Smyth, GW Toop US Patent 4,887,492, 1989 | 2 | 1989 |
ULTRAPURE MATERIALS FOR ALPHA PARTICLE-SENSITIVE APPLICATIONS JA DUNLOP, KE RITALA, JR GIBBARD, R BEAUPRIE JOURNAL OF METALS 40 (11), 62-62, 1988 | | 1988 |