| High figure-of-merit Lamb wave resonators based on Al0. 7Sc0. 3N thin film S Shao, Z Luo, T Wu IEEE Electron Device Letters 42 (9), 1378-1381, 2021 | 56 | 2021 |
| High quality co-sputtering alscn thin films for piezoelectric lamb-wave resonators S Shao, Z Luo, Y Lu, A Mazzalai, C Tosi, T Wu Journal of Microelectromechanical Systems 31 (3), 328-337, 2022 | 34 | 2022 |
| Characterization of AlN and AlScN film ICP etching for micro/nano fabrication Z Luo, S Shao, T Wu Microelectronic Engineering 242, 111530, 2021 | 30 | 2021 |
| Al0.78Sc0.22N Lamb Wave Contour Mode Resonators Z Luo, S Shao, T Wu IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 69 …, 2021 | 25 | 2021 |
| Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines S Shao, Z Luo, Y Lu, A Mazzalai, C Tosi, T Wu IEEE Electron Device Letters 43 (4), 647-650, 2022 | 24 | 2022 |
| Characterization of Ferroelectric Al0.7Sc0.3N Thin Film on Pt and Mo Electrodes R Nie, S Shao, Z Luo, X Kang, T Wu Micromachines 13 (10), 1629, 2022 | 20 | 2022 |
| Al0. 7Sc0. 3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2· Qm) over 146 Z Luo, S Shao, K Liu, Y Lu, A Mazzalai, C Tosi, T Wu Applied Physics Letters 120 (17), 2022 | 19 | 2022 |
| Aluminum nitride thin film based reconfigurable integrated photonic devices Z Luo, A Zhang, W Huang, S Shao, Y Liu, T Wu, Y Zou IEEE Journal of Selected Topics in Quantum Electronics 29 (3: Photon. Elec …, 2023 | 15 | 2023 |
| Optimization of AlN and AlScN film ICP etching Z Luo, S Shao, T Wu 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 9 | 2021 |
| Optimization of S1 Lamb wave resonators with A10. 8Sc0. 2N S Shao, Z Luo, T Wu 2021 IEEE 16th International Conference on Nano/Micro Engineered and …, 2021 | 8 | 2021 |
| Nonlinearity of Piezoelectric Micromachined Ultrasonic Transducer Using AlN Thin Film Z Luo, J Cai, S Zhang, Y Gu, L Lou, T Wu IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control 2 …, 2022 | 7 | 2022 |
| AlN contour mode resonators with half circle shaped reflectors Z Luo, S Shao, T Wu 2021 IEEE 16th International Conference on Nano/Micro Engineered and …, 2021 | 6 | 2021 |
| Electro-acoustic phase modulator based on AlScN thin film S Shao, Z Luo, T Wu IEEE Electron Device Letters 44 (5), 817-820, 2023 | 5 | 2023 |
| Design and fabrication of Lamb wave resonator based on 15% scandium-doped aluminum nitride thin film S Shao, Z Luo, T Wu 2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021 | 5 | 2021 |
| Lorentz-force gyrator based on AlScN piezoelectric thin film S Shao, Z Luo, K Liu, T Wu Applied Physics Letters 121 (21), 2022 | 3 | 2022 |
| Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer Z Luo, D Li, X Le, T He, S Shao, Q Lv, Z Liu, C Lee, T Wu Nanoscale 16 (21), 10230-10238, 2024 | 2 | 2024 |
| Sub-6dB Aluminum Scandium Nitride Acoustic Delay Lines S Shao, Z Luo, T Wu 2022 IEEE International Ultrasonics Symposium (IUS), 1-4, 2022 | 2 | 2022 |
| Topological valley Hall edge state of lamb wave in aluminum scandium nitride thin film Z Luo, S Shao, C Lee, T Wu 2023 IEEE 23rd International Conference on Nanotechnology (NANO), 380-383, 2023 | 1 | 2023 |
| Lamb Wave Resonators based on Co-sputtered Al0.78Sc0.22N Thin Film Z Luo, S Shao, T Wu 2021 IEEE International Ultrasonics Symposium (IUS), 1-3, 2021 | 1 | 2021 |
| High Quality Factor AlScN Lamb Wave Resonators Using NbN/Al Top Electrodes at Cryogenic Temperature Z Luo, S Shao, P Dong, H Guo, X Zou, J Li, C Lee, T Wu 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | | 2023 |
Tao WuShanghaiTech Universityایمیل تأیید شده در shanghaitech.edu.cn