The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures B Horváth, M Daksha, I Korolov, A Derzsi, J Schulze Plasma Sources Sci. Technol 26 (12), 124001, 2017 | 86 | 2017 |
The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas B Horváth, J Schulze, Z Donkó, A Derzsi Journal of Physics D: Applied Physics 51 (35), 355204, 2018 | 65 | 2018 |
eduPIC: an introductory particle based code for radio-frequency plasma simulation Z Donkó, A Derzsi, M Vass, B Horváth, S Wilczek, B Hartmann, ... Plasma Sources Science and Technology 30 (9), 095017, 2021 | 60 | 2021 |
Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms A Derzsi, B Horváth, Z Donkó, J Schulze Plasma Sources Science and Technology 29 (7), 074001, 2020 | 24 | 2020 |
Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon B Horváth, A Derzsi, J Schulze, I Korolov, P Hartmann, Z Donkó Plasma Sources Science and Technology 29 (5), 055002, 2020 | 17 | 2020 |
Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms A Derzsi, B Horváth, I Korolov, Z Donkó, J Schulze Journal of Applied Physics 126 (4), 2019 | 17 | 2019 |
Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results A Derzsi, P Hartmann, M Vass, B Horváth, M Gyulai, I Korolov, J Schulze, ... Plasma Sources Science and Technology 31 (8), 085009, 2022 | 14 | 2022 |
The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas B Horváth, Z Donkó, J Schulze, A Derzsi Plasma Sources Science and Technology 31 (4), 045025, 2022 | 9 | 2022 |
Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures M Vass, S Wilczek, A Derzsi, B Horváth, P Hartmann, Z Donkó Plasma Sources Science and Technology 31 (4), 045017, 2022 | 5 | 2022 |
Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas A Derzsi, M Vass, R Masheyeva, B Horvath, Z Donko, P Hartmann Plasma Sources Science and Technology 33 (2), 025005, 2024 | 3 | 2024 |
Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas CW Park, B Horváth, A Derzsi, J Schulze, JH Kim, Z Donkó, HC Lee Plasma Sources Science and Technology 32 (11), 115003, 2023 | 2 | 2023 |
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges K Noesges, M Klich, A Derzsi, B Horváth, J Schulze, RP Brinkmann, ... Plasma Sources Science and Technology 32 (8), 085008, 2023 | 1 | 2023 |
Electron power absorption mode transitions in low-pressure capacitively coupled plasmas in gas mixtures A Derzsi, M Vass, R Masheyeva, B Horvath, I Korolov, J Schulze, Z Donkó, ... APS Annual Gaseous Electronics Meeting Abstracts, ER4. 001, 2023 | | 2023 |
Electron power absorption in capacitively coupled plasmas operated in gas mixtures containing oxygen B Horvath, A Derzsi, P Hartmann, M Vass, J Schulze, I Korolov, M Gyulai, ... APS Annual Gaseous Electronics Meeting Abstracts, HT4. 039, 2022 | | 2022 |
Experimental and computational study of the electron power absorption in capacitively coupled neon-oxygen plasmas A Derzsi, P Hartmann, M Vass, B Horvath, M Gyulai, I Korolov, J Schulze, ... APS Annual Gaseous Electronics Meeting Abstracts, ER4. 001, 2022 | | 2022 |
The effect of secondary electrons in low-pressure capacitively coupled oxygen plasmas B Horvath, Z Donko, J Schulze, A Derzsi APS Annual Gaseous Electronics Meeting Abstracts, JW61. 003, 2021 | | 2021 |
The effects of surface processes on the plasma parameters in low-pressure multi-frequency capacitive discharges A Derzsi, B Horvath, Z Donko, J Schulze APS Annual Gaseous Electronics Meeting Abstracts, DT21. 006, 2021 | | 2021 |
The role of electron-induced secondary electrons in low-pressure capacitively coupled oxygen plasmas B Horvath, A Derzsi, Z Donko, J Schulze APS Annual Gaseous Electronics Meeting Abstracts, RW2. 015, 2020 | | 2020 |
Sensitivity analysis of PIC/MCC simulation results on the parameters of a realistic model for electron-surface interaction in low-pressure capacitively coupled radio-frequency … A Derzsi, B Horváth, P Hartmann, Z Donkó, D Schulenberg, I Korolov, ... APS Annual Gaseous Electronics Meeting Abstracts, LT2. 021, 2020 | | 2020 |
Computationally assisted in-situ measurement of secondary electron emission coefficients in CCPs B Horvath APS Annual Gaseous Electronics Meeting Abstracts, DM3. 003, 2020 | | 2020 |