| Piezoelectric MEMS based acoustic sensors: A review W RezaAli, M Prasad Sensors and Actuators A: Physical 301, 1-31, 2020 | 162* | 2020 |
| Design and fabrication of Si-diaphragm, ZnO piezoelectric film-based MEMS acoustic sensor using SOI wafers M Prasad, V Sahula, VK Khanna IEEE transactions on semiconductor manufacturing 26 (2), 233-241, 2013 | 71 | 2013 |
| MEMS piezoelectric sensor for self-powered devices: A review M Sawane, M Prasad Materials Science in Semiconductor Processing 158, 107324, 2023 | 64 | 2023 |
| Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing VK Khanna, M Prasad, VK Dwivedi, C Shekhar, AC Pankaj, J Basu CSIR, 2007 | 42 | 2007 |
| Recent development and futuristic applications of MEMS based piezoelectric microphones A Kumar, A Varghese, A Sharma, M Prasad, V Janyani, RP Yadav, ... Sensors and Actuators A: Physical 347, 113887, 2022 | 34 | 2022 |
| Development of micro-hotplate and its reliability for gas sensing applications M Prasad, PS Dutta Applied Physics A 124, 1-11, 2018 | 31 | 2018 |
| Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor A Kumar, M Prasad, V Janyani, RP Yadav Microsystem Technologies 25 (12), 4517-4528, 2019 | 30 | 2019 |
| Fabrication and annealing temperature optimization for a piezoelectric ZnO based MEMS acoustic sensor A Kumar, M Prasad, V Janyani, RP Yadav Journal of Electronic Materials 48, 5693-5701, 2019 | 22 | 2019 |
| ZnO etching and microtunnel fabrication for high-reliability MEMS acoustic sensor M Prasad, V Sahula, VK Khanna IEEE Transactions on Device and Materials Reliability 14 (1), 545-554, 2013 | 22 | 2013 |
| Development of MEMS acoustic sensor with microtunnel for high SPL measurement M Prasad, VK Khanna IEEE Transactions on Industrial Electronics 69 (3), 3142-3150, 2021 | 21 | 2021 |
| Design and fabrication of microtunnel and Si-diaphragm for ZnO based MEMS acoustic sensor for high SPL and low frequency application WR Ali, M Prasad Microsystem Technologies 21, 1249-1255, 2015 | 21 | 2015 |
| High-energy 120 MeV Au9+ ion beam-induced modifications and evaluation of craters in surface morphology of SnO2 and TiO2 nanocomposite thin films V Kumar, R Gupta, V Chauhan, J Ram, P Singh, M Prasad, R Mehra, ... Applied Nanoscience 9, 1265-1280, 2019 | 19 | 2019 |
| Deposition and process development of AlN for MEMS acoustic sensor M Prasad, R Kumar Vacuum 157, 349-353, 2018 | 19 | 2018 |
| Piezoelectric based MEMS acoustic sensor for wide frequency applications WR Ali, M Prasad IEEE Sensors Journal 21 (24), 27352-27360, 2021 | 18 | 2021 |
| Design, development and reliability testing of a low power bridge-type micromachined hotplate M Prasad Microelectronics Reliability 55 (6), 937-944, 2015 | 18 | 2015 |
| Development of diaphragm and microtunnel structures for MEMS piezoelectric sensors A Kumar, M Prasad, V Janyani, RP Yadav IEEE Transactions on Semiconductor Manufacturing 33 (4), 606-613, 2020 | 15 | 2020 |
| High energy (150 MeV) Fe11+ ion beam induced modifications of physico-chemical and photoluminescence properties of high-k dielectric nanocrystalline zirconium oxide thin films V Chauhan, R Gupta, V Kumar, J Ram, F Singh, M Prasad, S Kumar, ... Ceramics International 45 (15), 18887-18898, 2019 | 15 | 2019 |
| Fabrication and reliability study of a double spiral platinum-based MEMS hotplate M Prasad, DS Arya, VK Khanna Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (2), 025003-025003, 2015 | 14 | 2015 |
| A low-power, micromachined, double spiral hotplate for MEMS gas sensors M Prasad, VK Khanna Microsystem Technologies 21, 2123-2131, 2015 | 13 | 2015 |
| Design and modeling of a ZnO-based MEMS acoustic sensor for aeroacoustic and audio applications DS Arya, M Prasad, CC Tripathi 2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS …, 2015 | 13 | 2015 |
