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Shankar Swaminathan, PhD
Director of Process Technology at ASM America
Verified email at asm.com
Cited by 9535
Semiconductors
Atomic Layer Deposition
High-k Gate Dielectrics
Plasma Deposition
Thermal Deposition
Lisa Edge
HRL Laboratories
Verified email at hrl.com
Cited by 3901
Epitaxial thin films
high-K gate dielectrics
Dr. Santosh Sahoo
ASML US, Wilton, CT
Cited by 276
High-k gate dielectrics
Solar cells
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