Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography F Torretti, J Sheil, R Schupp, MM Basko, M Bayraktar, RA Meijer, S Witte, ...
Nature communications 11 (1), 2334, 2020
106 2020 Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser L Behnke, R Schupp, Z Bouza, M Bayraktar, Z Mazzotta, R Meijer, J Sheil, ...
Optics express 29 (3), 4475-4487, 2021
53 2021 Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review) OO Versolato, J Sheil, S Witte, W Ubachs, R Hoekstra
Journal of Optics 24 (5), 054014, 2022
40 2022 EUV spectroscopy of highly charged J Scheers, C Shah, A Ryabtsev, H Bekker, F Torretti, J Sheil, DA Czapski, ...
Physical Review A 101 (6), 062511, 2020
36 2020 Radiation transport and scaling of optical depth in Nd: YAG laser-produced microdroplet-tin plasma R Schupp, F Torretti, RA Meijer, M Bayraktar, J Sheil, J Scheers, ...
Applied Physics Letters 115 (12), 2019
36 2019 Sources for beyond extreme ultraviolet lithography and water window imaging G O’Sullivan, B Li, P Dunne, P Hayden, D Kilbane, R Lokasani, E Long, ...
Physica Scripta 90 (5), 054002, 2015
36 2015 High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model DJ Hemminga, L Poirier, MM Basko, R Hoekstra, W Ubachs, ...
Plasma Sources Science and Technology 30 (10), 105006, 2021
33 2021 Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, ...
Journal of Physics D: Applied Physics 54 (36), 365103, 2021
32 2021 Characterization of 1- and R Schupp, L Behnke, J Sheil, Z Bouza, M Bayraktar, W Ubachs, ...
Physical Review Research 3 (1), 013294, 2021
27 2021 Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma J Hernandez-Rueda, B Liu, DJ Hemminga, Y Mostafa, RA Meijer, ...
Physical Review Research 4 (1), 013142, 2022
23 2022 Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions J Sheil, OO Versolato, AJ Neukirch, J Colgan
Journal of Physics B: Atomic, Molecular and Optical Physics 54 (3), 035002, 2021
16 2021 EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, ...
Journal of physics B: atomic, molecular and optical physics 53 (19), 195001, 2020
16 2020 Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma Y Mostafa, L Behnke, DJ Engels, Z Bouza, J Sheil, W Ubachs, ...
Applied Physics Letters 123 (23), 2023
14 2023 Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma L Poirier, DJ Hemminga, A Lassise, L Assink, R Hoekstra, J Sheil, ...
Physics of Plasmas 29 (12), 2022
14 2022 Analysis of soft x-ray emission spectra of laser-produced dysprosium, erbium and thulium plasmas J Sheil, P Dunne, T Higashiguchi, D Kos, E Long, T Miyazaki, F O’Reilly, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 50 (6), 065006, 2017
13 2017 The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range Z Bouza, J Byers, J Scheers, R Schupp, Y Mostafa, L Behnke, Z Mazzotta, ...
AIP advances 11 (12), 2021
12 2021 Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources DJ Hemminga, OO Versolato, J Sheil
Physics of Plasmas 30 (3), 2023
10 2023 Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source S Rai, KI Bijlsma, L Poirier, E De Wit, L Assink, A Lassise, I Rabadán, ...
Plasma Sources Science and Technology 32 (3), 035006, 2023
9 2023 Review of the 1st EUV Light Sources Code Comparison Workshop J Sheil, O Versolato, V Bakshi, H Scott
Atoms 11 (10), 130, 2023
7 2023 Acceleration mechanisms of energetic ion debris in laser-driven tin plasma EUV sources SR Totorica, K Lezhnin, DJ Hemminga, J Gonzalez, J Sheil, A Diallo, ...
Applied Physics Letters 124 (17), 2024
6 2024 