| Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry Nitish Kumar, Peter Petrik, Gopika K P Ramanandan, Omar El Gawhary, Sarathi ... Optics Express 22 (20), 24678-24688, 2014 | 57 | 2014 |
| Performance analysis of coherent optical scatterometry O El Gawhary, N Kumar, SF Pereira, WMJ Coene, HP Urbach Applied Physics B 105, 775-781, 2011 | 52 | 2011 |
| Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem S Roy, N Kumar, SF Pereira, HP Urbach Journal of Optics 15 (7), 075707, 2013 | 29 | 2013 |
| Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrology N Kumar, O El Gawhary, S Roy, VG Kutchoukov, SF Pereira, W Coene, ... Metrology, Inspection, and Process Control for Microlithography XXVI 8324 …, 2012 | 23 | 2012 |
| Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning N Kumar, O El Gawhary, S Roy, SE Pereira, HP Urbach Journal of the European Optical Society-Rapid publications 8, 2013 | 19 | 2013 |
| Scanning Effects in Coherent Fourier Scatterometry S Roy, O El Gawhary, N Kumar, SE Pereira, HP Urbach Journal of the European Optical Society-Rapid Publications vol 7 12031 7, 2031, 2012 | 16 | 2012 |
| Determination of the full scattering matrix using coherent Fourier scatterometry Nitish Kumar, Luca Cisotto, Sarathi Roy, Gopika K. P. Ramanandan, Silvania F ... Applied Optics 55 (16), 4408-4413, 2016 | 13 | 2016 |
| Fourier ellipsometry–an ellipsometric approach to Fourier scatterometry P Petrik, N Kumar, M Fried, B Fodor, G Juhász, SF Pereira, S Burger, ... Journal of the European Optical Society-Rapid publications 10, 2015 | 13 | 2015 |
| Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory AP Konijnenberg, L Wei, N Kumar, LCC Pinto Filho, L Cisotto, SF Pereira, ... Optics express 22 (1), 311-324, 2014 | 13 | 2014 |
| Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory AP Konijnenberg, L Wei, N Kumar, LCC Pinto Filho, L Cisotto, SF Pereira, ... Optics express 22 (1), 311-324, 2014 | 13 | 2014 |
| Optical characterization of macro-, micro-and nanostructures using polarized light P Petrik, N Kumar, G Juhasz, C Major, B Fodor, E Agocs, T Lohner, ... Journal of Physics: Conference Series 558 (1), 012008, 2014 | 12 | 2014 |
| Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry J Endres, N Kumar, P Petrik, MA Henn, S Heidenreich, SF Pereira, ... Optical Micro-and Nanometrology V 9132, 39-47, 2014 | 11 | 2014 |
| Application of micro solid immersion lens as probe for near-field scanning microscopy AC Assafrao, N Kumar, AJH Wachters, SF Pereira, HP Urbach, M Brun, ... Applied Physics Letters 104 (10), 2014 | 10 | 2014 |
| Methods for optical modeling and cross-checking in ellipsometry and scatterometry P Petrik, B Fodor, E Agocs, P Kozma, J Nador, N Kumar, J Endres, ... Modeling Aspects in Optical Metrology V 9526, 2015 | 7 | 2015 |
| Experimental and numerical analysis of the super resolution near-field effect on an InSb sample AC Assafrao, N Kumar, AJH Wachters, SF Pereira, HP Urbach Japanese Journal of Applied Physics 53 (4), 042001, 2014 | 7 | 2014 |
| Through-focus phase retrieval and its connection to the spatial correlation for propagating fields O El Gawhary, A Wiegmann, N Kumar, SF Pereira, HP Urbach Optics Express 21 (5), 5550-5560, 2013 | 6 | 2013 |
| Coherent Fourier Scatterometry N Kumar TU Delft, 2014 | 5 | 2014 |
| Phase information in coherent Fourier scatterometry N Kumar, O El Gawhary, S Roy, SF Pereira, HP Urbach Optical Measurement Systems for Industrial Inspection VIII 8788, 481-488, 2013 | 3 | 2013 |
| Laser emission from dye mixture doped polymer optical fiber S Mavila, TK Jhony, R Mandamparambil, N Kumar, PA Cheriyan, ... Proceedings of SPIE 6698, 66981O, 2007 | 3 | 2007 |
| Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry S Roy, N Kumar, SF Pereira, HP Urbach Fringe 2013: 7th International Workshop on Advanced Optical Imaging and …, 2014 | 1 | 2014 |
Silvania F. PereiraAssociate Professor of Applied Physics, Delft University of TechnologyVerified email at tudelft.nl