Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface D Longrie, S Deng, JW Maes
US Patent 11,450,529, 2022
260 2022 Germanium surface passivation and atomic layer deposition of high-k dielectrics—a tutorial review on Ge-based MOS capacitors Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, XP Qu, ...
Semiconductor Science and Technology 27 (7), 074012, 2012
209 2012 Selective passivation and selective deposition EE Tois, SP Haukka, RH Matero, E Färm, D Longrie, H Suemori, JW Maes, ...
US Patent 11,094,535, 2021
68 2021 Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer J Wan, SR Deng, R Yang, Z Shu, BR Lu, SQ Xie, Y Chen, E Huq, R Liu, ...
Microelectronic Engineering 86 (4-6), 1238-1242, 2009
56 2009 Atomic layer deposition-based synthesis of photoactive TiO 2 nanoparticle chains by using carbon nanotubes as sacrificial templates S Deng, SW Verbruggen, Z He, DJ Cott, PM Vereecken, JA Martens, ...
Rsc Advances 4 (23), 11648-11653, 2014
55 2014 Air-based photoelectrochemical cell capturing water molecules from ambient air for hydrogen production J Rongé, S Deng, SP Sree, T Bosserez, SW Verbruggen, NK Singh, ...
RSC advances 4 (55), 29286-29290, 2014
54 2014 Nanostructured TiO2/carbon nanosheet hybrid electrode for high-rate thin-film lithium-ion batteries S Moitzheim, CS Nimisha, S Deng, DJ Cott, C Detavernier, PM Vereecken
Nanotechnology 25 (50), 504008, 2014
48 2014 Photocatalytic acetaldehyde oxidation in air using spacious TiO2 films prepared by atomic layer deposition on supported carbonaceous sacrificial templates SW Verbruggen, S Deng, M Kurttepeli, DJ Cott, PM Vereecken, S Bals, ...
Applied Catalysis B: Environmental 160, 204-210, 2014
43 2014 Selective passivation and selective deposition JWH Maes, ME Givens, SP Haukka, V Paruchuri, IJ Raaijmakers, S Deng, ...
US Patent 11,145,506, 2021
41 2021 Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices S Deng, Q Xie, D Deduytsche, M Schaekers, D Lin, M Caymax, A Delabie, ...
Applied Physics Letters 99 (5), 2011
38 2011 Heterogeneous TiO2 /V2 O5 /Carbon Nanotube Electrodes for Lithium-Ion Batteries M Kurttepeli, S Deng, F Mattelaer, DJ Cott, P Vereecken, J Dendooven, ...
ACS Applied Materials & Interfaces 9 (9), 8055-8064, 2017
36 2017 Cu adhesion on tantalum and ruthenium surface: Density functional theory study SF Ding, SR Deng, HS Lu, YL Jiang, GP Ru, DW Zhang, XP Qu
Journal of Applied Physics 107 (10), 2010
33 2010 Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO 2 deposited using atomic … SP Sree, J Dendooven, K Masschaele, HM Hamed, S Deng, S Bals, ...
Nanoscale 5 (11), 5001-5008, 2013
32 2013 Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications C Gao, ZC Xu, SR Deng, J Wan, Y Chen, R Liu, E Huq, XP Qu
Microelectronic Engineering 88 (8), 2100-2104, 2011
32 2011 Porous nanostructured metal oxides synthesized through atomic layer deposition on a carbonaceous template followed by calcination S Deng, M Kurttepeli, DJ Cott, S Bals, C Detavernier
Journal of Materials Chemistry A 3 (6), 2642-2649, 2015
31 2015 22 nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching C Gao, SR Deng, J Wan, BR Lu, R Liu, E Huq, XP Qu, Y Chen
Microelectronic engineering 87 (5-8), 927-930, 2010
28 2010 Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing S Deng, SW Verbruggen, S Lenaerts, JA Martens, S Van den Berghe, ...
Journal of Vacuum Science & Technology A 32 (1), 2014
24 2014 High-Performance Ge MOS Capacitors by Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, Y Jiang, X Qu, ...
IEEE electron device letters 32 (12), 1656-1658, 2011
19 2011 Synthesis of a 3D network of Pt nanowires by atomic layer deposition on a carbonaceous template S Deng, M Kurttepeli, S Deheryan, DJ Cott, PM Vereecken, JA Martens, ...
Nanoscale 6 (12), 6939-6944, 2014
17 2014 Surface plasmon polariton coupling induced transmission of subwavelength metallic grating with waveguide layer ZC Xu, B Dong, J Xue, R Yang, BR Lu, S Deng, ZF Li, W Lu, Y Chen, ...
Microelectronic engineering 87 (5-8), 1297-1299, 2010
12 2010 
jing wanFudan University (M.S) --> IMEP-LAHC (Ph.D.) --> Globalfoundries (Sr. Eng.)->Fudan University(Prof.)
