| Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications E Iborra, J Olivares, M Clement, L Vergara, A Sanz-Hervás, J Sangrador Sensors and Actuators A: Physical 115 (2-3), 501-507, 2004 | 160 | 2004 |
| Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) x-ray diffraction peaks A Sanz-Hervás, M Clement, E Iborra, L Vergara, J Olivares, J Sangrador Applied Physics Letters 88 (16), 2006 | 107 | 2006 |
| Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO2 and glass J Olivares, A Rodrıguez, J Sangrador, T Rodrıguez, C Ballesteros, A Kling Thin Solid Films 337 (1-2), 51-54, 1999 | 99 | 1999 |
| Raman spectroscopy study of amorphous SiGe films deposited by low pressure chemical vapor deposition and polycrystalline SiGe films obtained by solid-phase crystallization J Olivares, P Martın, A Rodrıguez, J Sangrador, J Jimenez, T Rodrıguez Thin Solid Films 358 (1-2), 56-61, 2000 | 82 | 2000 |
| AlN-based BAW resonators with CNT electrodes for gravimetric biosensing L García-Gancedo, Z Zhu, E Iborra, M Clement, J Olivares, AJ Flewitt, ... Sensors and Actuators B: Chemical 160 (1), 1386-1393, 2011 | 70 | 2011 |
| Piezoelectric actuation of microbridges using AlN J Olivares, E Iborra, M Clement, L Vergara, J Sangrador, A Sanz-Hervás Sensors and Actuators A: Physical 123, 590-595, 2005 | 70 | 2005 |
| Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films L Vergara, J Olivares, E Iborra, M Clement, A Sanz-Hervás, J Sangrador Thin Solid Films 515 (4), 1814-1818, 2006 | 64 | 2006 |
| Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy J Olivares, S González-Castilla, M Clement, A Sanz-Hervás, L Vergara, ... Diamond and related materials 16 (4-7), 1421-1424, 2007 | 62 | 2007 |
| Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator M DeMiguel-Ramos, B Díaz-Durán, JM Escolano, M Barba, T Mirea, ... Sensors and Actuators B: Chemical 239, 1282-1288, 2017 | 59 | 2017 |
| Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications J Zhou, M DeMiguel-Ramos, L Garcia-Gancedo, E Iborra, J Olivares, ... Sensors and Actuators B: Chemical 202, 984-992, 2014 | 52 | 2014 |
| Sputtered SiO2 as low acoustic impedance material for Bragg mirror fabrication in BAW resonators J Olivares, E Wegmann, J Capilla, E Iborra, M Clement, L Vergara, ... 2009 IEEE International frequency control symposium joint with the 22nd …, 2009 | 50 | 2009 |
| AlN films sputtered on iridium electrodes for bulk acoustic wave resonators M Clement, J Olivares, E Iborra, S González-Castilla, N Rimmer, ... Thin Solid Films 517 (16), 4673-4678, 2009 | 46 | 2009 |
| Comparative study of c-axis AlN films sputtered on metallic surfaces A Sanz-Hervas, L Vergara, J Olivares, E Iborra, Y Morilla, J Garcia-Lopez, ... Diamond and related materials 14 (3-7), 1198-1202, 2005 | 46 | 2005 |
| Aluminum nitride for heatspreading in RF IC’s L La Spina, E Iborra, H Schellevis, M Clement, J Olivares, LK Nanver Solid-state electronics 52 (9), 1359-1363, 2008 | 40 | 2008 |
| Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs L García-Gancedo, J Pedrós, E Iborra, M Clement, XB Zhao, J Olivares, ... Sensors and Actuators B: Chemical 183, 136-143, 2013 | 35 | 2013 |
| High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors J Capilla, J Olivares, M Clement, J Sangrador, E Iborra, A Devos IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59 …, 2012 | 35 | 2012 |
| Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators E Iborra, M Clement, J Capilla, J Olivares, V Felmetsger Thin Solid Films 520 (7), 3060-3063, 2012 | 35 | 2012 |
| Optimized tilted c-axis AlN films for improved operation of shear mode resonators M DeMiguel-Ramos, T Mirea, M Clement, J Olivares, J Sangrador, ... Thin Solid Films 590, 219-223, 2015 | 32 | 2015 |
| Circuital model for the analysis of the piezoelectric response of AlN films using SAW filters E Iborra, L Vergara, J Sangrador, M Clement, A Sanz-Hervas, J Olivares IEEE transactions on ultrasonics, ferroelectrics, and frequency control 54 …, 2007 | 27 | 2007 |
| Effect of Deposition Parameters on the Characteristics of Low-Pressure Chemical Vapor Deposited SiGe Films Grown from Si2 H 6 and GeH4 J Olivares, J Sangrador, A Rodrıguez, T Rodrıguez Journal of The Electrochemical Society 148 (10), C685, 2001 | 27 | 2001 |
