| Review of atom probe FIB-based specimen preparation methods MK Miller, KF Russell, K Thompson, R Alvis, DJ Larson Microscopy and microanalysis 13 (6), 428-436, 2007 | 469 | 2007 |
| Atom probe tomography of electronic materials TF Kelly, DJ Larson, K Thompson, RL Alvis, JH Bunton, JD Olson, ... Annu. Rev. Mater. Res. 37 (1), 681-727, 2007 | 263 | 2007 |
| Atom probe tomography today A Cerezo, PH Clifton, MJ Galtrey, CJ Humphreys, TF Kelly, DJ Larson, ... Materials Today 10 (12), 36-42, 2007 | 157 | 2007 |
| Atomic layer deposition of ruthenium thin films from an amidinate precursor H Wang, RG Gordon, R Alvis, RM Ulfig Chemical Vapor Deposition 15 (10‐12), 312-319, 2009 | 80 | 2009 |
| Deposition of a conductor in a via hole or trench PR Besser, JA Iacoponi, R Alvis US Patent 5,918,149, 1999 | 78 | 1999 |
| Analysis of bulk dielectrics with atom probe tomography DJ Larson, RL Alvis, DF Lawrence, TJ Prosa, RM Ulfig, DA Reinhard, ... Microscopy and Microanalysis 14 (S2), 1254-1255, 2008 | 67 | 2008 |
| Scanning capacitance microscopy measurement of two-dimensional dopant profiles across junctions JJ Kopanski, JF Marchiando, DW Berning, R Alvis, HE Smith Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1998 | 56 | 1998 |
| Specimen preparation for cross-section atom probe analysis D Lawrence, R Alvis, D Olson Microscopy and Microanalysis 14 (S2), 1004-1005, 2008 | 33 | 2008 |
| Observation of diamond nanocrystals in carbon films deposited during ion‐assisted microwave plasma nucleation pretreatments SP McGinnis, MA Kelly, SB Hagström, RL Alvis Journal of applied physics 79 (1), 170-174, 1996 | 33 | 1996 |
| Three-dimensional atomic-scale mapping of Pd in Ni1− xPdxSi∕ Si (100) thin films YC Kim, P Adusumilli, LJ Lauhon, DN Seidman, SY Jung, HD Lee, ... Applied Physics Letters 91 (11), 2007 | 31 | 2007 |
| Plasma FIB DualBeam delayering for atomic force nanoprobing of 14 nm finFET devices in an SRAM array R Alvis, T Landin, C Rue, P Carleson, O Sidorov, A Erickson, S Zumwalt, ... International Symposium for Testing and Failure Analysis 81030, 388-400, 2015 | 29 | 2015 |
| Self-aligned implant energy modulation for shallow source drain extension formation S Luning, R Alvis US Patent 5,650,343, 1997 | 28 | 1997 |
| Atomic force microscopy for cross section inspection and metrology K Wilder, CF Quate, B Singh, R Alvis, WH Arnold Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 24 | 1996 |
| Characterization of dilute species within CVD‐grown silicon nanowires doped using trimethylboron: protected lift‐out specimen preparation for atom probe tomography TJ Prosa, R Alvis, L Tsakalakos, VS Smentkowski Journal of microscopy 239 (2), 92-98, 2010 | 21 | 2010 |
| Junction metrology by cross‐sectional atomic force microscopy R Alvis, B Mantiply, M Young Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 20 | 1996 |
| Physical characterization of two‐dimensional doping profiles for process modeling R Alvis, S Luning, L Thompson, R Sinclair, P Griffin Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 17 | 1996 |
| High-volume process monitoring of FEOL 22nm FinFET structures using an automated STEM O Ugurlu, M Strauss, G Dutrow, J Blackwood, B Routh Jr, C Senowitz, ... Metrology, Inspection, and Process Control for Microlithography XXVII 8681 …, 2013 | 16 | 2013 |
| The influence of capping layer type on cobalt salicide formation in films and narrow lines PR Besser, A Lauwers, N Roelandts, K Maex, W Blum, R Alvis, M Stucchi, ... MRS Online Proceedings Library 514, 375-380, 1998 | 15 | 1998 |
| Temperature sensing probe for microthermometry R Alvis, AN Erickson, ARR Kizchery, JD Romero, BM Tracy US Patent 5,713,667, 1998 | 15 | 1998 |
| High-throughput, site-specific sample prep of ultra-thin TEM lamella for process metrology and failure analysis R Alvis, J Blackwood, SH Lee, M Bray International Symposium for Testing and Failure Analysis 39791, 391-398, 2012 | 14 | 2012 |
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