| Principles of plasma discharges and materials processing MA Lieberman, AJ Lichtenberg MRS Bulletin 30 (12), 899-901, 1994 | 13783 | 1994 |
| Regular and stochastic motion AJ Lichtenberg, MA Lieberman Springer Science & Business Media, 2013 | 5378 | 2013 |
| Regular and chaotic dynamics AJ Lichtenberg, MA Lieberman Springer Science & Business Media, 2013 | 3820 | 2013 |
| Ion energy distributions in rf sheaths; review, analysis and simulation E Kawamura, V Vahedi, MA Lieberman, CK Birdsall Plasma Sources Science and Technology 8 (3), R45, 1999 | 737 | 1999 |
| Analytical solution for capacitive RF sheath MA Lieberman IEEE Transactions on Plasma Science 16 (6), 638-644, 1988 | 709 | 1988 |
| Global model of Ar, O2, Cl2, and Ar/O2 high‐density plasma discharges C Lee, MA Lieberman Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13 (2 …, 1995 | 696 | 1995 |
| Standing wave and skin effects in large-area, high-frequency capacitive discharges MA Lieberman, JP Booth, P Chabert, JM Rax, MM Turner Plasma Sources Science and Technology 11 (3), 283, 2002 | 403 | 2002 |
| Model of plasma immersion ion implantation MA Lieberman Journal of Applied Physics 66 (7), 2926-2929, 1989 | 375 | 1989 |
| Spatially averaged (global) model of time modulated high density argon plasmas S Ashida, C Lee, MA Lieberman Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13 (5 …, 1995 | 344 | 1995 |
| Stochastic and adiabatic behavior of particles accelerated by periodic forces MA Lieberman, AJ Lichtenberg Physical Review A 5 (4), 1852, 1972 | 336 | 1972 |
| Dynamics of a collisional, capacitive RF sheath MA Lieberman IEEE transactions on plasma science 17 (2), 338-341, 1989 | 329 | 1989 |
| Global model of plasma chemistry in a high density oxygen discharge C Lee, DB Graves, MA Lieberman, DW Hess Journal of the Electrochemical Society 141 (6), 1546, 1994 | 316 | 1994 |
| From Fermi acceleration to collisionless discharge heating MA Lieberman, VA Godyak IEEE transactions on plasma science 26 (3), 955-986, 1998 | 292 | 1998 |
| Global models of pulse-power-modulated high-density, low-pressure discharges MA Lieberman, S Ashida Plasma Sources Science and Technology 5 (2), 145, 1996 | 283 | 1996 |
| Electronegativity of low-pressure high-density oxygen discharges JT Gudmundsson, IG Kouznetsov, KK Patel, MA Lieberman Journal of Physics D: Applied Physics 34 (7), 1100, 2001 | 263 | 2001 |
| Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations V Vahedi, CK Birdsall, MA Lieberman, G DiPeso, TD Rognlien Physics of Fluids B: Plasma Physics 5 (7), 2719-2729, 1993 | 257 | 1993 |
| Analytic model of power deposition in inductively coupled plasma sources V Vahedi, MA Lieberman, G DiPeso, TD Rognlien, D Hewett Journal of Applied Physics 78 (3), 1446-1458, 1995 | 243 | 1995 |
| Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques V Vahedi, G DiPeso, CK Birdsall, MA Lieberman, TD Rognlien Plasma Sources Science and Technology 2 (4), 261, 1993 | 238 | 1993 |
| Hysteresis and the E-to-H transition in radiofrequencyinductive discharges MM Turner, MA Lieberman Plasma Sources Science and Technology 8 (2), 313, 1999 | 229 | 1999 |
| Model of plasma immersion ion implantation for voltage pulses with finite rise and fall times RA Stewart, MA Lieberman Journal of applied physics 70 (7), 3481-3487, 1991 | 213 | 1991 |
