In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators BP Harrington, R Abdolvand Journal of Micromechanics and Microengineering 21 (8), 085021, 2011 | 181 | 2011 |
A 76 dB 1.7 GHz 0.18 m CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi IEEE journal of solid-state circuits 46 (1), 224-235, 2010 | 93 | 2010 |
Turnover temperature point in extensional-mode highly doped silicon microresonators M Shahmohammadi, BP Harrington, R Abdolvand IEEE transactions on electron devices 60 (3), 1213-1220, 2013 | 75 | 2013 |
Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q BP Harrington, M Shahmohammadi, R Abdolvand 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 65 | 2010 |
Electronic temperature compensation of lateral bulk acoustic resonator reference oscillators using enhanced series tuning technique HM Lavasani, W Pan, BP Harrington, R Abdolvand, F Ayazi IEEE Journal of Solid-State Circuits 47 (6), 1381-1393, 2012 | 43 | 2012 |
Concurrent enhancement of Q and power handling in multi-tether high-order extensional resonators M Shahmohammadi, BP Harrington, R Abdolvand 2010 IEEE MTT-S International Microwave Symposium, 1452-1455, 2010 | 33 | 2010 |
Q-enhancement through minimization of acoustic energy radiation in micromachined lateral-mode resonators BP Harrington, R Abdolvand TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 33 | 2009 |
Passive tuning in lateral-mode thin-film piezoelectric oscillators M Shahmohammadi, D Dikbas, BP Harrington, R Abdolvand 2011 Joint Conference of the IEEE International Frequency Control and the …, 2011 | 28 | 2011 |
A 76dBΩ 1.7 GHz 0.18 µm CMOS tunable transimpedance amplifier using broadband current pre-amplifier for high frequency lateral micromechanical oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi 2010 IEEE International Solid-State Circuits Conference-(ISSCC), 318-319, 2010 | 27 | 2010 |
Zero temperature coefficient of frequency in extensional-mode highly doped silicon microresonators M Shahmohammadi, BP Harrington, R Abdolvand 2012 IEEE International Frequency Control Symposium Proceedings, 1-4, 2012 | 26 | 2012 |
Thin-film piezoelectric-on-silicon particle mass sensors BP Harrington, R Abdolvand, A Hajjam, JC Wilson, S Pourkamali 2010 IEEE International Frequency Control Symposium, 238-241, 2010 | 26 | 2010 |
Embedded Micro Valve In Microphone J Szczech, SB Lee, JJ Albers, V Gill, B Harrington, K Friel US Patent App. 14/454,337, 2015 | 15 | 2015 |
Q enhancement in micromachined lateral-extensional resonators R Abdolvand, B Harrington US Patent 8,228,141, 2012 | 12 | 2012 |
50Ω-terminated 900MHz monolithic lateral-extensional piezoelectric filters on ultrananocryslalline diamond H Fatemi, BP Harrington, H Zeng, J Carlisle, R Abdolvand 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 11 | 2011 |
Temperature-compensated extensional-mode MEMS resonators on highly N-type doped silicon substrates M Shahmohammadi, BP Harrington, J Gonzales, R Abdolvand Proc. Solid-State Sensors, Actuat., Microsyst. Workshop, 371-374, 2012 | 10 | 2012 |
A 76dBOhm, 1.7 GHz, 0.18 um CMOS Tunable Transimpedance Ampflier Using Broadband Current Pre-Amplifier for High Frequency Lateral Micromechanical Oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi IEEE International Solid State Circuits Conference (ISSCC 2010), 318-320, 2010 | 10 | 2010 |
Discrete MEMS Including Sensor Device B Harrington US Patent App. 14/792,821, 2016 | 9 | 2016 |
Diaphragm Stiffener B Harrington US Patent App. 14/683,360, 2016 | 9 | 2016 |
Elevated MEMS device in a microphone with ingress protection JJ Albers, B Harrington, SB Lee US Patent 10,654,712, 2020 | 8 | 2020 |
Composite Back Plate And Method Of Manufacturing The Same B Harrington US Patent App. 14/792,838, 2016 | 6 | 2016 |