An ultrathin integrated nanoelectromechanical transducer based on hafnium zirconium oxide M Ghatge, G Walters, T Nishida, R Tabrizian
Nature Electronics 2 (11), 506-512, 2019
57 2019 High M Ghatge, V Felmetsger, R Tabrizian
2018 IEEE International Frequency Control Symposium (IFCS), 1-4, 2018
21 2018 A 30-nm thick integrated hafnium zirconium oxide nano-electro-mechanical membrane resonator M Ghatge, G Walters, T Nishida, R Tabrizian
Applied Physics Letters 116 (4), 2020
20 2020 A non-reciprocal filter using asymmetrically transduced micro-acoustic resonators M Ghatge, G Walters, T Nishida, R Tabrizian
IEEE Electron Device Letters 40 (5), 800-803, 2019
16 2019 A nano-mechanical resonator with 10nm hafnium-zirconium oxide ferroelectric transducer M Ghatge, G Walters, T Nishida, R Tabrizian
2018 IEEE International Electron Devices Meeting (IEDM), 4.6. 1-4.6. 4, 2018
16 2018 Dispersion-engineered guided-wave resonators in anisotropic single-crystal substrates—Part I: Concept and analytical design M Ghatge, R Tabrizian
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66 …, 2019
14 2019 Physical insights on the ambiguous metal–graphene interface and proposal for improved contact resistance M Ghatge, M Shrivastava
IEEE Transactions on Electron Devices 62 (12), 4139-4147, 2015
14 2015 Power-insensitive silicon crystal-cut for amplitude-stable frequency synthesis M Ghatge, P Karri, R Tabrizian
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
13 2017 Dispersion-engineered guided-wave resonators in anisotropic single-crystal substrates—Part II: Numerical and experimental characterization M Ghatge, M Ramezani, R Tabrizian
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66 …, 2019
11 2019 High-Q UHF and SHF Bulk Acoustic Wave Resonators with Ten-Nanometer Hf0.5 Zr0.5 O2 Ferroelectric Transducer M Ghatge, G Walters, T Nishida, R Tabrizian
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
10 2019 Excitation of high-frequency in-plane bulk acoustic resonance modes in geometrically engineered hafnium zirconium oxide nano-electro-mechanical membrane F Hakim, M Ghatge, R Tabrizian
Applied Physics Letters 117 (6), 2020
8 2020 Thermo-acoustic engineering of GaN SAW resonators for stable clocks in extreme environments A Qamar, M Ghatge, R Tabrizian, M Rais-Zadeh
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
7 2020 High kt 2 .Q silicon Fin Bulk Acoustic Resonators (FinBAR) FOR chip-scale multi-band spectrum analysis M Ramezani, M Ghatge, R Tabrizian
2018 IEEE Micro Electro Mechanical Systems (MEMS), 158-161, 2018
7 2018 High-Q silicon fin bulk acoustic resonators for signal processing beyond the UHF M Ramezani, M Ghatge, R Tabrizian
2017 IEEE International Electron Devices Meeting (IEDM), 40.1. 1-40.1. 4, 2017
7 2017 d15 -Enhanced shear-extensional aluminum nitride resonators with k2 t > 4.4% for wide-band filters B Jo, M Ghatge, R Tabrizian
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
6 2017 A High- M Ghatge, G Walters, T Nishida, R Tabrizian
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
4 2020 Bilayer nano-waveguide resonators for sensing applications M Ghatge, R Tabrizian
2016 IEEE SENSORS, 1-3, 2016
4 2016 A super-high-frequency non-released silicon fin bulk acoustic resonator M Ramezani, M Ghatge, V Felmetsger, R Tabrizian
2019 IEEE MTT-S International Microwave Symposium (IMS), 516-519, 2019
3 2019 Exploiting elastic anharmonicity in aluminum nitride matrix for phase-synchronous frequency reference generation M Ghatge, R Tabrizian
Applied Physics Letters 112 (12), 2018
3 2018 The effect of elastic anharmonicity on the nonlinear behavior of waveguide-based AlN resonator M Ghatge, R Tabrizian
2017 Joint Conference of the European Frequency and Time Forum and IEEE …, 2017
3 2017