| Device electronics for integrated circuits RS Muller, TI Kamins John Wiley & Sons, 2002 | 3053 | 2002 |
| Etch rates for micromachining processing KR Williams, RS Muller Journal of Microelectromechanical systems 5 (4), 256-269, 1996 | 1047 | 1996 |
| Surface micromachining for microelectromechanical systems JM Bustillo, RT Howe, RS Muller Proceedings of the IEEE 86 (8), 1552-1574, 1998 | 1038 | 1998 |
| IC-processed electrostatic micromotors LS Fan, YC Tai, RS Muller Sensors and actuators 20 (1-2), 41-47, 1989 | 800 | 1989 |
| Integrated movable micromechanical structures for sensors and actuators LS Fan, YC Tai, RS Muller IEEE Transactions on Electron Devices 35 (6), 724-730, 1988 | 473 | 1988 |
| Magnetically actuated, addressable microstructures JW Judy, RS Muller Journal of Microelectromechanical systems 6 (3), 249-256, 1997 | 408 | 1997 |
| Resonant-microbridge vapor sensor RT Howe, RS Muller IEEE Transactions on Electron Devices 33 (4), 499-506, 1986 | 365 | 1986 |
| Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers TJ Seok, N Quack, S Han, RS Muller, MC Wu Optica 3 (1), 64-70, 2016 | 343 | 2016 |
| Silicon-processed overhanging microgripper CJ Kim, AP Pisano, RS Muller Journal of Microelectromechanical Systems 1 (1), 31-36, 1992 | 341 | 1992 |
| Polycrystalline silicon micromechanical beams RT Howe, RS Muller Journal of the Electrochemical Society 130 (6), 1420, 1983 | 315 | 1983 |
| Hydrogen in lithium niobate JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez Advances in Physics 45 (5), 349-392, 1996 | 283 | 1996 |
| Surface-micromachined microoptical elements and systems RS Muller, KY Lau Proceedings of the IEEE 86 (8), 1705-1720, 2002 | 271 | 2002 |
| Silicon micromechanics: sensors and actuators on a chip RT Howe, RS Muller, KJ Gabriel, WSN Trimmer IEEE spectrum 27 (7), 29-31, 1990 | 265 | 1990 |
| Magnetic microactuation of polysilicon flexure structures JW Judy, RS Muller, HH Zappe Journal of microelectromechanical systems 4 (4), 162-169, 1995 | 251 | 1995 |
| IC-processed electrostatic synchronous micromotors YC Tai, RS Muller Sensors and Actuators 20 (1-2), 49-55, 1989 | 248 | 1989 |
| Investigation of porous silicon for vapor sensing RC Anderson, RS Muller, CW Tobias Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989 | 248 | 1989 |
| Polysilicon microgripper CJ Kim, AP Pisano, RS Muller, MG Lim Sensors and Actuators A: Physical 33 (3), 221-227, 1992 | 240 | 1992 |
| IC-processed micro-motors: Design, technology, and testing YC Tai, LS Fan, RS Muller IEEE Micro Electro Mechanical Systems,, Proceedings,'An Investigation of …, 1989 | 238 | 1989 |
| Stroboscopic interferometer system for dynamic MEMS characterization MR Hart, RA Conant, KY Lau, RS Muller Journal of microelectromechanical systems 9 (4), 409-418, 2000 | 237 | 2000 |
| A flat high-frequency scanning micromirror RA Conant, JT Nee, KY Lau, RS Muller Proc. Solid-State Sensor and Actuator Workshop, 6-9, 2000 | 228 | 2000 |
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