| Method for producing compound thin films T Suntola, J Antson US Patent 4,058,430, 1977 | 1897 | 1977 |
| Apparatus for performing growth of compound thin films TS Suntola, AJ Pakkala, SG Lindfors US Patent 4,389,973, 1983 | 989 | 1983 |
| Method and equipment for growing thin films T Suntola, S Lindfors, P Soininen US Patent 5,711,811, 1998 | 891 | 1998 |
| Atomic layer epitaxy T Suntola Materials Science Reports 4 (5), 261-312, 1989 | 808 | 1989 |
| Method for performing growth of compound thin films TS Suntola, AJ Pakkala, SG Lindfors US Patent 4,413,022, 1983 | 769 | 1983 |
| Method for growing thin films T Suntola, S Lindfors US Patent 7,404,984, 2008 | 604 | 2008 |
| И Materials Sci T Suntola Reports. 4 (7), 261, 1989 | 566 | 1989 |
| Atomic layer epitaxy T Suntola Thin Solid Films 216 (1), 84-89, 1992 | 460 | 1992 |
| Method for growing thin films T Suntola, S Lindfors US Patent 6,015,590, 2000 | 427 | 2000 |
| Method and apparatus for growing thin films T Suntola, P Soininen, N Bondestam US Patent 6,630,030, 2003 | 367 | 2003 |
| Ann. Rev. Mater. Sci. T Suntola, J Hyvärinen Annu. Rev. Mater. Sci 15, 177, 1985 | 324* | 1985 |
| Method for producing compound thin films T Suntola, J Antson | 322 | 1979 |
| Atomic layer epitaxy growth of doped zinc oxide thin films from organometals V Lujala, J Skarp, M Tammenmaa, T Suntola Applied surface science 82, 34-40, 1994 | 228 | 1994 |
| A study of ZnTe films grown on glass substrates using an atomic layer evaporation method M Ahonen, M Pessa, T Suntola Thin Solid Films 65 (3), 301-307, 1980 | 209 | 1980 |
| Surface chemistry of materials deposition at atomic layer level T Suntola Applied Surface Science 100, 391-398, 1996 | 152 | 1996 |
| Adsorption controlled preparation of heterogeneous catalysts S Haukka, EL Lakomaa, T Suntola Studies in Surface Science and Catalysis 120, 715-750, 1999 | 149 | 1999 |
| Characterization of surface exchange reactions used to grow compound films M Pessa, R Mäkelä, T Suntola Applied Physics Letters 38 (3), 131-132, 1981 | 130 | 1981 |
| Method for generating elecronically controllable color elements and color display based on the method TS Suntola US Patent 4,907,862, 1990 | 123 | 1990 |
| Atomic layer growth of TiO2 on silica EL Lakomaa, S Haukka, T Suntola Applied surface science 60, 742-748, 1992 | 120 | 1992 |
| Chemisorption of chromium acetylacetonate on porous high surface area silica S Haukka, EL Lakomaa, T Suntola Applied surface science 75 (1-4), 220-227, 1994 | 104 | 1994 |