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RUILONG XIE
RUILONG XIE
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Methods of forming a semiconductor device with low-k spacers and the resulting device
X Cai, R Xie, X Zhang
US Patent 9,064,948, 2015
5152015
Integrated circuits and methods for fabricating integrated circuits with reduced parasitic capacitance
R Xie, X Cai, X Zhang
US Patent 9,190,486, 2015
4832015
Uniformity tuning of variable-height features formed in trenches
R Xie
US Patent 10,332,963, 2019
2892019
Silicide protection during contact metallization and resulting semiconductor structures
VK Kamineni, R Xie, R Miller
US Patent 9,111,907, 2015
2042015
A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels
R Xie, P Montanini, K Akarvardar, N Tripathi, B Haran, S Johnson, T Hook, ...
2016 IEEE international electron devices meeting (IEDM), 2.7. 1-2.7. 4, 2016
1942016
Multi-channel gate-all-around FET
Q Liu, R Xie, CC Yeh, X Cai
US Patent 9,502,518, 2016
1842016
Scaling challenges for advanced CMOS devices
AP Jacob, R Xie, MG Sung, L Liebmann, RTP Lee, B Taylor
International Journal of High Speed Electronics and Systems 26 (01n02), 1740001, 2017
1412017
Integrated circuits including FINFET devices with lower contact resistance and reduced parasitic capacitance and methods for fabricating the same
X Cai, R Xie, A Khakifirooz, K Cheng
US Patent 8,921,191, 2014
1412014
Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond
CC Liu, E Franke, Y Mignot, R Xie, CW Yeung, J Zhang, C Chi, C Zhang, ...
Nature Electronics 1 (10), 562-569, 2018
1202018
Methods of forming single and double diffusion breaks on integrated circuit products comprised of FinFET devices and the resulting products
R Xie, KY Lim, MG Sung, RRH Kim
US Patent 9,412,616, 2016
1172016
FinFET semiconductor devices with improved source/drain resistance and methods of making same
R Xie, M Raymond, R Miller
US Patent 9,147,765, 2015
1162015
A 10nm platform technology for low power and high performance application featuring FINFET devices with multi workfunction gate stack on bulk and SOI
KI Seo, B Haran, D Gupta, D Guo, T Standaert, R Xie, H Shang, E Alptekin, ...
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical …, 2014
1122014
Effects of sulfur passivation on germanium MOS capacitors with HfON gate dielectric
R Xie, C Zhu
IEEE electron device letters 28 (11), 976-979, 2007
1012007
High-k gate stack on germanium substrate with fluorine incorporation
R Xie, M Yu, MY Lai, L Chan, C Zhu
Applied physics letters 92 (16), 2008
1002008
Methods of Forming Replacement Gate Structures for Semiconductor Devices
R Xie, X Cai, R Miller, A Knorr
US Patent App. 13/354,844, 2013
922013
Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structure
J Frougier, MG Sung, R Xie, C Park, S Bentley
US Patent 9,947,804, 2018
842018
Defect-free strain relaxed buffer layer
P Morin, K Cheng, J Fronheiser, X Cai, J Li, S Mochizuki, R Xie, H He, ...
US Patent App. 14/588,221, 2016
842016
Methods of forming diffusion breaks on integrated circuit products comprised of FinFET devices and the resulting products
R Xie, MG Sung, RRH Kim, KY Lim, C Park
US Patent 9,362,181, 2016
822016
Full bottom dielectric isolation to enable stacked nanosheet transistor for low power and high performance applications
J Zhang, J Frougier, A Greene, X Miao, L Yu, R Vega, P Montanini, ...
2019 IEEE International Electron Devices Meeting (IEDM), 11.6. 1-11.6. 4, 2019
812019
Methods of forming replacement gate structures for transistors and the resulting devices
R Xie, K Choi, SC Fan, S Ponoth
US Patent 9,257,348, 2016
812016
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