| Two‐dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy AK Henning, T Hochwitz, J Slinkman, J Never, S Hoffmann, P Kaszuba, ... Journal of applied physics 77 (5), 1888-1896, 1995 | 242 | 1995 |
| Capacitive effects on quantitative dopant profiling with scanned electrostatic force microscopes T Hochwitz, AK Henning, C Levey, C Daghlian, J Slinkman Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 127 | 1996 |
| Radiation‐induced effects in multiprogrammable pacemakers and implantable defibrillators F Rodriguez, A Filimonov, A Henning, C Coughlin, M Greenberg Pacing and clinical electrophysiology 14 (12), 2143-2153, 1991 | 116 | 1991 |
| Microfluidic MEMS for Semiconductor Processing AK Henning, JS Fitch, JM Harris, EB Dehan, BA Cozad, L Christel, Y Fathi, ... Components, Packaging, and Manufacturing Technology, Part B: Advanced …, 1998 | 109 | 1998 |
| Substrate current at cryogenic temperatures: Measurements and a two-dimensional model for CMOS technology AK Henning, NN Chan, JT Watt, JD Plummer IEEE transactions on electron devices 34 (1), 64-74, 1987 | 97 | 1987 |
| A thermopneumatically actuated microvalve for liquid expansion and proportional control AK Henning, J Fitch, D Hopkins, L Lilly, R Faeth, E Falsken, M Zdeblick Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 79 | 1997 |
| Microfluidic mems AK Henning 1998 IEEE Aerospace Conference Proceedings (Cat. No. 98TH8339) 1, 471-486, 1998 | 69 | 1998 |
| Low-power thermopneumatic microvalve AK Henning, M Zdeblick, JS Fitch, DA Hopkins Jr, LJ Lilly US Patent 6,129,331, 2000 | 67 | 2000 |
| Imaging integrated circuit dopant profiles with the force‐based scanning Kelvin probe microscope T Hochwitz, AK Henning, C Levey, C Daghlian, J Slinkman, J Never, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 66 | 1996 |
| The development and use of thin film thermocouples for contact temperature measurement X Tian, FE Kennedy, JJ Deacutis, AK Henning Tribology Transactions 35 (3), 491-499, 1992 | 55 | 1992 |
| Pressure-based mass-flow control using thermopneumatically-actuated microvalves JS Fitch, AK Henning, EB Arkilic, JM Harris Proceedings, Sensors and Actuators Workshop, 162-165, 1998 | 48 | 1998 |
| Switchable thermoelectric element and array JJ Deacutis, AK Henning US Patent 5,261,747, 1993 | 46 | 1993 |
| Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis AK Henning, T Hochwitz Materials Science and Engineering: B 42 (1-3), 88-98, 1996 | 42 | 1996 |
| Method of processing a semiconductor device Z Or-Bach, B Cronquist, AK Henning US Patent 9,023,688, 2015 | 33 | 2015 |
| High-flow microvalve AK Henning, M Selser, BA Cozad US Patent 6,986,365, 2006 | 32 | 2006 |
| Liquid and gas-liquid phase behavior in thermopneumatically actuated microvalves AK Henning Microfluidic Devices and Systems 3515, 53-63, 1998 | 31 | 1998 |
| Performance of MEMS-based gas distribution and control systems for semiconductor processing AK Henning, J Fitch, JM Harris, EB Arkilic, BA Cozad, B Dehan Micromachined Devices and Components IV 3514, 159-170, 1998 | 27 | 1998 |
| Improved gas flow model for microvalves AK Henning TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 24 | 2003 |
| Contamination reduction using MEMS-based, high-precision mass flow controllers AK Henning, JM Harris, B Hertzler, R Pearlstein Proceedings, SEMICON West Symposium on Contamination Free Manufacturing for …, 1998 | 23 | 1998 |
| Methods and apparatuses for complementary pneumatic devices and circuits AK Henning US Patent App. 12/657,510, 2010 | 22 | 2010 |
