| New materials for micro-scale sensors and actuators: An engineering review SA Wilson, RPJ Jourdain, Q Zhang, RA Dorey, CR Bowen, M Willander, ... Materials Science and Engineering: R: Reports 56 (1-6), 1-129, 2007 | 681 | 2007 |
| An electrochemical microactuator: principle and first results CR Neagu, JGE Gardeniers, M Elwenspoek, JJ Kelly Journal of Microelectromechanical systems 5 (1), 2-9, 1996 | 164 | 1996 |
| Characterization of a planar microcoil for implantable microsystems CR Neagu, HV Jansen, A Smith, JGE Gardeniers, MC Elwenspoek Sensors and Actuators A: Physical 62 (1-3), 599-611, 1997 | 155 | 1997 |
| The electrolysis of water: an actuation principle for MEMS with a big opportunity C Neagu, H Jansen, H Gardeniers, M Elwenspoek Mechatronics 10 (4-5), 571-581, 2000 | 123 | 2000 |
| Motion of nanometer sized magnetic particles in a magnetic field gradient V Schaller, U Kräling, C Rusu, K Petersson, J Wipenmyr, A Krozer, ... Journal of Applied Physics 104 (9), 2008 | 108 | 2008 |
| Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof K Baert, M Caymax, C Rusu, S Sedky, A Witvrouw US Patent 7,176,111, 2007 | 78 | 2007 |
| Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers C Rusu, R van't Oever, MJ de Boer, HV Jansen, JW Berenschot, ... Journal of microelectromechanical systems 10 (2), 238-246, 2001 | 71 | 2001 |
| An electrochemical active valve CR Neagu, JGE Gardeniers, M Elwenspoek, JJ Kelly Electrochimica Acta 42 (20-22), 3367-3373, 1997 | 71 | 1997 |
| A Medical Microactuator based on a Electrochemical Principle C Neagu, CR Rusu | 53 | 1998 |
| Analysis of immunolabeled cells by atomic force microscopy, optical microscopy, and flow cytometry C Neagu, KO Van der Werf, CAJ Putman, YM Kraan, BG De Grooth, ... Journal of structural biology 112 (1), 32-40, 1994 | 52 | 1994 |
| New low-stress PECVD poly-SiGe layers for MEMS C Rusu, S Sedky, B Parmentier, A Verbist, O Richard, B Brijs, L Geenen, ... Journal of microelectromechanical systems 12 (6), 816-825, 2003 | 48 | 2003 |
| MEMS Sensor for In Situ TEM Atomic Force Microscopy A Nafari, D Karlen, C Rusu, K Svensson, H Olin, P Enoksson Journal of microelectromechanical systems 17 (2), 328-333, 2008 | 47 | 2008 |
| Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures A Mehta, M Gromova, C Rusu, R Olivier, K Baert, C Van Hoof, A Witvrouw 17th IEEE International Conference on Micro Electro Mechanical Systems …, 2004 | 40 | 2004 |
| Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer A Höchst, R Scheuerer, H Stahl, F Fischer, L Metzger, R Reichenbach, ... Sensors and Actuators A: Physical 114 (2-3), 355-361, 2004 | 37 | 2004 |
| A micromachined 94 GHz dielectric resonator antenna for focal plane array applications J Svedin, LG Huss, D Karlen, P Enoksson, C Rusu 2007 IEEE/MTT-S International Microwave Symposium, 1375-1378, 2007 | 35 | 2007 |
| Capacitive slanted-beam three-axis accelerometer: I. Modelling and design H Rödjegård, GI Andersson, C Rusu, M Löfgren, D Billger Journal of Micromechanics and Microengineering 15 (11), 1989, 2005 | 33 | 2005 |
| Minkowski fractal microstrip antenna for RFID tags M Rusu, M Hirvonen, H Rahimi, P Enoksson, C Rusu, N Pesonen, ... 2008 38th European Microwave Conference, 666-669, 2008 | 31 | 2008 |
| Aggregate farming in the cloud: the AFarCloud ECSEL project P Castillejo, G Johansen, B Cürüklü, S Bilbao-Arechabala, R Fresco, ... Microprocessors and microsystems 78, 103218, 2020 | 28 | 2020 |
| Towards an electrowetting-based digital microfluidic platform for magnetic immunoassays V Schaller, A Sanz-Velasco, A Kalabukhov, JF Schneiderman, F Öisjöen, ... Lab on a Chip 9 (23), 3433-3436, 2009 | 28 | 2009 |
| Method for the closure of openings in a film C Rusu, A Witvrouw US Patent 7,235,281, 2007 | 28 | 2007 |