Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography F Torretti, J Sheil, R Schupp, MM Basko, M Bayraktar, RA Meijer, S Witte, ...
Nature communications 11 (1), 2334, 2020
106 2020 Plasma propulsion of a metallic microdroplet and its deformation upon laser impact D Kurilovich, AL Klein, F Torretti, A Lassise, R Hoekstra, W Ubachs, ...
Physical review applied 6 (1), 014018, 2016
106 2016 Efficient Generation of Extreme Ultraviolet Light From R Schupp, F Torretti, RA Meijer, M Bayraktar, J Scheers, D Kurilovich, ...
Physical Review Applied 12 (1), 014010, 2019
67 2019 Power-law scaling of plasma pressure on laser-ablated tin microdroplets D Kurilovich, MM Basko, DA Kim, F Torretti, R Schupp, JC Visschers, ...
Physics of Plasmas 25 (1), 2018
56 2018 Analysis of the fine structure of A Windberger, F Torretti, A Borschevsky, A Ryabtsev, S Dobrodey, ...
Physical Review A 94 (1), 012506, 2016
56 2016 Optical spectroscopy of complex open- F Torretti, A Windberger, A Ryabtsev, S Dobrodey, H Bekker, W Ubachs, ...
Physical Review A 95 (4), 042503, 2017
47 2017 Expansion dynamics after laser-induced cavitation in liquid tin microdroplets D Kurilovich, TF Pinto, F Torretti, R Schupp, J Scheers, AS Stodolna, ...
Physical Review Applied 10 (5), 054005, 2018
45 2018 Short-wavelength out-of-band EUV emission from Sn laser-produced plasma F Torretti, R Schupp, D Kurilovich, A Bayerle, J Scheers, W Ubachs, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 51 (4), 045005, 2018
39 2018 EUV spectroscopy of highly charged J Scheers, C Shah, A Ryabtsev, H Bekker, F Torretti, J Sheil, DA Czapski, ...
Physical Review A 101 (6), 062511, 2020
36 2020 Radiation transport and scaling of optical depth in Nd: YAG laser-produced microdroplet-tin plasma R Schupp, F Torretti, RA Meijer, M Bayraktar, J Sheil, J Scheers, ...
Applied Physics Letters 115 (12), 2019
36 2019 Spectral characterization of an industrial EUV light source for nanolithography F Torretti, F Liu, M Bayraktar, J Scheers, Z Bouza, W Ubachs, R Hoekstra, ...
Journal of physics D: applied physics 53 (5), 055204, 2019
28 2019 Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light SA Reijers, D Kurilovich, F Torretti, H Gelderblom, OO Versolato
Journal of Applied Physics 124 (1), 2018
21 2018 Energy-level structure of J Scheers, A Ryabtsev, A Borschevsky, JC Berengut, K Haris, R Schupp, ...
Physical Review A 98 (6), 062503, 2018
17 2018 Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy-and charge-state-resolved spectrometry of tin laser-produced plasma L Poirier, A Bayerle, A Lassise, F Torretti, R Schupp, L Behnke, Y Mostafa, ...
Applied Physics B 128 (3), 39, 2022
9 2022 Lithography machine in-line broadband spectrum metrology F Liu, F van de Wetering, M Bayraktar, F Bijkerk, D Smeets, S Huang, Y Ni, ...
P43), EUVL Workshop, 2019
3 2019 Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography O Versolato, A Bayerle, M Bayraktar, L Behnke, H Bekker, Z Bouza, ...
Journal of Physics: Conference Series 1412 (19), 192006, 2020
2020 Spectroscopic measurements of Sn Laser-Produced Plasmas L Behnke, R Schupp, Z Bouza, J Scheers, J Sheil, F Torretti, M Bayraktar, ...
EUV Source Workshop 2019, 2019
2019 Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range Z Bouza, J Scheers, J Sheil, R Schupp, F Torretti, M Bayraktar, F Bijkerk, ...
43rd Annual Meeting NNV AMO 2019, 2019
2019 Emission of tin plasmas for lithography applications J Colgan, A Neukirch, D Kilcrease, J Abdallah, M Sherrill, C Fontes, ...
APS Division of Atomic, Molecular and Optical Physics Meeting Abstracts 2019 …, 2019
2019 Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography F Torretti
2019 