Ivo Rangelow Prof. Dr.

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Piotr GrabiecAdresse e-mail validée de ite.waw.pl
Marcus KaestnerTechnische Universität IlmenauAdresse e-mail validée de tu-ilmenau.de
Thomas SchenkelLawrence Berkley National LaboratoryAdresse e-mail validée de lbl.gov
Arun PersaudLawrence Berkeley National LaboratoryAdresse e-mail validée de lbl.gov
Steve LenkResearcher, Fraunhofer IOSB-ASTAdresse e-mail validée de iosb-ast.fraunhofer.de
Claudia LenkUniversität UlmAdresse e-mail validée de uni-ulm.de
Elshad GuliyevDr.-Ing., Technische Universität Ilmenau, Electrical Engineering and Information TechnologyAdresse e-mail validée de tu-ilmenau.de
Jeffrey Bokor Professor of electrical engineering and computer sciences, University of California, BerkeleyAdresse e-mail validée de eecs.berkeley.edu
Jan MeijerUniversity LeipzigAdresse e-mail validée de uni-leipzig.de
Andreas SchuhCo-Founder at Level 42 AI, Inc.Adresse e-mail validée de level42.ai
James Alexander LiddleChief, Microsystems and Nanotechnology Division, NISTAdresse e-mail validée de nist.gov
Seong-Ju ParkGwangju Institute of Science and Technology, KoreaAdresse e-mail validée de gist.ac.kr
Fedor JelezkoUlm UniversityAdresse e-mail validée de uni-ulm.de
Daniel KopiecPolitechnika WrocławskaAdresse e-mail validée de pwr.wroc.pl
Zahid DurraniDept. of Electrical and Electronic Engineering, Imperial College LondonAdresse e-mail validée de imperial.ac.uk
Ferdinand Schmidt-KalerQUANTUM Universität MainzAdresse e-mail validée de uni-ulm.de
Jörg WrachtrupProfessor of Physics, Stuttgart University and Max Planck Institute for Solid State ResearchAdresse e-mail validée de physik.uni-stuttgart.de
Frances AllenUniversity of California, BerkeleyAdresse e-mail validée de berkeley.edu
Paul HansmaUCSBAdresse e-mail validée de ucsb.edu
Stanislaw MituraUniwersytet Kaliski, Profesor, Politechnika Łódzka (1974-2012)Adresse e-mail validée de uniwersytetkaliski.edu.pl

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Ivo Rangelow Prof. Dr.

Technische Universität Ilmenau

Adresse e-mail validée de tu-ilmenau.de - Page d'accueil

AFM Cantilever NEMS nanolithography SPL


Titre Trier par citations Trier par année Trier par titre	Citée par Citée par	Année
Radiation hard silicon detectors—Developments by the RD48 (ROSE) collaboration G Lindström, M Ahmed, S Albergo, P Allport, D Anderson, L Andricek, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2001	667*	2001
Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems IW Rangelow Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (4 …, 2003	282	2003
Components for high speed atomic force microscopy GE Fantner, G Schitter, JH Kindt, T Ivanov, K Ivanova, R Patel, ... Ultramicroscopy 106 (8-9), 881-887, 2006	279	2006
Low pressure plasmas and microstructuring technology G Franz Springer Science & Business Media, 2009	168	2009
Electrostatically driven microgripper BE Volland, H Heerlein, IW Rangelow Microelectronic engineering 61, 1015-1023, 2002	164	2002
Thermochemical nanopatterning of organic semiconductors O Fenwick, L Bozec, D Credgington, A Hammiche, GM Lazzerini, ... Nature nanotechnology 4 (10), 664-668, 2009	153	2009
Nanoscale engineering and optical addressing of single spins in diamond S Pezzagna, D Wildanger, P Mazarov, AD Wieck, Y Sarov, I Rangelow, ... small 6 (19), 2117-2121, 2010	145	2010
Piezoresistive sensors for scanning probe microscopy T Gotszalk, P Grabiec, IW Rangelow Ultramicroscopy 82 (1-4), 39-48, 2000	145	2000
Tuning the photonic bandgap properties of crystalline arrays of polystyrene beads by annealing at elevated temperatures B Gates, SH Park, Y Xia Advanced Materials 12 (9), 653-656, 2000	144	2000
Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase … R Pedrak, T Ivanov, K Ivanova, T Gotszalk, N Abedinov, IW Rangelow, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003	121	2003
Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution J Meijer, S Pezzagna, T Vogel, B Burchard, HH Bukow, IW Rangelow, ... Applied Physics A 91, 567-571, 2008	119	2008
Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers R Linnemann, T Gotszalk, IW Rangelow, P Dumania, E Oesterschulze Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996	119	1996
Time-domain travelling-wave model for quantum dot passively mode-locked lasers M Rossetti, P Bardella, I Montrosset IEEE Journal of Quantum Electronics 47 (2), 139-150, 2011	116	2011
Electrical activation and electron spin coherence of ultralow dose antimony implants in silicon T Schenkel, JA Liddle, A Persaud, AM Tyryshkin, SA Lyon, R De Sousa, ... Applied Physics Letters 88 (11), 2006	116	2006
Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication IW Rangelow, T Ivanov, A Ahmad, M Kaestner, C Lenk, IS Bozchalooi, ... Journal of Vacuum Science & Technology B 35 (6), 2017	107	2017
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection N Abedinov, P Grabiec, T Gotszalk, T Ivanov, J Voigt, IW Rangelow Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (6 …, 2001	107	2001
Dry etching-based silicon micro-machining for MEMS IW Rangelow Vacuum 62 (2-3), 279-291, 2001	100	2001
Concept of deterministic single ion doping with sub-nm spatial resolution J Meijer, T Vogel, B Burchard, IW Rangelow, L Bischoff, J Wrachtrup, ... Applied Physics A 83, 321-327, 2006	99	2006
Characterization of a cantilever with an integrated deflection sensor R Linnemann, T Gotszalk, L Hadjiiski, IW Rangelow Thin Solid Films 264 (2), 159-164, 1995	96	1995
Novel high resolution scanning thermal probe K Edinger, T Gotszalk, IW Rangelow Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001	91	2001

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