In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators BP Harrington, R Abdolvand
Journal of Micromechanics and Microengineering 21 (8), 085021, 2011
180 2011 A 76 dB 1.7 GHz 0.18 m CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi
IEEE journal of solid-state circuits 46 (1), 224-235, 2010
95 2010 Turnover temperature point in extensional-mode highly doped silicon microresonators M Shahmohammadi, BP Harrington, R Abdolvand
IEEE transactions on electron devices 60 (3), 1213-1220, 2013
76 2013 Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q BP Harrington, M Shahmohammadi, R Abdolvand
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010
66 2010 Electronic temperature compensation of lateral bulk acoustic resonator reference oscillators using enhanced series tuning technique HM Lavasani, W Pan, BP Harrington, R Abdolvand, F Ayazi
IEEE Journal of Solid-State Circuits 47 (6), 1381-1393, 2012
43 2012 Concurrent enhancement of Q and power handling in multi-tether high-order extensional resonators M Shahmohammadi, BP Harrington, R Abdolvand
2010 IEEE MTT-S International Microwave Symposium, 1452-1455, 2010
34 2010 Q-enhancement through minimization of acoustic energy radiation in micromachined lateral-mode resonators BP Harrington, R Abdolvand
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
34 2009 Passive tuning in lateral-mode thin-film piezoelectric oscillators M Shahmohammadi, D Dikbas, BP Harrington, R Abdolvand
2011 Joint Conference of the IEEE International Frequency Control and the …, 2011
28 2011 Zero temperature coefficient of frequency in extensional-mode highly doped silicon microresonators M Shahmohammadi, BP Harrington, R Abdolvand
2012 IEEE International Frequency Control Symposium Proceedings, 1-4, 2012
27 2012 A 76dBΩ 1.7 GHz 0.18 µm CMOS tunable transimpedance amplifier using broadband current pre-amplifier for high frequency lateral micromechanical oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi
2010 IEEE International Solid-State Circuits Conference-(ISSCC), 318-319, 2010
27 2010 Thin-film piezoelectric-on-silicon particle mass sensors BP Harrington, R Abdolvand, A Hajjam, JC Wilson, S Pourkamali
2010 IEEE International Frequency Control Symposium, 238-241, 2010
26 2010 Embedded Micro Valve In Microphone J Szczech, SB Lee, JJ Albers, V Gill, B Harrington, K Friel
US Patent App. 14/454,337, 2015
15 2015 Q enhancement in micromachined lateral-extensional resonators R Abdolvand, B Harrington
US Patent 8,228,141, 2012
12 2012 Temperature-compensated extensional-mode MEMS resonators on highly N-type doped silicon substrates M Shahmohammadi, BP Harrington, J Gonzales, R Abdolvand
Proc. Solid-State Sensors, Actuat., Microsyst. Workshop, 371-374, 2012
11 2012 50Ω-terminated 900MHz monolithic lateral-extensional piezoelectric filters on ultrananocryslalline diamond H Fatemi, BP Harrington, H Zeng, J Carlisle, R Abdolvand
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
11 2011 A 76dBOhm, 1.7 GHz, 0.18 um CMOS Tunable Transimpedance Ampflier Using Broadband Current Pre-Amplifier for High Frequency Lateral Micromechanical Oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi
IEEE International Solid State Circuits Conference (ISSCC 2010), 318-320, 2010
11 2010 Discrete MEMS Including Sensor Device B Harrington
US Patent App. 14/792,821, 2016
9 2016 Diaphragm Stiffener B Harrington
US Patent App. 14/683,360, 2016
9 2016 Elevated MEMS device in a microphone with ingress protection JJ Albers, B Harrington, SB Lee
US Patent 10,654,712, 2020
8 2020 Composite Back Plate And Method Of Manufacturing The Same B Harrington
US Patent App. 14/792,838, 2016
6 2016