Predictive model for the meniscus-guided coating of high-quality organic single-crystalline thin films R Janneck, F Vercesi, P Heremans, J Genoe, C Rolin Adv. Mater 28 (36), 8007-8013, 2016 | 119 | 2016 |
Piezoelectric acoustic MEMS transducer and fabrication method thereof F Cerini, S Adorno, F Vercesi US Patent 10,623,866, 2020 | 17 | 2020 |
Thelma-Double: a new technology platform for manufacturing of high-performance MEMS inertial sensors F Vercesi, L Corso, G Allegato, G Gattere, L Guerinoni, C Valzasina, ... 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 14 | 2022 |
Advanced protective coatings for reflectivity enhancement by low temperature atomic layer deposition of HfO2 on Al surfaces for micromirror applications E Cianci, A Lamperti, G Tallarida, M Zanuccoli, C Fiegna, L Lamagna, ... Sensors and Actuators A: Physical 282, 124-131, 2018 | 14 | 2018 |
Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane M Perletti, F Vercesi, S Adorno, G Allegato US Patent 10,555,091, 2020 | 8 | 2020 |
Simulation of micro-mirrors for optical MEMS M Zanuccoli, C Fiegna, E Cianci, C Wiemer, A Lamperti, G Tallarida, ... 2017 International Conference on Simulation of Semiconductor Processes and …, 2017 | 6 | 2017 |
Method for manufacturing a semiconductor die provided with a filtering module, semiconductor die including the filtering module, package housing the semiconductor die, and … G Allegato, F Vercesi, LM Castoldi, L Oggioni, M Perletti US Patent 11,128,958, 2021 | 5 | 2021 |
Transducer with improved piezoelectric arrangement, mems device comprising the transducer, and methods for manufacturing the transducer L Seghizzi, F Vercesi, C Pedrini US Patent 11,839,159, 2023 | 4 | 2023 |
Microphones S Adorno, F Cerini, F Vercesi Silicon Sensors and Actuators: The Feynman Roadmap, 503-522, 2022 | 4 | 2022 |
Predicting the optimal process window for the coating of single-crystalline organic films with mobilities exceeding 7 cm2/Vs. R Janneck, F Vercesi, P Heremans, J Genoe, C Rolin Organic Field-Effect Transistors XV 9943, 48-57, 2016 | 3 | 2016 |
High Performance MEMS IMU with ThELMA-Double Technology G Gattere, F Rizzini, L Guerinoni, L Falorni, C Valzasina, F Vercesi, ... 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2022 | 2 | 2022 |
Piezoelectric acoustic MEMS transducer and fabrication method thereof F Cerini, S Adorno, F Vercesi US Patent 11,051,113, 2021 | 2 | 2021 |
Piezoelectric microelectromechanical resonator device and corresponding manufacturing process F Vercesi, L Corso, G Allegato, G Gattere US Patent 11,855,604, 2023 | 1 | 2023 |
Micromechanical mirror structure with improved mechanical and reflectivity features and corresponding manufacturing process L Lamagna, S Losa, S Rossini, F Vercesi, E Cianci, G Tallarida, C Wiemer US Patent 11,137,592, 2021 | 1 | 2021 |
Long-term stresses on linear micromirrors for pico projector application M Silvestrini, M Barbato, S Costantini, L Castoldi, F Vercesi, L Zanotti, ... Microelectronics Reliability 76, 626-630, 2017 | 1 | 2017 |
Inertial mems device integrating a wake-up element, inertial mems system and manufacturing method L Seghizzi, F Vercesi, G Longoni, A Nomellini US Patent App. 18/741,058, 2024 | | 2024 |
Microelectromechanical sensor assembly and process for manufacturing a microelectromechanical sensor assembly G Longoni, L Seghizzi, F Bianchi, F Vercesi, A Nomellini, S Nicoli US Patent App. 18/742,355, 2024 | | 2024 |
High density pmut array architecture for ultrasound imaging F Vercesi, G Allegato, TA AFIFI, S Costantini US Patent App. 18/123,602, 2024 | | 2024 |
Embedded mechanical stopper for thermal sensor device F Vercesi, S Nicoli, C De Marco US Patent App. 18/182,058, 2024 | | 2024 |
Hermetically sealed MEMS mirror and method of manufacture G Allegato, S Costantini, F Vercesi, R Carminati US Patent 12,078,799, 2024 | | 2024 |