Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes B Hamelin, J Yang, A Daruwalla, H Wen, F Ayazi
Scientific reports 9 (1), 18698, 2019
44 2019 A review of the Hénon map and its physical interpretations H Wen
School of Physics Georgia Institute of Technology, Atlanta, GA, 2014
44 2014 An FPGA-Based Interface System for High Frequency Bulk-Acoustic-Wave (BAW) Micro-Gyroscopes with In-Run Automatic Mode-Matching C Li, H Wen, S Wisher, A Norouzpour-Shirazi, J Lei, H Chen, F Ayazi
IEEE Transactions on Instrumentation and Measurement, 2019
40 2019 Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units H Wen, A Daruwalla, F Ayazi
Microsystems & nanoengineering 3, 16092, 2017
38 2017 Detection of pathological mechano-acoustic signatures using precision accelerometer contact microphones in patients with pulmonary disorders P Gupta, H Wen, L Di Francesco, F Ayazi
Scientific Reports 11 (1), 13427, 2021
35 2021 Substrate-decoupled silicon disk resonators having degenerate gyroscopic modes with Q in excess of 1-million R Mirjalili, H Wen, DE Serrano, F Ayazi
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
30 2015 Wafer-level-packaged HARPSS+ MEMS platform: Integration of robust timing and inertial measurement units (TIMU) on a single chip H Wen, A Daruwalla, Y Jeong, P Gupta, J Choi, CS Liu, F Ayazi
2018 IEEE/ION Position, Location and Navigation Symposium (PLANS), 261-266, 2018
25 2018 A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes C Li, H Wen, H Chen, F Ayazi
Sensors and Actuators A: Physical 313, 112181, 2020
23 2020 A Hermetically-Sealed 2.9MHz H Wen, A Daruwalla, CS Liu, F Ayazi
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
23 2020 A High-Frequency Resonant Framed-Annulus Pitch or Roll Gyroscope for Robust High-Performance Single-Chip Inertial Measurement Units H Wen, A Daruwalla, CS Liu, F Ayazi
Journal of Microelectromechanical Systems 27 (6), 995-1008, 2018
23 2018 A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes H Wen, A Daruwalla, Y Jeong, P Gupta, J Choi, C Liu, F Ayazi
Micro Electro Mechanical Systems (MEMS), 2018 IEEE, 105-108, 2018
21 2018 An out-of-plane" hinge-shaped" nano-gap accelerometer with high sensitivity and wide bandwidth Y Jeong, A Daruwalla, H Wen, F Ayazi
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
21 2017 Low motional impedance distributed Lamé mode resonators for high frequency timing applications A Daruwalla, H Wen, CS Liu, F Ayazi
Microsystems & Nanoengineering 6 (1), 53, 2020
20 2020 A piezoelectric resonant accelerometer for above 140db linear dynamic range high-G applications S Shin, A Daruwalla, M Gong, H Wen, F Ayazi
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
15 2019 A dual-axis resonant accelerometer based on electrostatic stiffness modulation in epi-seal process S Shin, H Wen, HK Kwon, GD Vukasin, TW Kenny, F Ayazi
2019 IEEE SENSORS, 1-4, 2019
14 2019 Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes H Wen
Springer Nature, 2019
14 2019 Toward inertial-navigation-on-chip: The physics and performance scaling of multi degree-of-freedom resonant MEMS gyroscopes H Wen
Georgia Institute of Technology, 2018
14 2018 HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators H Wen, A Daruwalla, R Mirjalili, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
14 2016 Diagnosis of peripheral artery disease using backflow abnormalities in proximal recordings of accelerometer contact microphone (ACM) A Shokouhmand, H Wen, S Khan, JA Puma, A Patel, P Green, F Ayazi, ...
IEEE Journal of Biomedical and Health Informatics 27 (1), 274-285, 2022
13 2022 Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation A Daruwalla, H Wen, R Mirjalili, F Ayazi
2018 IEEE Micro Electro Mechanical Systems (MEMS), 1008-1011, 2018
13 2018 
Dr. Farrokh AyaziDirector, Center for MEMS and Microsystems Technologies, Georgia Institute of TechnologyBestätigte E-Mail-Adresse bei gatech.edu