| A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning … X Deng, G Dai, J Liu, X Hu, D Bergmann, J Zhao, R Tai, X Cai, Y Li, T Li, ... Ultramicroscopy 226, 113293, 2021 | 24 | 2021 |
| Investigation of shadow effect in laser-focused atomic deposition X Deng, Y Ma, P Zhang, W Zhang, S Chen, S Xiao, T Li Applied Surface Science 261, 464-469, 2012 | 23 | 2012 |
| Natural square ruler at nanoscale X Deng, J Liu, L Zhu, P He, X Cheng, T Li Applied Physics Express 11 (7), 075201, 2018 | 22 | 2018 |
| Amorphous Si critical dimension structures with direct Si lattice calibration Z Wu, Y Cai, X Wang, L Zhang, X Deng, X Cheng, T Li Chinese Physics B 28 (3), 030601, 2019 | 16 | 2019 |
| Silicon epitaxy on H-terminated Si (100) surfaces at 250 C X Deng, P Namboodiri, K Li, X Wang, G Stan, AF Myers, X Cheng, T Li, ... Applied surface science 378, 301-307, 2016 | 16 | 2016 |
| Scanning and splicing atom lithography for self-traceable nanograting fabrication X Deng, W Tan, Z Tang, Z Lin, X Cheng, T Li Nanomanufacturing and Metrology 5 (2), 179-187, 2022 | 15 | 2022 |
| Laser-focused Cr atomic deposition pitch standard as a reference standard L Lei, Y Li, X Deng, G Fan, X Cai, X Cheng, J Weng, G Liu, T Li Sensors and Actuators A: Physical 222, 184-193, 2015 | 15 | 2015 |
| Fabrication and measurement of traceable pitch standard with a big area at trans-scale X Deng, TB Li, LH Lei, Y Ma, R Ma, JJ Weng, Y Li Chinese Physics B 23 (9), 090601, 2014 | 15 | 2014 |
| Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings J Liu, J Zhao, X Deng, S Yang, C Xue, Y Wu, R Tai, X Hu, G Dai, T Li, ... Nanotechnology 32 (17), 175301, 2021 | 11 | 2021 |
| Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis J Chen, J Liu, X Wang, L Zhang, X Deng, X Cheng, T Li Measurement Science Review 17 (6), 264-268, 2017 | 9 | 2017 |
| Length traceability chain based on chromium atom transition frequency X Deng, Z Lin, G Dai, Z Tang, Z Xie, G Xiao, Z Yin, L Lei, T Jin, D Xue, ... arXiv preprint arXiv:2302.14633, 2023 | 8 | 2023 |
| Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation MSS Khan, LH Yang, X Deng, SF Mao, YB Zou, YG Li, HM Li, ZJ Ding Journal of Physics D: Applied Physics 54 (44), 445301, 2021 | 8 | 2021 |
| Spatially resolved scanning tunneling spectroscopy of single-layer steps on Si (100) surfaces X Wang, P Namboodiri, K Li, X Deng, R Silver Physical Review B 94 (12), 125306, 2016 | 8 | 2016 |
| Structured mirror array for two-dimensional collimation of a chromium beam in atom lithography WJ Zhang, Y Ma, TB Li, PP Zhang, X Deng, S Chen, SW Xiao Chinese Physics B 22 (2), 023701, 2013 | 8* | 2013 |
| Investigation of AFM tip characterization based on multilayer gratings W Ziruo, C Yanni, W Xingrui, Z Longfei, D Xiao, C Xinbin, L Tongbao 红外与激光工程 49 (2), 0213002-0213002, 2020 | 7 | 2020 |
| Calibrate the non-orthogonal error of AFM with two-dimensional self-traceable grating W Tan, Z Tang, G Xiao, Y Yao, L Lei, Q Li, T Jin, X Deng, X Cheng, T Li Ultramicroscopy 249, 113734, 2023 | 6 | 2023 |
| Characterization of a nano line width reference material based on metrological scanning electron microscope F Wang, Y Shi, W Li, X Deng, X Cheng, S Zhang, X Yu Chinese Physics B 31 (5), 050601, 2022 | 6 | 2022 |
| 基于四维协变量的光栅干涉系统频移理论研究 林子超， 姚玉林， 周通， 薛栋柏， 顾振杰， 邓晓， 程鑫彬， 李同保 计量科学与技术 66 (11), 3-11, 26, 2023 | 5 | 2023 |
| A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography Z Gu, X Deng, Y Cai, X Wang, F Yang International Conference on Optoelectronic and Microelectronic Technology …, 2020 | 5 | 2020 |
| Analysis of Cr atom focusing deposition properties in the double half Gaussian standing wave field S Chen, Y Ma, PP Zhang, JB Wang, X Deng, SW Xiao, R Ma, TB Li Chinese Physics B 23 (2), 020301, 2013 | 5 | 2013 |
Xinbin ChengTongji UniversityBestätigte E-Mail-Adresse bei tongji.edu.cn