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Jie Li
Jie Li
Verified email at imec.be
Title
Cited by
Cited by
Year
Characterization of sp2/sp3 hybridization ratios of hydrogenated amorphous carbon films deposited in C2H2 inductively coupled plasmas
J Li, SJ Kim, S Han, H Chae
Surface and Coatings Technology 422, 127514, 2021
272021
Electrospray deposition of silver nanowire films for transparent electrodes
J Li, SM Cho, H Chae
Journal of Nanoscience and Nanotechnology 12 (7), 5981-5985, 2012
142012
Dual‐logic‐in‐memory implementation with orthogonal polarization of van der Waals ferroelectric heterostructure
J Niu, S Jeon, D Kim, S Baek, HH Yoo, J Li, JS Park, Y Lee, S Lee
InfoMat 6 (2), e12490, 2024
132024
Etching characteristics of hydrogenated amorphous carbon with different sp2/sp3 hybridization ratios in CF4/O2 plasmas
J Li, SJ Kim, S Han, Y Kim, H Chae
Plasma Processes and Polymers 18 (11), 2100075, 2021
112021
Ion-Enhanced Etching Characteristics of sp2-Rich Hydrogenated Amorphous Carbons in CF4 Plasmas and O2 Plasmas
J Li, Y Kim, S Han, H Chae
Materials 14 (11), 2941, 2021
92021
Surface wettability control and fluorination modeling of amorphous carbon films fluorinated with CF4 plasma
J Li, J Niu, Y Kim, H Chae
Applied Surface Science 635, 157668, 2023
72023
Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas
J Li, Y Kim, S Han, J Niu, H Chae
Plasma Chemistry and Plasma Processing 42 (4), 989-1002, 2022
52022
Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes
J Li, H Chae
Korean Journal of Chemical Engineering 40 (6), 1268-1276, 2023
32023
Reconfigurable Sequential-Logic-in-Memory Implementation Utilizing Ferroelectric Field-Effect Transistors
J Niu, D Kim, J Li, J Lyu, Y Lee, S Lee
ACS nano, 2025
2025
In-poor IGZO: superior resilience to hydrogen in forming gas anneal and PBTI
A Kruv, MJ van Setten, A Chasin, D Matsubayashi, HFW Dekkers, A Pavel, ...
arXiv preprint arXiv:2412.07362, 2024
2024
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
J Li, L Souriau, S Kundu, P Bezard, F Lazzarino
Electrochemical Society Meeting Abstracts prime2024, 1788-1788, 2024
2024
Bidirectional Polarization-Integrated Van Der Waals Ferroelectric Field-Effect Transistor for Multi-State Storage and Dual-Logic-in-Memory Computing
J Niu, S Jeon, D Kim, S Baek, HH Yoo, J Li, J Park, Y Lee, S Lee
Electrochemical Society Meeting Abstracts prime2024, 4895-4895, 2024
2024
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
J Li, S Kundu, L Souriau, P Bezard, R Izmailov, F Lazzarino
Plasma Processes and Polymers, e2400186, 2024
2024
First Demonstration of 3D Stacked FeFET Memory Devices with Vertical IGZO Channel-Last Process for Dense Non-Volatile Memory
R Izmailov, N Ronchi, J Li, MI Popovici, K Katcko, Z Chen, L Breuil, ...
International Conference on Solid State Devices and Materials, 2024
2024
Transformer-Coupled Toroidal Remote Plasma Source for Chamber Cleaning with NF₃ and CF₄
D Ka, J Li, H Chae
한국진공학회 학술발표회초록집, 214-214, 2018
2018
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