Παρακολούθηση
Jihoon Seo
Jihoon Seo
Assistant Professor of Chemical & Biomolecular Eng, Clarkson University
Η διεύθυνση ηλεκτρονικού ταχυδρομείου έχει επαληθευτεί στον τομέα clarkson.edu - Αρχική σελίδα
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Παρατίθεται από
Παρατίθεται από
Έτος
A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization
J Seo
Journal of Materials Research 36, 235-257, 2021
1242021
Synergistic protective effect of a BN-carbon separator for highly stable lithium sulfur batteries
PJH Kim, J Seo, K Fu, J Choi, Z Liu, J Kwon, L Hu, U Paik
NPG Asia Materials 9 (4), e375-e375, 2017
1122017
Synergistic ultrathin functional polymer-coated carbon nanotube interlayer for high performance lithium–sulfur batteries
JH Kim, J Seo, J Choi, D Shin, M Carter, Y Jeon, C Wang, L Hu, U Paik
ACS applied materials & interfaces 8 (31), 20092-20099, 2016
1102016
Almost complete removal of ceria particles down to 10 nm size from silicon dioxide surfaces
J Seo, A Gowda, SV Babu
ECS Journal of Solid State Science and Technology 7 (5), P243, 2018
822018
Ammonium persulfate and potassium oleate containing silica dispersions for chemical mechanical polishing for cobalt interconnect applications
CK Ranaweera, NK Baradanahalli, R Popuri, J Seo, SV Babu
ECS Journal of Solid State Science and Technology 8 (5), P3001, 2018
682018
Role of the surface chemistry of ceria surfaces on silicate adsorption
J Seo, JW Lee, J Moon, W Sigmund, U Paik
ACS applied materials & interfaces 6 (10), 7388-7394, 2014
582014
Role of the oxidation state of cerium on the ceria surfaces for silicate adsorption
J Seo, J Moon, JH Kim, K Lee, J Hwang, H Yoon, DK Yi, U Paik
Applied Surface Science 389, 311-315, 2016
572016
Post-CMP cleaning solutions for the removal of organic contaminants with reduced galvanic corrosion at copper/cobalt interface for advanced Cu interconnect applications
J Seo, SH Vegi, SV Babu
ECS Journal of Solid State Science and Technology 8 (8), P379, 2019
492019
Formation of cobalt-BTA complexes and their removal from various surfaces relevant to cobalt interconnect applications
J Seo, SH Vegi, CK Ranaweera, NK Baradanahalli, JH Han, D Koli, ...
ECS Journal of Solid State Science and Technology 8 (5), P3009, 2018
422018
Multi-objective optimization of tungsten CMP slurry for advanced semiconductor manufacturing using a response surface methodology
J Seo, JH Kim, M Lee, K You, J Moon, DH Lee, U Paik
Materials & Design 117, 131-138, 2017
392017
Preparation and characterization of slurry for chemical mechanical planarization (CMP)
J Seo, U Paik
Advances in chemical mechanical planarization (CMP), 273-298, 2016
362016
Two-dimensional Nafion nanoweb anion-shield for improved electrochemical performances of lithium–sulfur batteries
JH Kim, J Choi, J Seo, J Kwon, U Paik
Journal of Materials Chemistry A 4 (29), 11203-11206, 2016
342016
Size-dependent interactions of silica nanoparticles with a flat silica surface
J Seo, JH Kim, M Lee, J Moon, DK Yi, U Paik
Journal of colloid and interface science 483, 177-184, 2016
292016
Cleaning solutions for removal of∼ 30 nm ceria particles from proline and citric acid containing slurries deposited on silicon dioxide and silicon nitride surfaces
A Gowda, J Seo, CK Ranaweera, SV Babu
ECS Journal of Solid State Science and Technology 9 (4), 044013, 2020
282020
Ce3+-enriched core–shell ceria nanoparticles for silicate adsorption
K Kim, J Seo, M Lee, J Moon, K Lee, DK Yi, U Paik
Journal of Materials Research 32, 2829-2836, 2017
222017
Interpolymer complexes of poly (acrylic acid) and poly (ethylene glycol) for low dishing in STI CMP
J Seo, J Moon, S Moon, U Paik
Applied Surface Science 353, 499-503, 2015
222015
Perspective—recent advances and thoughts on Ceria particle applications in chemical mechanical planarization
J Seo, K Kim, H Kang, SV Babu
ECS Journal of Solid State Science and Technology 11 (8), 084003, 2022
212022
Control of adhesion force between ceria particles and polishing pad in shallow trench isolation chemical mechanical planarization
J Seo, J Moon, JY Bae, KS Yoon, W Sigmund, U Paik
Journal of nanoscience and nanotechnology 14 (6), 4351-4356, 2014
192014
Two decades of ceria nanoparticles research: structure, properties and emerging applications
A Othman, A Gowda, D Andreescu, MH Hassan, SV Babu, J Seo*, ...
Materials Horizons,11, 3213-3266, 2024
182024
Polishing slurry composition
JH Yoon, SC Hong, YH Yoon, U Paik, JH Seo, KJ Kim, KC Lee
US Patent App. 15/325,095, 2017
162017
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