| Piezoelectric MEMS resonators H Bhugra, G Piazza Springer International Publishing, 2017 | 238 | 2017 |
| Effect of phonon interactions on limiting the fQ product of micromechanical resonators R Tabrizian, M Rais-Zadeh, F Ayazi TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 232 | 2009 |
| Ferroelectricity in doped hafnium oxide: materials, properties and devices U Schroeder, CS Hwang, H Funakubo Woodhead Publishing, 2019 | 155 | 2019 |
| Resonant MEMS: fundamentals, implementation, and application GK Fedder, C Hierold, JG Korvink, O Tabata John Wiley & Sons, 2015 | 137 | 2015 |
| Temperature-stable silicon oxide (SilOx) micromechanical resonators R Tabrizian, G Casinovi, F Ayazi IEEE Transactions on Electron Devices 60 (8), 2656-2663, 2013 | 85 | 2013 |
| An ultrathin integrated nanoelectromechanical transducer based on hafnium zirconium oxide M Ghatge, G Walters, T Nishida, R Tabrizian Nature Electronics 2 (11), 506-512, 2019 | 57 | 2019 |
| Dual-mode AlN-on-silicon micromechanical resonators for temperature sensing JL Fu, R Tabrizian, F Ayazi IEEE Transactions on Electron Devices 61 (2), 591-597, 2014 | 54 | 2014 |
| A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability R Tabrizian, M Pardo, F Ayazi 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 54 | 2012 |
| High-frequency AlN-on-silicon resonant square gyroscopes R Tabrizian, M Hodjat-Shamami, F Ayazi Journal of Microelectromechanical Systems 22 (5), 1007-1009, 2013 | 48 | 2013 |
| A±0.3 ppm oven-controlled MEMS oscillator using structural resistance-based temperature sensing CS Liu, R Tabrizian, F Ayazi IEEE transactions on ultrasonics, ferroelectrics, and frequency control 65 …, 2018 | 46 | 2018 |
| A segmented‐target sputtering process for growth of sub‐50 nm ferroelectric scandium–aluminum–nitride films with composition and stress tuning S Rassay, F Hakim, C Li, C Forgey, N Choudhary, R Tabrizian physica status solidi (RRL)–Rapid Research Letters 15 (5), 2100087, 2021 | 45 | 2021 |
| Energy dissipation in micromechanical resonators F Ayazi, L Sorenson, R Tabrizian Micro-and Nanotechnology Sensors, Systems, and Applications III 8031, 371-383, 2011 | 42 | 2011 |
| Tunable piezoelectric MEMS resonators for real-time clock DE Serrano, R Tabrizian, F Ayazi 2011 Joint Conference of the IEEE International Frequency Control and the …, 2011 | 38 | 2011 |
| Electrostatically tunable piezoelectric-on-silicon micromechanical resonator for real-time clock DE Serrano, R Tabrizian, F Ayazi IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59 …, 2012 | 37 | 2012 |
| Complementary-switchable dual-mode SHF scandium aluminum nitride BAW resonator D Mo, S Dabas, S Rassay, R Tabrizian IEEE Transactions on Electron Devices 69 (8), 4624-4631, 2022 | 35 | 2022 |
| Temperature-stable high-Q AlN-on-silicon resonators with embedded array of oxide pillars R Tabrizian, G Casinovi, F Ayazi Solid-state sensors, actuators, and microsystems workshop, 100-101, 2010 | 34 | 2010 |
| Intrinsically switchable ferroelectric scandium aluminum nitride lamb-mode resonators S Rassay, D Mo, C Li, N Choudhary, C Forgey, R Tabrizian IEEE Electron Device Letters 42 (7), 1065-1068, 2021 | 33 | 2021 |
| A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope M Hodjat-Shamami, A Norouzpour-Shirazi, R Tabrizian, F Ayazi 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 31 | 2015 |
| Sputter Process Optimization for Al0.7Sc0.3N Piezoelectric Films V Felmetsger, M Mikhov, M Ramezani, R Tabrizian 2019 IEEE International Ultrasonics Symposium (IUS), 2600-2603, 2019 | 28 | 2019 |
| Dynamic tuning of MEMS resonators via electromechanical feedback A Norouzpour-Shirazi, M Hodjat-Shamami, R Tabrizian, F Ayazi IEEE transactions on ultrasonics, ferroelectrics, and frequency control 62 …, 2015 | 25 | 2015 |
