| Anisotropic etching of silicon in TMAH solutions O Tabata, R Asahi, H Funabashi, K Shimaoka, S Sugiyama Sensors and Actuators A: Physical 34 (1), 51-57, 1992 | 703 | 1992 |
| Mechanical property measurements of thin films using load-deflection of composite rectangular membranes O Tabata, K Kawahata, S Sugiyama, I Igarashi Sensors and actuators 20 (1-2), 135-141, 1989 | 638 | 1989 |
| Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films T Tsuchiya, O Tabata, J Sakata, Y Taga Journal of Microelectromechanical Systems 7 (1), 106-113, 1998 | 556 | 1998 |
| Micro energy harvesting D Briand, E Yeatman, S Roundy, O Brand, GK Fedder, C Hierold, ... Wiley-VCH Verlag GmbH & Company KGaA, 2015 | 183 | 2015 |
| Micro process engineering: fundamentals, devices, fabrication, and applications O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata John Wiley & Sons, 2013 | 171 | 2013 |
| Ciliary motion actuator using self-oscillating gel O Tabata, H Hirasawa, S Aoki, R Yoshida, E Kokufuta Sensors and Actuators A: Physical 95 (2-3), 234-238, 2002 | 157 | 2002 |
| LIGA and its Applications U Wallrabe, O Tabata, JG Korvink Wiley-VCH 7, 51-68, 2009 | 151 | 2009 |
| Cmos-Mems H Baltes, O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata John Wiley & Sons, 2008 | 146* | 2008 |
| Resonant MEMS: fundamentals, implementation, and application GK Fedder, C Hierold, JG Korvink, O Tabata John Wiley & Sons, 2015 | 137 | 2015 |
| Development of passive elements with variable mechanical impedance for wearable robots S Kawamura, T Yamamoto, D Ishida, T Ogata, Y Nakayama, O Tabata, ... Proceedings 2002 IEEE International Conference on Robotics and Automation …, 2002 | 127 | 2002 |
| pH-controlled TMAH etchants for silicon micromachining O Tabata Sensors and Actuators A: Physical 53 (1-3), 335-339, 1996 | 116 | 1996 |
| Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method F Dang, S Shinohara, O Tabata, Y Yamaoka, M Kurokawa, Y Shinohara, ... Lab on a Chip 5 (4), 472-478, 2005 | 114 | 2005 |
| Comprehensive microsystems YB Gianchandani, O Tabata, HP Zappe (No Title), 2008 | 112 | 2008 |
| Monolithic pyroelectric infrared image sensor using PVDF thin film N Fujitsuka, J Sakata, Y Miyachi, K Mizuno, K Ohtsuka, Y Taga, O Tabata Sensors and Actuators A: Physical 66 (1-3), 237-243, 1998 | 108 | 1998 |
| Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro K Kamei, Y Kato, Y Hirai, S Ito, J Satoh, A Oka, T Tsuchiya, Y Chen, ... RSC advances 7 (58), 36777-36786, 2017 | 100 | 2017 |
| Moving mask UV lithography for three-dimensional structuring Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata Journal of Micromechanics and Microengineering 17 (2), 199, 2006 | 96 | 2006 |
| Reliability of MEMS: testing of materials and devices O Brand, GK Fedder, C Hierold, JG Korvink John Wiley & Sons, 2008 | 95 | 2008 |
| High-performance genetic analysis on microfabricated capillary array electrophoresis plastic chips fabricated by injection molding F Dang, O Tabata, M Kurokawa, AA Ewis, L Zhang, Y Yamaoka, ... Analytical Chemistry 77 (7), 2140-2146, 2005 | 86 | 2005 |
| Micro fabricated tunable bending stiffness devices O Tabata, S Konishi, P Cusin, Y Ito, F Kawai, S Hirai, S Kawamura Sensors and Actuators A: Physical 89 (1-2), 119-123, 2001 | 78 | 2001 |
| Surface micromachined micro-diaphragm pressure sensors S Sugiyama, K Shimaoka, O Tabata TRANSDUCERS'91: 1991 International Conference on Solid-State Sensors and …, 1991 | 74 | 1991 |
Yoshikazu HIRAIJunior Associate Professor, Kyoto UniversityAdresse e-mail validée de me.kyoto-u.ac.jp
