| Electron dynamics in low pressure capacitively coupled radio frequency discharges S Wilczek, J Schulze, RP Brinkmann, Z Donkó, J Trieschmann, ... Journal of Applied Physics 127 (18), 2020 | 117 | 2020 |
| The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges S Wilczek, J Trieschmann, J Schulze, E Schuengel, RP Brinkmann, ... Plasma Sources Science and Technology 24 (2), 024002, 2015 | 100 | 2015 |
| Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation J Schulze, Z Donko, T Lafleur, S Wilczek, RP Brinkmann Plasma Sources Science and Technology 27 (5), 055010, 2018 | 87 | 2018 |
| Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas S Wilczek, J Trieschmann, D Eremin, RP Brinkmann, J Schulze, ... Physics of Plasmas 23 (6), 2016 | 83 | 2016 |
| eduPIC: an introductory particle based code for radio-frequency plasma simulation Z Donkó, A Derzsi, M Vass, B Horváth, S Wilczek, B Hartmann, ... Plasma Sources Science and Technology 30 (9), 095017, 2021 | 60 | 2021 |
| The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single-and dual-frequency capacitively … M Daksha, A Derzsi, S Wilczek, J Trieschmann, T Mussenbrock, ... Plasma Sources Science and Technology 26 (8), 085006, 2017 | 53 | 2017 |
| Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches F Krüger, S Wilczek, T Mussenbrock, J Schulze Plasma Sources Science and Technology 28 (7), 075017, 2019 | 49 | 2019 |
| Disparity between current and voltage driven capacitively coupled radio frequency discharges S Wilczek, J Trieschmann, J Schulze, Z Donko, RP Brinkmann, ... Plasma Sources Science and Technology 27 (12), 125010, 2018 | 37 | 2018 |
| Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages P Hartmann, L Wang, K Nösges, B Berger, S Wilczek, RP Brinkmann, ... Plasma Sources Science and Technology 29 (7), 075014, 2020 | 30 | 2020 |
| Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure M Vass, S Wilczek, T Lafleur, RP Brinkmann, Z Donko, J Schulze Plasma Sources Science and Technology 29 (8), 085014, 2020 | 28 | 2020 |
| Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch … P Hartmann, L Wang, K Nösges, B Berger, S Wilczek, RP Brinkmann, ... Journal of Physics D: Applied Physics 54 (25), 255202, 2021 | 25 | 2021 |
| Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas M Vass, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze Plasma Sources Science and Technology 29 (2), 025019, 2020 | 25 | 2020 |
| Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode D Eremin, D Engel, D Krüger, S Wilczek, B Berger, M Oberberg, C Wölfel, ... Plasma Sources Science and Technology 32 (4), 045007, 2023 | 14 | 2023 |
| Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N2 M Vass, S Wilczek, J Schulze, Z Donko Plasma Sources Science and Technology 30 (10), 105010, 2021 | 13 | 2021 |
| Simulation and modeling of radio-frequency atmospheric pressure plasmas in the non-neutral regime M Klich, S Wilczek, Z Donko, RP Brinkmann Plasma Sources Science and Technology 31 (4), 045003, 2022 | 8 | 2022 |
| Interactions between flow fields induced by surface dielectric barrier discharge arrays A Böddecker, M Passmann, S Wilczek, L Schücke, I Korolov, R Skoda, ... Plasma Chemistry and Plasma Processing 43 (6), 1509-1530, 2023 | 7 | 2023 |
| Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation M Vass, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze Plasma Sources Science and Technology 30 (6), 065015, 2021 | 7 | 2021 |
| Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures M Vass, S Wilczek, A Derzsi, B Horváth, P Hartmann, Z Donkó Plasma Sources Science and Technology 31 (4), 045017, 2022 | 5 | 2022 |
| Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis M Vass, L Wang, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze Plasma Sources Science and Technology 31 (11), 115004, 2022 | 4 | 2022 |
| Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations M Klich, J Löwer, S Wilczek, T Mussenbrock, RP Brinkmann Plasma Sources Science and Technology 31 (4), 045014, 2022 | 4 | 2022 |
Julian SchulzeProfessor (Ruhr-University Bochum)Bestätigte E-Mail-Adresse bei aept.rub.de
