Design of sub-1g microelectromechanical systems accelerometers D Yamane, T Konishi, T Matsushima, K Machida, H Toshiyoshi, K Masu Applied Physics Letters 104 (7), 2014 | 105 | 2014 |
Pulse electroplating of ultra-fine grained Au films with high compressive strength CY Chen, M Yoshiba, T Nagoshi, TFM Chang, D Yamane, K Machida, ... Electrochemistry Communications 67, 51-54, 2016 | 45 | 2016 |
Integrated CMOS-MEMS technology and its applications K Machida, T Konishi, D Yamane, H Toshiyoshi, K Masu ECS Transactions 61 (6), 21, 2014 | 39 | 2014 |
Novel sensor structure and its evaluation for integrated complementary metal oxide semiconductor microelectromechanical systems accelerometer T Konishi, D Yamane, T Matsushima, G Motohashi, K Kagaya, H Ito, ... Japanese Journal of Applied Physics 52 (6S), 06GL04, 2013 | 36 | 2013 |
A Ku-band dual-SPDT RF-MEMS switch by double-side SOI bulk micromachining D Yamane, W Sun, H Seita, S Kawasaki, H Fujita, H Toshiyoshi Journal of microelectromechanical systems 20 (5), 1211-1221, 2011 | 31 | 2011 |
Gamma-aminobutyric acid fermentation with date residue by a lactic acid bacterium, Lactobacillus brevis M Hasegawa, D Yamane, K Funato, A Yoshida, Y Sambongi Journal of bioscience and bioengineering 125 (3), 316-319, 2018 | 28 | 2018 |
Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity YH Gao, YH Jen, R Chen, K Aw, D Yamane, CY Lo Sensors and Actuators A: Physical 293, 167-177, 2019 | 27 | 2019 |
A dual-axis MEMS capacitive inertial sensor with high-density proof mass D Yamane, T Matsushima, T Konishi, H Toshiyoshi, K Masu, K Machida Microsystem Technologies 22, 459-464, 2016 | 22 | 2016 |
Electrical impedance monitoring of photothermal porated mammalian cells D Yamane, YC Wu, TH Wu, H Toshiyoshi, MA Teitell, PY Chiou Journal of laboratory automation 19 (1), 50-59, 2014 | 22 | 2014 |
Contactless Electrostatic Vibration Energy Harvesting Using Electric Double Layer Electrets. D Yamane, K Tamura, K Nota, R Iwakawa, CY Lo, K Miwa, S Ono Sensors & Materials 34, 2022 | 19 | 2022 |
MEMS post-processed self-assembled electret for vibratory energy harvesters D Yamane, H Kayaguchi, K Kawashima, H Ishii, Y Tanaka Applied Physics Letters 119 (25), 2021 | 19 | 2021 |
CMOS-MEMS based microgravity sensor and its application K Masu, K Machida, D Yamane, H Ito, N Ishihara, TFM Chang, M Sone, ... ECS Transactions 97 (5), 91, 2020 | 19 | 2020 |
Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices K Asano, HC Tang, CY Chen, T Nagoshi, TFM Chang, D Yamane, ... Microelectronic Engineering 180, 15-19, 2017 | 19 | 2017 |
A capacitive CMOS–MEMS sensor designed by multi-physics simulation for integrated CMOS–MEMS technology T Konishi, D Yamane, T Matsushima, K Masu, K Machida, H Toshiyoshi Japanese Journal of Applied Physics 53 (4S), 04EE15, 2014 | 17 | 2014 |
Au–Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices H Tang, CY Chen, TFM Chang, T Nagoshi, D Yamane, T Konishi, ... Journal of The Electrochemical Society 165 (2), D58, 2018 | 15 | 2018 |
Structure stability of high aspect ratio Ti/Au two-layer cantilevers for applications in MEMS accelerometers M Teranishi, TFM Chang, CY Chen, T Konishi, K Machida, H Toshiyoshi, ... Microelectronic Engineering 159, 90-93, 2016 | 15 | 2016 |
Tensile tests of micro-specimens composed of electroplated gold S Yanagida, TFM Chang, CY Chen, T Nagoshi, D Yamane, K Machida, ... Microelectronic Engineering 174, 6-10, 2017 | 14 | 2017 |
A MEMS Accelerometer for Sub-mG Sensing. D Yamane, T Konishi, H Toshiyoshi, M Sone, K Machida, H Ito, K Masu Sensors & Materials 31, 2019 | 13 | 2019 |
Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide H Tang, K Hashigata, TFM Chang, CY Chen, T Nagoshi, D Yamane, ... Surface and Coatings Technology 350, 1065-1070, 2018 | 12 | 2018 |
Enhancement of mechanical strength in Au films electroplated with supercritical carbon dioxide H Tang, CY Chen, T Nagoshi, TFM Chang, D Yamane, K Machida, ... Electrochemistry Communications 72, 126-130, 2016 | 12 | 2016 |