| Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications Y Zou, C Gao, J Zhou, Y Liu, Q Xu, Y Qu, WJ Liu, JBW Soon, Y Cai, C Sun Microsystems & Nanoengineering 8 (1), 124, 2022 | 62 | 2022 |
| Design and performance of ScAlN/AlN trapezoidal cantilever-based MEMS piezoelectric energy harvesters Y Liu, B Hu, Y Cai, J Zhou, W Liu, A Tovstopyat, G Wu, C Sun IEEE Transactions on Electron Devices 68 (6), 2971-2976, 2021 | 32 | 2021 |
| Development of broadband high-frequency piezoelectric micromachined ultrasonic transducer array XB Wang, LM He, YC Ma, WJ Liu, WJ Xu, JY Ren, A Riaud, J Zhou Sensors 21 (5), 1823, 2021 | 31 | 2021 |
| 3D FEM analysis of high-frequency AlN-based PMUT arrays on cavity SOI W Liu, L He, X Wang, J Zhou, W Xu, N Smagin, M Toubal, H Yu, Y Gu, ... Sensors 19 (20), 4450, 2019 | 30 | 2019 |
| A novel tri-axial piezoelectric MEMS accelerometer with folded beams Y Liu, B Hu, Y Cai, W Liu, A Tovstopyat, C Sun Sensors 21 (2), 453, 2021 | 29 | 2021 |
| A novel trapezoidal ScAlN/AlN-based MEMS piezoelectric accelerometer B Hu, Y Liu, B Lin, G Wu, W Liu, C Sun IEEE Sensors Journal 21 (19), 21277-21284, 2021 | 28 | 2021 |
| A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing B Lin, Y Liu, Y Cai, J Zhou, Y Zou, Y Zhang, W Liu, C Sun IEEE Transactions on Electron Devices 68 (10), 5192-5197, 2021 | 26 | 2021 |
| Design, fabrication, and characterization of aluminum scandium nitride-based thin film bulk acoustic wave filter Y Zou, Y Cai, C Gao, T Luo, Y Liu, Q Xu, Y Wang, L Nian, W Liu, ... Journal of Microelectromechanical Systems 32 (3), 263-270, 2023 | 24 | 2023 |
| ScAlN/AlN film-based Lamé mode resonator with high effective electromechanical coupling coefficient J Zhou, Y Liu, Q Xu, Y Xie, Y Cai, J Liu, W Liu, A Tovstopyat, C Sun Journal of Microelectromechanical Systems 30 (5), 677-679, 2021 | 24 | 2021 |
| Tuning characteristics of AlN-based piezoelectric micromachined ultrasonic transducers using DC bias voltage Z Wu, W Liu, Z Tong, Y Cai, C Sun, L Lou IEEE Transactions on Electron Devices 69 (2), 729-735, 2022 | 23 | 2022 |
| Dual-mode thin film bulk acoustic wave resonator and filter Y Zou, L Nian, Y Cai, Y Liu, A Tovstopyat, W Liu, C Sun Journal of Applied Physics 128 (19), 2020 | 18 | 2020 |
| A novel transfer function based ring-down suppression system for PMUTs Z Wu, W Liu, Z Tong, S Zhang, Y Gu, G Wu, A Tovstopyat, C Sun, L Lou Sensors 21 (19), 6414, 2021 | 14 | 2021 |
| Lithium niobate thin film based A3 mode resonators with high effective coupling coefficient of 6.72% Y Zhang, L Wang, Y Zou, Q Xu, J Liu, Q Wang, A Tovstopyat, W Liu, C Sun, ... 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 13 | 2021 |
| Performance and crosstalk evaluation of 2-d array piezoelectric micromachined ultrasonic transducer with 3-d finite element simulation LM He, WJ Xu, WJ Liu, XB Wang, J Zhou, JY Ren 2019 IEEE International Ultrasonics Symposium (IUS), 792-795, 2019 | 12 | 2019 |
| A laterally excited bulk acoustic resonator with scattering vias in electrodes Z Wen, W Liu, T Luo, X Tong, Y Xie, X Gu, Y Liu, Y Cai, S Guo, J Wang, ... Applied Physics Letters 123 (9), 2023 | 10 | 2023 |
| Influence of Etching Trench on K eff 2 of Film Bulk Acoustic Resonator C Gao, Y Zou, J Zhou, Y Liu, W Liu, Y Cai, C Sun Micromachines 13 (1), 102, 2022 | 10 | 2022 |
| A novel coupled piezoelectric micromachined ultrasonic transducer based on piston mode L Wang, W Zhu, Z Wu, W Liu, C Sun IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 68 …, 2021 | 10 | 2021 |
| A miniaturized piezoelectric MEMS accelerometer with polygon topological cantilever structure C Yang, B Hu, L Lu, Z Wang, W Liu, C Sun Micromachines 13 (10), 1608, 2022 | 9 | 2022 |
| Design and optimization of the dual-mode lamb wave resonator and dual-passband filter T Luo, Y Liu, Y Zou, J Zhou, W Liu, G Wu, Y Cai, C Sun Micromachines 13 (1), 87, 2022 | 9 | 2022 |
| Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition B Lin, Y Cai, Y Wang, Y Zou, C Gao, Y Liu, W Liu, S Guo, C Sun Thin Solid Films 783, 140037, 2023 | 8 | 2023 |
