Tip-and laser-based 3D nanofabrication in extended macroscopic working areas I Ortlepp, T Fröhlich, R Füßl, J Reger, C Schäffel, S Sinzinger, S Strehle, ... Nanomanufacturing and Metrology 4 (3), 132-148, 2021 | 17 | 2021 |
Fundamental investigations in the design of five-axis nanopositioning machines for measurement and fabrication purposes R Schienbein, F Fern, R Theska, S Supreeti, R Füßl, E Manske Nanomanufacturing and metrology 4, 156-164, 2021 | 10 | 2021 |
Efficient empirical determination of maximum permissible error in coordinate metrology A Thompson, N Southon, F Fern, G Stupfler, R Leach Measurement Science and Technology 32 (10), 105013, 2021 | 8 | 2021 |
Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base F Fern, R Füßl, G Eichfelder, E Manske, M Kühnel Measurement Science and Technology 32 (4), 045001, 2021 | 8 | 2021 |
Metrologie in fünfachsigen Nanomess-und Nanopositioniermaschinen F Fern Institut für Prozessmess- und Sensortechnik, 2020 | 7 | 2020 |
Novel monolithic pendulum tiltmeter with Nanorad resolution M Kühnel, F Fern, T Fröhlich tm-Technisches Messen 85 (4), 244-251, 2018 | 5 | 2018 |
In-situ-Messung von Bewegungsabweichungen serieller Rotationsachsen zur Anwendung in Nanomessmaschinen/In situ error measurement of serial rotational devices for the … F Fern, R Schienbein, R Theska, R Füßl, M Kühnel, L Weidenfeller, ... tm-Technisches Messen 86 (s1), 77-81, 2019 | 4 | 2019 |
Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier-und Nanomessmaschinen/Applications of a fiber coupled chromatic confocal sensor in … J Kirchner, R Mastylo, U Gerhardt, F Fern, L Weidenfeller, T Sasiuk, ... tm-Technisches Messen 86 (s1), 17-21, 2019 | 4 | 2019 |
Development and implementation of a rotating nanoimprint lithography tool for orthogonal imprinting on edges of curved surfaces S Supreeti, R Schienbein, P Feßer, F Fern, M Hoffmann, S Sinzinger Nanomanufacturing and Metrology 4 (3), 175-180, 2021 | 3 | 2021 |
Measurement uncertainty analysis on a five-axis nano coordinate measuring machine NMM-5D following a vectorial approach F Fern, R Fuessl, E Manske, R Schienbein, R Theska, I Ortlepp, ... TM-TECHNISCHES MESSEN 88 (2), 61-70, 2021 | 3 | 2021 |
Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines F Fern, R Füßl, R Schienbein, R Theska Sensors and Measuring Systems; 19th ITG/GMA-Symposium, 1-4, 2018 | 3 | 2018 |
Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz F Fern, R Füßl, E Manske, R Schienbein, R Theska, I Ortlepp, ... tm-Technisches Messen 88 (2), 61-70, 2021 | 2 | 2021 |
Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines J Kirchner, R Mastylo, U Gerhardt, F Fern, R Schienbein, L Weidenfeller, ... TM-TECHNISCHES MESSEN 86, S17-S21, 2019 | 1 | 2019 |
Correction: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes R Schienbein, F Fern, R Theska, S Supreeti, R Füßl, E Manske Nanomanufacturing and Metrology 5 (4), 437-437, 2022 | | 2022 |
euspen’s 21st International Conference & Exhibition, Copenhagen, DK, June 2021 I Ortlepp, F Fern, R Schienbein, S Supreeti, R Füßl, R Theska, S Sinzinger, ... | | |
euspen’s 19th International Conference & Exhibition, Bilbao, ES, June 2019 R Schienbein, F Fern, R Theska, R Füßl | | |
euspen’s 18th International Conference & Exhibition, Venice, IT, June 2018 R Schienbein, F Weigert, F Fern, R Theska, R Füßl | | |