Follow
Taeyeong Kim
Title
Cited by
Cited by
Year
Soft and deformable sensors based on liquid metals
T Kim, D Kim, BJ Lee, J Lee
Sensors 19 (19), 4250, 2019
732019
Optimization of deep reactive ion etching for microscale silicon hole arrays with high aspect ratio
T Kim, J Lee
Micro and Nano Systems Letters 10 (1), 12, 2022
172022
Self-assembled silicon membrane resonator for high vacuum pressure sensing
T Kim, J Ko, J Lee
Vacuum 201, 111101, 2022
142022
Silicon nanoparticles: fabrication, characterization, application and perspectives
T Kim, J Lee
Micro and Nano Systems Letters 11 (1), 18, 2023
102023
Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing
T Kim, MG Jeong, BJ Lee, J Lee
Journal of Vacuum Science & Technology A 39 (6), 2021
82021
Thick germanium-on-nothing structures by annealing microscale hole arrays with straight sidewall profiles
MG Jeong, T Kim, BJ Lee, J Lee
Journal of Microelectromechanical Systems 31 (2), 183-185, 2022
72022
Fabrication and characterization of silicon-on-insulator wafers
T Kim, J Lee
Micro and Nano Systems Letters 11 (1), 15, 2023
42023
Subsurface Imaging of Microfabricated Silicon Membrane–Cavity Structures Using Near‐Infrared Interferometry
MG Jeong, T Kim, BJ Lee, J Lee
Advanced Engineering Materials 24 (10), 2200531, 2022
42022
Predicting AFM Topography from Optical Microscope Images Using Deep‐Learning
J Jeong, T Kim, BJ Lee, J Lee
Advanced Intelligent Systems 5 (1), 2200317, 2023
32023
PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography
J Jeong, T Kim, BJ Lee, J Lee
Scientific Reports 12 (1), 7205, 2022
32022
Fabrication of nanoscale stencils through focused ion beam milling and dry transfer of silicon-on-nothing membrane with perforations
T Kim, J Lee
Microelectronic Engineering 289, 112172, 2024
22024
JMEMS Letters. 1pt Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes
M Choi, T Kim, BJ Lee, J Song, J Lee
Journal of Microelectromechanical Systems, 2024
12024
Nanoscale Stencils Fabricated by Focused Ion Beam Milling and Dry Transfer of Silicon-on-Nothing Membranes
T Kim, J Lee
2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023
12023
Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures
MG Jeong, T Kim, BJ Lee, J Lee
Micro and Nano Systems Letters 10 (1), 6, 2022
12022
Liquid refractive index measurements using cavity in silicon via near-infrared interferometry
T Kim, M Choi, BJ Lee, J Lee
Sensors and Actuators A: Physical 381, 116078, 2025
2025
Development of Microfluidic Platform for Refractive Index Measurement of Liquid
T Kim, M Choi, BJ Lee, J Lee
2024 IEEE SENSORS, 1-4, 2024
2024
Simulation of Germanium-on-Nothing cavity’s morphological transformation using deep learning
J Jeong, T Kim, J Lee
Micro and Nano Systems Letters 10 (1), 22, 2022
2022
High resolution imaging based transient analysis for self-assembled silicon and germanium membrane and cavity structure
TY Kim, J Jeong, M Jeong, BJ Lee, J Lee
The 17th International Workshops on Nanomechanical Sensing, NMC 2021, 2021
2021
The system can't perform the operation now. Try again later.
Articles 1–18