Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes B Hamelin, J Yang, A Daruwalla, H Wen, F Ayazi
Scientific reports 9 (1), 18698, 2019
44 2019 Localized eutectic trimming of polysilicon microhemispherical resonating gyroscopes B Hamelin, V Tavassoli, F Ayazi
IEEE Sensors Journal 14 (10), 3498-3505, 2014
25 2014 Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators J Yang, B Hamelin, F Ayazi
Journal of Microelectromechanical Systems 29 (6), 1473-1482, 2020
19 2020 A study of mode-matching and alignment in piezoelectric disk resonator gyros via femtosecond laser ablation Z Liu, A Daruwalla, B Hamelin, F Ayazi
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
18 2021 Capacitive Lamé Mode Resonators in J Yang, B Hamelin, F Ayazi
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
17 2020 High-Q monocrystalline silicon carbide disk resonators fabricated using DRIE of thick SiC-on-insulator substrates B Hamelin, SD Ko, J Yang, F Ayazi
16 * 2018 Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope B Hamelin, V Tavassoli, F Ayazi
SENSORS, 2013 IEEE, 1-4, 2013
12 2013 Monocrystalline 4H silicon carbide-on-insulator substrates for Nav-Grade planar BAW gyroscopes B Hamelin, J Yang, Z Liu, F Ayazi
2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2021
11 2021 Precision deep reactive ion etching of monocrystalline 4H-SiCOI for bulk acoustic wave resonators with ultra-low dissipation B Hamelin, J Yang, F Ayazi
Journal of the Electrochemical Society 168 (1), 017512, 2021
11 2021 Microscale pierced shallow shell resonators: A test vehicle to study surface loss B Hamelin, V Tavassoli, F Ayazi
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
10 2017 High-aspect-ratio sub-micron trench etching on SOI using wet metal-assisted chemical etching (MaCE) process B Hamelin, L Li, A Daruwalla, CP Wong, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
9 2016 Stiffness trimming of high Q MEMS resonators by excimer laser annealing of germanium thin film on silicon B Hamelin, A Daruwalla, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
9 2016 ULTRA-HIGH Q MONOCRYSTALLINE SILICON CARBIDE DISK RESONATORS ANCHORED UPON A PHONONIC CRYSTAL J Yang, B Hamelin, S Ko, F Ayazi
2018 Solid State Sensor, Actuator Microsystems Work, 83-86, 2018
8 2018 nano-precision deep reactive ion etching of monocrystalline 4H-SiCOI for bulk acoustic wave resonators with ultra-low dissipation F Ayazi, B Hamelin, J Yang
ECS Transactions 97 (4), 3, 2020
6 2020 Substrate-decoupled 3D micro-shell resonators V Tavassoli, B Hamelin, F Ayazi
2016 IEEE SENSORS, 1-3, 2016
6 2016 Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness B Hamelin, V Tavassoli, F Ayazi
2015 IEEE SENSORS, 1-4, 2015
6 2015 Method for frequency trimming a microelectromechanical resonator B Hamelin, F Ayazi
US Patent 10,947,111, 2021
2 2021 Acoustically Decoupled MEMS Devices F Ayazi, B Hamelin, J Yang
US Patent App. 18/451,675, 2024
2024 Acoustically decoupled MEMS devices F Ayazi, B Hamelin, J Yang
US Patent 11,777,468, 2023
2023 Progress towards chip-scale transverse laser cooling of thermal atomic beams C Li, B Hamelin, F Ayazi, C Raman
Bulletin of the American Physical Society 66, 2021
2021 
Dr. Farrokh AyaziDirector, Center for MEMS and Microsystems Technologies, Georgia Institute of TechnologyBestätigte E-Mail-Adresse bei gatech.edu
