| Materials, design, and characteristics of bulk acoustic wave resonator: A review Y Liu, Y Cai, Y Zhang, A Tovstopyat, S Liu, C Sun Micromachines 11 (7), 630, 2020 | 264 | 2020 |
| Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications Y Zou, C Gao, J Zhou, Y Liu, Q Xu, Y Qu, WJ Liu, JBW Soon, Y Cai, C Sun Microsystems & Nanoengineering 8 (1), 124, 2022 | 63 | 2022 |
| Band structure, effective mass, and carrier mobility of few-layer h-AlN under layer and strain engineering Y Cai, Y Liu, Y Xie, Y Zou, C Gao, Y Zhao, S Liu, H Xu, J Shi, S Guo, ... APL Materials 8 (2), 2020 | 42 | 2020 |
| Design and performance of ScAlN/AlN trapezoidal cantilever-based MEMS piezoelectric energy harvesters Y Liu, B Hu, Y Cai, J Zhou, W Liu, A Tovstopyat, G Wu, C Sun IEEE Transactions on Electron Devices 68 (6), 2971-2976, 2021 | 33 | 2021 |
| A novel trapezoidal ScAlN/AlN-based MEMS piezoelectric accelerometer B Hu, Y Liu, B Lin, G Wu, W Liu, C Sun IEEE Sensors Journal 21 (19), 21277-21284, 2021 | 29 | 2021 |
| A novel tri-axial piezoelectric MEMS accelerometer with folded beams Y Liu, B Hu, Y Cai, W Liu, A Tovstopyat, C Sun Sensors 21 (2), 453, 2021 | 29 | 2021 |
| A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing B Lin, Y Liu, Y Cai, J Zhou, Y Zou, Y Zhang, W Liu, C Sun IEEE Transactions on Electron Devices 68 (10), 5192-5197, 2021 | 26 | 2021 |
| Design, fabrication, and characterization of aluminum scandium nitride-based thin film bulk acoustic wave filter Y Zou, Y Cai, C Gao, T Luo, Y Liu, Q Xu, Y Wang, L Nian, W Liu, ... Journal of Microelectromechanical Systems 32 (3), 263-270, 2023 | 24 | 2023 |
| ScAlN/AlN film-based Lamé mode resonator with high effective electromechanical coupling coefficient J Zhou, Y Liu, Q Xu, Y Xie, Y Cai, J Liu, W Liu, A Tovstopyat, C Sun Journal of Microelectromechanical Systems 30 (5), 677-679, 2021 | 24 | 2021 |
| Dual-mode thin film bulk acoustic wave resonator and filter Y Zou, L Nian, Y Cai, Y Liu, A Tovstopyat, W Liu, C Sun Journal of Applied Physics 128 (19), 2020 | 19 | 2020 |
| Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes T Luo, Q Xu, Z Wen, Y Qu, J Zhou, B Lin, Y Cai, Y Liu, C Sun IEEE Electron Device Letters 44 (4), 574-577, 2023 | 14 | 2023 |
| A laterally excited bulk acoustic resonator with scattering vias in electrodes Z Wen, W Liu, T Luo, X Tong, Y Xie, X Gu, Y Liu, Y Cai, S Guo, J Wang, ... Applied Physics Letters 123 (9), 2023 | 10 | 2023 |
| Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films L Nian, Y Qu, X Gu, T Luo, Y Xie, M Wei, Y Cai, Y Liu, C Sun Micromachines 14 (3), 557, 2023 | 10 | 2023 |
| Influence of Etching Trench on K eff 2 of Film Bulk Acoustic Resonator C Gao, Y Zou, J Zhou, Y Liu, W Liu, Y Cai, C Sun Micromachines 13 (1), 102, 2022 | 10 | 2022 |
| Aluminum nitride-based adjustable effective electromechanical coupling coefficient film bulk acoustic resonator Y Qu, T Luo, Z Wen, M Wei, X Gu, X Chen, Y Zou, Y Cai, Y Liu, C Sun Micromachines 14 (1), 157, 2023 | 9 | 2023 |
| Investigation of film bulk acoustic resonators for sensing applications in liquid environment Y Zhou, Y Zou, C Gao, Q Xu, X Tong, B Lin, Y Liu, BW Soon, Y Cai, C Sun Applied Physics Letters 121 (21), 2022 | 9 | 2022 |
| Design and optimization of the dual-mode lamb wave resonator and dual-passband filter T Luo, Y Liu, Y Zou, J Zhou, W Liu, G Wu, Y Cai, C Sun Micromachines 13 (1), 87, 2022 | 9 | 2022 |
| Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition B Lin, Y Cai, Y Wang, Y Zou, C Gao, Y Liu, W Liu, S Guo, C Sun Thin Solid Films 783, 140037, 2023 | 8 | 2023 |
| Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure Y Qu, X Gu, Y Zou, Z Wen, Y Cai, BW Soon, Y Liu, C Sun Journal of Microelectromechanical Systems 32 (2), 157-163, 2023 | 8 | 2023 |
| AlN/Al0. 8Sc0. 2N film S mode lamb wave resonator with spurious mode suppression Q Xu, J Zhou, Y Liu, Y Zou, W Liu, Y Cai, C Sun Journal of Applied Physics 132 (8), 2022 | 8 | 2022 |
Chengliang SunInstitute of Microelectronics, A*Star, SingaporeVerified email at ime.a-star.edu.sg