| Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions U Zaghloul, G Papaioannou, F Coccetti, P Pons, R Plana Microelectronics Reliability 49 (9-11), 1309-1314, 2009 | 79 | 2009 |
| Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation M Lamhamdi, P Pons, U Zaghloul, L Boudou, F Coccetti, J Guastavino, ... Microelectronics Reliability 48 (8-9), 1248-1252, 2008 | 76 | 2008 |
| On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization … U Zaghloul, G Papaioannou, B Bhushan, F Coccetti, P Pons, R Plana Microelectronics Reliability 51 (9-11), 1810-1818, 2011 | 73 | 2011 |
| On the influence of environment gases, relative humidity and gas purification ondielectric charging/discharging processes in electrostatically driven MEMS/NEMSdevices U Zaghloul, B Bhushan, P Pons, GJ Papaioannou, F Coccetti, R Plana Nanotechnology 22 (3), 035705, 2010 | 56 | 2010 |
| Sub-1-volt piezoelectric nanoelectromechanical relays with millivolt switching capability U Zaghloul, G Piazza IEEE Electron Device Letters 35 (6), 669-671, 2014 | 54 | 2014 |
| A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy U Zaghloul, GJ Papaioannou, F Coccetti, P Pons, R Plana Journal of Micromechanics and Microengineering 20 (6), 064016, 2010 | 39 | 2010 |
| 10–25 NM piezoelectric nano-actuators and NEMS switches for millivolt computational logic U Zaghloul, G Piazza 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 33 | 2013 |
| Nanoscale characterization of the dielectric charging phenomenon in PECVD siliconnitride thin films with various interfacial structures based on Kelvin probe forcemicroscopy U Zaghloul, GJ Papaioannou, H Wang, B Bhushan, F Coccetti, P Pons, ... Nanotechnology 22 (20), 205708, 2011 | 32 | 2011 |
| Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques U Zaghloul, M Koutsoureli, H Wang, F Coccetti, G Papaioannou, P Pons, ... Microelectronics Reliability 50 (9-11), 1615-1620, 2010 | 32 | 2010 |
| Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements U Zaghloul, B Bhushan, P Pons, GJ Papaioannou, F Coccetti, R Plana Journal of colloid and interface science 358 (1), 1-13, 2011 | 31 | 2011 |
| Synthesis and characterization of 10 nm thick piezoelectric AlN films with high c-axis orientation for miniaturized nanoelectromechanical devices U Zaghloul, G Piazza Applied Physics Letters 104 (25), 2014 | 30 | 2014 |
| Highly scalable NEMS relays with stress-tuned switching voltage using piezoelectric buckling actuators U Zaghloul, G Piazza IEEE Transactions on Electron Devices 61 (10), 3520-3528, 2014 | 27 | 2014 |
| Kelvin probe force microscopy-based characterization techniques applied for electrostatic MEMS/NEMS devices and bare dielectric films to investigate the dielectric and … U Zaghloul, B Bhushan, F Coccetti, P Pons, R Plana Journal of Vacuum Science & Technology A 29 (5), 2011 | 21 | 2011 |
| A comprehensive study for dielectric charging process in silicon nitride films for RF MEMS switches using Kelvin probe microscopy U Zaghloul, A Belarni, F Coccetti, GJ Papaioannou, L Bouscayrol, P Pons, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 19 | 2009 |
| A novel low cost failure analysis technique for dielectric charging phenomenon in electrostatically actuated MEMS devices U Zaghloul, F Coccetti, GJ Papaioannou, P Pons, R Plana 2010 IEEE International Reliability Physics Symposium, 237-245, 2010 | 18 | 2010 |
| Effect of deposition gas ratio, RF power, and substrate temperature on the charging/discharging processes in PECVD silicon nitride films for electrostatic NEMS/MEMS reliability … U Zaghloul, GJ Papaioannou, B Bhushan, H Wang, F Coccetti, P Pons, ... Journal of microelectromechanical systems 20 (6), 1395-1418, 2011 | 14 | 2011 |
| Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force–distance curve … U Zaghloul, B Bhushan, G Papaioannou, F Coccetti, P Pons, R Plana Journal of colloid and interface science 365 (1), 236-253, 2012 | 13 | 2012 |
| Effect of humidity on dielectric charging process in electrostatic capacitive RF MEMS switches based on Kelvin probe force microscopy surface potential measurements U Zaghloul, GJ Papaioannou, F Coccetti, P Pons, R Plana MRS Online Proceedings Library (OPL) 1222, 1222-DD02-11, 2009 | 12 | 2009 |
| Different stiction mechanisms in electrostatic MEMS devices: Nanoscale characterization based on adhesion and friction measurements U Zaghloul, B Bhushan, P Pons, G Papaioannou, F Coccetti, R Plana 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 9 | 2011 |
| Charging processes in silicon nitride films for RF-MEMS capacitive switches: The effect of deposition method and film thickness U Zaghloul, A Abelarni, F Coccetti, G Papaioannou, R Plana, P Pons MRS Fall Meeting, 1-5, 2008 | 9 | 2008 |