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Cited by
All
Since 2020
Citations
2
2
h-index
1
1
i10-index
0
0
Co-authors
Bappaditya Dey, PhD
Senior R&D Engineer, imec
Verified email at imec.be
Ying-Lin Chen
imec
Verified email at imec.be
Vic De Ridder
KU Leuven
Verified email at ugent.be
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Jacob deforce
Student Comp. Engin.,
UGent
Verified email at ugent.be
deep learning
computer vision
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Year
Decentralized data, centralized insights: a federated machine learning framework for SEM based defect classification and detection in semiconductor manufacturing
B Dey, J Deforce, V Blanco, S Halder, P Leray
Metrology, Inspection, and Process Control XXXVIII 12955, 129553V
, 2024
1
2024
Towards improved semiconductor defect inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS
YL Chen, J Deforce, V De Ridder, B Dey, V Blanco, S Halder, P Leray
Metrology, Inspection, and Process Control XXXVIII 12955, 197-215
, 2024
1
2024
Fed-SEMI: A Federated Machine Learning Framework for Nano-Scale Defect Classification and Detection in Semiconductor Manufacturing with Decentralized and Private Data
B Dey, J Deforce, V Blanco, S Halder, P Leray
2024 International Symposium ELMAR, 133-140
, 2024
2024
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