Soft and deformable sensors based on liquid metals T Kim, D Kim, BJ Lee, J Lee Sensors 19 (19), 4250, 2019 | 73 | 2019 |
Optimization of deep reactive ion etching for microscale silicon hole arrays with high aspect ratio T Kim, J Lee Micro and Nano Systems Letters 10 (1), 12, 2022 | 17 | 2022 |
Self-assembled silicon membrane resonator for high vacuum pressure sensing T Kim, J Ko, J Lee Vacuum 201, 111101, 2022 | 14 | 2022 |
Silicon nanoparticles: fabrication, characterization, application and perspectives T Kim, J Lee Micro and Nano Systems Letters 11 (1), 18, 2023 | 10 | 2023 |
Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing T Kim, MG Jeong, BJ Lee, J Lee Journal of Vacuum Science & Technology A 39 (6), 2021 | 8 | 2021 |
Thick germanium-on-nothing structures by annealing microscale hole arrays with straight sidewall profiles MG Jeong, T Kim, BJ Lee, J Lee Journal of Microelectromechanical Systems 31 (2), 183-185, 2022 | 7 | 2022 |
Fabrication and characterization of silicon-on-insulator wafers T Kim, J Lee Micro and Nano Systems Letters 11 (1), 15, 2023 | 4 | 2023 |
Subsurface Imaging of Microfabricated Silicon Membrane–Cavity Structures Using Near‐Infrared Interferometry MG Jeong, T Kim, BJ Lee, J Lee Advanced Engineering Materials 24 (10), 2200531, 2022 | 4 | 2022 |
Predicting AFM Topography from Optical Microscope Images Using Deep‐Learning J Jeong, T Kim, BJ Lee, J Lee Advanced Intelligent Systems 5 (1), 2200317, 2023 | 3 | 2023 |
PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography J Jeong, T Kim, BJ Lee, J Lee Scientific Reports 12 (1), 7205, 2022 | 3 | 2022 |
Fabrication of nanoscale stencils through focused ion beam milling and dry transfer of silicon-on-nothing membrane with perforations T Kim, J Lee Microelectronic Engineering 289, 112172, 2024 | 2 | 2024 |
JMEMS Letters. 1pt Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes M Choi, T Kim, BJ Lee, J Song, J Lee Journal of Microelectromechanical Systems, 2024 | 1 | 2024 |
Nanoscale Stencils Fabricated by Focused Ion Beam Milling and Dry Transfer of Silicon-on-Nothing Membranes T Kim, J Lee 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | 1 | 2023 |
Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures MG Jeong, T Kim, BJ Lee, J Lee Micro and Nano Systems Letters 10 (1), 6, 2022 | 1 | 2022 |
Liquid refractive index measurements using cavity in silicon via near-infrared interferometry T Kim, M Choi, BJ Lee, J Lee Sensors and Actuators A: Physical 381, 116078, 2025 | | 2025 |
Development of Microfluidic Platform for Refractive Index Measurement of Liquid T Kim, M Choi, BJ Lee, J Lee 2024 IEEE SENSORS, 1-4, 2024 | | 2024 |
Simulation of Germanium-on-Nothing cavity’s morphological transformation using deep learning J Jeong, T Kim, J Lee Micro and Nano Systems Letters 10 (1), 22, 2022 | | 2022 |
High resolution imaging based transient analysis for self-assembled silicon and germanium membrane and cavity structure TY Kim, J Jeong, M Jeong, BJ Lee, J Lee The 17th International Workshops on Nanomechanical Sensing, NMC 2021, 2021 | | 2021 |