Bifurcation-based mass sensing using piezoelectrically-actuated microcantilevers V Kumar, JW Boley, Y Yang, H Ekowaluyo, JK Miller, GTC Chiu, ... Applied Physics Letters 98 (15), 2011 | 180 | 2011 |
Quantum limit of quality factor in silicon micro and nano mechanical resonators S Ghaffari, SA Chandorkar, S Wang, EJ Ng, CH Ahn, V Hong, Y Yang, ... Scientific reports 3 (1), 3244, 2013 | 162 | 2013 |
Temperature dependence of the elastic constants of doped silicon EJ Ng, VA Hong, Y Yang, CH Ahn, CLM Everhart, TW Kenny Journal of microelectromechanical systems 24 (3), 730-741, 2014 | 150 | 2014 |
Mode-matching of wineglass mode disk resonator gyroscope in (100) single crystal silicon CH Ahn, EJ Ng, VA Hong, Y Yang, BJ Lee, I Flader, TW Kenny Journal of Microelectromechanical Systems 24 (2), 343-350, 2014 | 137 | 2014 |
Characterization of MEMS resonator nonlinearities using the ringdown response PM Polunin, Y Yang, MI Dykman, TW Kenny, SW Shaw Journal of Microelectromechanical Systems 25 (2), 297-303, 2016 | 105 | 2016 |
Accurate modeling of quality factor behavior of complex silicon MEMS resonators S Ghaffari, EJ Ng, CH Ahn, Y Yang, S Wang, VA Hong, TW Kenny Journal of Microelectromechanical Systems 24 (2), 276-288, 2014 | 98 | 2014 |
Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump CH Ahn, S Nitzan, EJ Ng, VA Hong, Y Yang, T Kimbrell, DA Horsley, ... Applied Physics Letters 105 (24), 2014 | 92 | 2014 |
Direct detection of Akhiezer damping in a silicon MEMS resonator J Rodriguez, SA Chandorkar, CA Watson, GM Glaze, CH Ahn, EJ Ng, ... Scientific reports 9 (1), 2244, 2019 | 89 | 2019 |
100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process D Senkal, S Askari, MJ Ahamed, EJ Ng, V Hong, Y Yang, CH Ahn, ... 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 88 | 2014 |
A unified epi-seal process for fabrication of high-stability microelectromechanical devices Y Yang, EJ Ng, Y Chen, IB Flader, TW Kenny Journal of Microelectromechanical Systems 25 (3), 489-497, 2016 | 80 | 2016 |
A 7ppm, 6/hr frequency-output MEMS gyroscope II Izyumin, MH Kline, YC Yeh, B Eminoglu, CH Ahn, VA Hong, Y Yang, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 74 | 2015 |
Modeling, analysis, and experimental validation of a bifurcation-based microsensor V Kumar, Y Yang, JW Boley, GTC Chiu, JF Rhoads Journal of microelectromechanical systems 21 (3), 549-558, 2012 | 71 | 2012 |
Disk resonator gyroscope with whole-angle mode operation P Taheri-Tehrani, O Izyumin, I Izyumin, CH Ahn, EJ Ng, VA Hong, Y Yang, ... 2015 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2015 | 68 | 2015 |
Nonlinearity of degenerately doped bulk-mode silicon MEMS resonators Y Yang, EJ Ng, PM Polunin, Y Chen, IB Flader, SW Shaw, MI Dykman, ... Journal of Microelectromechanical Systems 25 (5), 859-869, 2016 | 58 | 2016 |
Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating< 20 PPM scale factor stability D Senkal, EJ Ng, V Hong, Y Yang, CH Ahn, TW Kenny, AM Shkel 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 48 | 2015 |
Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators Y Chen, EJ Ng, DD Shin, CH Ahn, Y Yang, IB Flader, VA Hong, TW Kenny 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 46 | 2016 |
Phase noise reduction in an MEMS oscillator using a nonlinearly enhanced synchronization domain O Shoshani, D Heywood, Y Yang, TW Kenny, SW Shaw Journal of Microelectromechanical Systems 25 (5), 870-876, 2016 | 42 | 2016 |
Single-structure 3-axis Lorentz force magnetometer with sub-30 nT/√ HZ resolution M Li, EJ Ng, VA Hong, CH Ahn, Y Yang, TW Kenny, DA Horsley 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 40 | 2014 |
The long path from MEMS resonators to timing products E Ng, Y Yang, VA Hong, CH Ahn, DB Heinz, I Flader, Y Chen, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 35 | 2015 |
An etch hole-free process for temperature-compensated high Q encapsulated resonators EJ Ng, Y Yang, Y Chen, TW Kenny Proc. Solid-State Sens., Actuators, Microsyst. Workshop, 99-100, 2014 | 34 | 2014 |