| Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD” E Ahvenniemi, AR Akbashev, S Ali, M Bechelany, M Berdova, S Boyadjiev, ... Journal of Vacuum Science & Technology A 35 (1), 2017 | 124 | 2017 |
| Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics M Mattinen, G Popov, M Vehkamaki, PJ King, K Mizohata, P Jalkanen, ... Chemistry of Materials 31 (15), 5713-5724, 2019 | 106 | 2019 |
| Atomic Layer Deposition of PbI2 Thin Films G Popov, M Mattinen, T Hatanpää, M Vehkamäki, M Kemell, ... Chemistry of Materials 31 (3), 1101-1109, 2019 | 67 | 2019 |
| Scalable Route to the Fabrication of CH3NH3PbI3 Perovskite Thin Films by Electrodeposition and Vapor Conversion G Popov, M Mattinen, ML Kemell, M Ritala, M Leskelä ACS omega 1 (6), 1296-1306, 2016 | 56 | 2016 |
| Atomic Layer Deposition of Photoconductive Cu2O Thin Films T Iivonen, MJ Heikkilä, G Popov, HE Nieminen, M Kaipio, M Kemell, ... ACS omega 4 (6), 11205-11214, 2019 | 49 | 2019 |
| Atomic layer deposition of PbS thin films at low temperatures G Popov, G Bačić, M Mattinen, T Manner, H Lindström, H Seppänen, ... Chemistry of Materials 32 (19), 8216-8228, 2020 | 35 | 2020 |
| Low-temperature atomic layer deposition of copper (II) oxide thin films T Iivonen, J Hämäläinen, B Marchand, K Mizohata, M Mattinen, G Popov, ... Journal of Vacuum Science & Technology A 34 (1), 2016 | 33 | 2016 |
| Van der Waals epitaxy of continuous thin films of 2D materials using atomic layer deposition in low temperature and low vacuum conditions M Mattinen, PJ King, G Popov, J Hämäläinen, MJ Heikkilä, M Leskelä, ... 2D Materials 7 (1), 011003, 2019 | 23 | 2019 |
| A low-temperature thermal ALD process for nickel utilizing dichlorobis (triethylphosphine) nickel (ii) and 1, 4-bis (trimethylgermyl)-1, 4-dihydropyrazine A Vihervaara, T Hatanpää, K Mizohata, M Chundak, G Popov, M Ritala Dalton Transactions 51 (29), 10898-10908, 2022 | 15 | 2022 |
| Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors S Ghafourisaleh, G Popov, M Leskela, M Putkonen, M Ritala ACS omega 6 (27), 17545-17554, 2021 | 14 | 2021 |
| Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films A Weiß, J Goldmann, S Kettunen, G Popov, T Iivonen, M Mattinen, ... Advanced Materials Interfaces 10 (3), 2201860, 2023 | 9 | 2023 |
| Atomic Layer Deposition of CsI and CsPbI3 A Weiß, G Popov, E Atosuo, A Vihervaara, P Jalkanen, M Vehkamaki, ... Chemistry of Materials 34 (13), 6087-6097, 2022 | 9 | 2022 |
| Area-Selective Etching of Poly (methyl methacrylate) Films by Catalytic Decomposition V Lasonen, A Vihervaara, G Popov, E Tois, L Mester, M Karimi, ... Chemistry of Materials 35 (15), 6097-6108, 2023 | 6 | 2023 |
| Atomic Layer Deposition and Pulsed Chemical Vapor Deposition of SnI2 and CsSnI3 A Weiss, M Terletskaia, G Popov, K Mizohata, M Leskelä, M Ritala, ... Chemistry of Materials 35 (20), 8722-8732, 2023 | 4 | 2023 |
| Atomic layer deposition of molybdenum carbide thin films PR Kärkkäinen, G Popov, T Hatanpää, A Kemppinen, K Kohopää, ... Advanced Materials Interfaces 11 (26), 2400270, 2024 | 3 | 2024 |
| Atomic Layer Deposition of TixFe2-xO3 Photoanodes and Photocurrent Response Optimization by using Response Surface Methodology A Deb, A Vihervaara, G Popov, M Chundak, AO Abdelaal, HLS Santos, ... | | 2024 |
| Thin Film Deposition Processes for Halide Perovskites G Popov University of Helsinki, 2023 | | 2023 |
| Vapor deposition processes and a deposition assembly G Popov, A Weiss, M Ritala, M Kemell US Patent App. 18/162,454, 2023 | | 2023 |
| Atomic layer deposition of PbCl₂, PbBr₂ and mixed lead halide (Cl, Br, I) PbXₙY₂₋ₙ thin films G Popov, G Bačić, C Van Dijck, LS Junkers, A Weiß, M Mattinen, ... Dalton Transactions 51 (39), 15142-15157, 2022 | | 2022 |
| On the early history of atomic layer deposition: most significant works and applications A Jaan, A Esko, RA Andrew, B Maria, C Mikhail, D Viktor, E Simon, ... ALD 2016 Ireland, 2016 | | 2016 |
Markku LeskelaProfessor of Inorganic Chemistry, University of HelsinkiVerified email at helsinki.fi