دنبال کردن
M. David Henry
M. David Henry
Sandia National Labs - Distinguished Member of the Technical Staff
ایمیل تأیید شده در sandia.gov
عنوان
نقل شده توسط
نقل شده توسط
سال
Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars andnanopillars
MD Henry, S Walavalkar, A Homyk, A Scherer
Nanotechnology 20 (25), 255305, 2009
1992009
Phase-exchange-driven wake-up and fatigue in ferroelectric hafnium zirconium oxide films
SS Fields, SW Smith, PJ Ryan, ST Jaszewski, IA Brummel, A Salanova, ...
ACS applied materials & interfaces 12 (23), 26577-26585, 2020
1412020
Tunable visible and near-IR emission from sub-10 nm etched single-crystal Si nanopillars
SS Walavalkar, CE Hofmann, AP Homyk, MD Henry, HA Atwater, ...
Nano letters 10 (11), 4423-4428, 2010
1162010
Pyroelectric response in crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films
JFI S. W. Smith, A. R. Kitahara, M. A. Rodriguez, M. D. Henry, M. T. Brumbach
Applied Physics Letters 110 (072901), 2017
1122017
Chemical sensing and/or measuring devices and methods
AP Homyk, MD Henry, A Scherer, S Walavalkar
US Patent 9,018,684, 2015
942015
Ga+ beam lithography for nanoscale silicon reactive ion etching
MD Henry, MJ Shearn, B Chhim, A Scherer
Nanotechnology 21 (24), 245303, 2010
822010
ICP etching of silicon for micro and nanoscale devices
MD Henry
California Institute of Technology, 2010
822010
Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications
M Shearn, X Sun, MD Henry, A Yariv, A Scherer
Semiconductor technologies 27, 81-105, 2010
782010
Al0. 68Sc0. 32N Lamb wave resonators with electromechanical coupling coefficients near 10.28%
G Esteves, TR Young, Z Tang, S Yen, TM Bauer, MD Henry, RH Olsson
Applied Physics Letters 118 (17), 2021
652021
Methods for fabrication of high aspect ratio micropillars and nanopillars
MD Henry, AP Homyk, A Scherer, S Walavalkar
US Patent 8,148,264, 2012
612012
Origin of ferroelectric phase stabilization via the clamping effect in ferroelectric hafnium zirconium oxide thin films
SS Fields, T Cai, ST Jaszewski, A Salanova, T Mimura, HH Heinrich, ...
Advanced Electronic Materials 8 (12), 2200601, 2022
552022
Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors
MD Henry, C Welch, A Scherer
Journal of Vacuum Science & Technology A 27 (5), 1211-1216, 2009
492009
Radial pn junction, wire array solar cells
BM Kayes, MA Filler, MD Henry, JR Maiolo Iii, MD Kelzenberg, ...
2008 33rd IEEE Photovoltaic Specialists Conference, 1-5, 2008
432008
Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots
SS Walavalkar, AP Homyk, CE Hofmann, MD Henry, C Shin, HA Atwater, ...
Applied Physics Letters 98 (15), 2011
382011
Surface encapsulation for low-loss silicon photonics
M Borselli, TJ Johnson, CP Michael, MD Henry, O Painter
Applied Physics Letters 91 (13), 131117-131117-3, 2007
382007
Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films
SS Fields, DH Olson, ST Jaszewski, CM Fancher, SW Smith, DA Dickie, ...
Applied Physics Letters 118 (10), 2021
362021
Wake-up and fatigue mechanisms in ferroelectric Hf0. 5Zr0. 5O2 films with symmetric RuO2 electrodes
SS Fields, SW Smith, ST Jaszewski, T Mimura, DA Dickie, G Esteves, ...
Journal of Applied Physics 130 (13), 2021
342021
Thermal resistance and heat capacity in hafnium zirconium oxide (Hf1–xZrxO2) dielectrics and ferroelectric thin films
EA Scott, SW Smith, MD Henry, CM Rost, A Giri, JT Gaskins, SS Fields, ...
Applied Physics Letters 113 (19), 2018
332018
Reactive sputter deposition of piezoelectric Sc0. 12Al0. 88N for contour mode resonators
MD Henry, TR Young, EA Douglas, BA Griffin
Journal of Vacuum Science & Technology B 36 (3), 2018
332018
Controllable deformation of silicon nanowires with strain up to 24%
SS Walavalkar, AP Homyk, MD Henry, A Scherer
Journal of Applied Physics 107 (12), 2010
322010
سیستم در حال حاضر قادر به انجام عملکرد نیست. بعداً دوباره امتحان کنید.
مقاله‌ها 1–20