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Dr. Nils Boysen
Dr. Nils Boysen
Verified email at ruhr-uni-bochum.de - Homepage
Title
Cited by
Cited by
Year
Water assisted atomic layer deposition of yttrium oxide using tris (N, N′-diisopropyl-2-dimethylamido-guanidinato) yttrium (iii): process development, film characterization …
L Mai, N Boysen, E Subaşı, T de Los Arcos, D Rogalla, G Grundmeier, ...
RSC advances 8 (9), 4987-4994, 2018
532018
An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure
N Boysen, T Hasselmann, S Karle, D Rogalla, D Theirich, M Winter, ...
Angewandte Chemie International Edition 57 (49), 16224-16227, 2018
372018
Assessing the environmental impact of atomic layer deposition (ALD) processes and pathways to lower it
M Weber, N Boysen, O Graniel, A Sekkat, C Dussarrat, P Wiff, A Devi, ...
ACS Materials Au 3 (4), 274-298, 2023
262023
Atomic layer deposition of dielectric Y 2 O 3 thin films from a homoleptic yttrium formamidinate precursor and water
N Boysen, D Zanders, T Berning, SMJ Beer, D Rogalla, C Bock, A Devi
RSC advances 11 (5), 2565-2574, 2021
242021
Rational development of guanidinate and amidinate based cerium and ytterbium complexes as atomic layer deposition precursors: synthesis, modeling, and application
P Kaur, L Mai, A Muriqi, D Zanders, R Ghiyasi, M Safdar, N Boysen, ...
Chemistry–A European Journal 27 (15), 4913-4926, 2021
212021
A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films
N Boysen, B Misimi, A Muriqi, JL Wree, T Hasselmann, D Rogalla, ...
Chemical Communications 56 (89), 13752-13755, 2020
182020
A new metalorganic chemical vapor deposition process for MoS 2 with a 1, 4-diazabutadienyl stabilized molybdenum precursor and elemental sulfur
JL Wree, E Ciftyurek, D Zanders, N Boysen, A Kostka, D Rogalla, ...
Dalton Transactions 49 (38), 13462-13474, 2020
182020
A study on the influence of ligand variation on formamidinate complexes of yttrium: new precursors for atomic layer deposition of yttrium oxide
SMJ Beer, N Boysen, A Muriqi, D Zanders, T Berning, D Rogalla, C Bock, ...
Dalton Transactions 50 (37), 12944-12956, 2021
152021
Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide
L Mai, N Boysen, D Zanders, T de Los Arcos, F Mitschker, B Mallick, ...
Chemistry–A European Journal 25 (31), 7489-7500, 2019
122019
Silver Thin‐Film Electrodes Grown by Low‐Temperature Plasma‐Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure
T Hasselmann, B Misimi, N Boysen, D Zanders, JL Wree, D Rogalla, ...
Advanced Materials Technologies 8 (1), 2200796, 2023
112023
Role of Anionic Backbone in NHC‐Stabilized Coinage Metal Complexes: New Precursors for Atomic Layer Deposition
N Boysen, A Philip, D Rogalla, M Karppinen, A Devi
Chemistry–A European Journal 28 (16), e202103798, 2022
82022
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
T de los Arcos, P Awakowicz, J Benedikt, B Biskup, M Böke, N Boysen, ...
Plasma Processes and Polymers 21 (2), 2300150, 2024
52024
High-performance iridium thin films for water splitting by CVD using new Ir (I) precursors
N Boysen, JL Wree, D Zanders, D Rogalla, D Öhl, W Schuhmann, ...
ACS Applied Materials & Interfaces 14 (46), 52149-52162, 2022
42022
Tuning Ruthenium Carbene Complexes for Selective P− H Activation through Metal‐Ligand Cooperation
KS Feichtner, LT Scharf, T Scherpf, B Mallick, N Boysen, VH Gessner
Chemistry–A European Journal 27 (69), 17351-17360, 2021
42021
PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films
T De Los Arcos, P Awakowicz, M Böke, N Boysen, RP Brinkmann, ...
Plasma Processes and Polymers 21 (3), 2300186, 2024
32024
In Pursuit of Next Generation N-Heterocyclic Carbene-Stabilized Copper and Silver Precursors for Metalorganic Chemical Vapor Deposition and Atomic Layer Deposition Processes
I Selvakumar, N Boysen, M Bürger, A Devi
Chemistry 5 (3), 2038-2055, 2023
32023
Liquid injection field desorption/ionization as a powerful tool to characterize volatile, labile, and reactive metal–organic complexes
N Boysen, A Devi
European Journal of Mass Spectrometry 29 (1), 12-20, 2023
32023
Unveiling Ruthenium (II) Diazadienyls for Gas Phase Deposition Processes: Low Resistivity Ru Thin Films and Their Performance in the Acidic Oxygen Evolution Reaction
D Zanders, J Obenlüneschloß, JL Wree, J Jagosz, P Kaur, N Boysen, ...
Advanced Materials Interfaces 9 (35), 2201709, 2022
32022
Co (II) Amide, Pyrrolate, and Aminopyridinate Complexes: Assessment of their Manifold Structural Chemistry and Thermal Properties
D Zanders, N Boysen, MA Land, J Obenlüneschloß, JD Masuda, B Mallick, ...
European Journal of Inorganic Chemistry 2021 (48), 5119-5136, 2021
32021
Ein N‐heterocyclischer Carbenkomplex des Silbers für die plasmaunterstützte räumlich getrennte Atomlagenabscheidung dünner Silberschichten bei Atmosphärendruck
N Boysen, T Hasselmann, S Karle, D Rogalla, D Theirich, M Winter, ...
Angewandte Chemie 130 (49), 16458-16462, 2018
22018
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