| Radially Polarized Light for Detection and Nanolocalization of Dielectric Particles on a Planar Substrate S. Roy, K. Ushakova, Q. van den Berg, S. F. Pereira, H. P. Urbach Physical Review Letters 114 (103903), 2015 | 85 | 2015 |
| Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry N Kumar, P Petrik, GKP Ramanandan, O El Gawhary, S Roy, SF Pereira, ... Optics express 22 (20), 24678-24688, 2014 | 58 | 2014 |
| Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface S Roy, AC Assafrao, SF Pereira, HP Urbach Optics express 22 (11), 13250-13262, 2014 | 30 | 2014 |
| Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem S Roy, N Kumar, SF Pereira, HP Urbach Journal of Optics 15 (7), 075707, 2013 | 29 | 2013 |
| Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrology N Kumar, O El Gawhary, S Roy, VG Kutchoukov, SF Pereira, W Coene, ... Metrology, Inspection, and Process Control for Microlithography XXVI 8324 …, 2012 | 23 | 2012 |
| High speed low power optical detection of sub-wavelength scatterer S Roy, M Bouwens, L Wei, SF Pereira, HP Urbach, P van der Walle Review of Scientific Instruments 86 (12), 2015 | 19 | 2015 |
| Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning N Kumar, O El Gawhary, S Roy, SF Pereira, HP Urbach Journal of the European Optical Society-Rapid Publications 8, 13048, 2013 | 19 | 2013 |
| Exploiting evanescent-wave amplification for subwavelength low-contrast particle detection S Roy, SF Pereira, HP Urbach, X Wei, O El Gawhary Physical Review A 96 (1), 013814, 2017 | 18 | 2017 |
| Scanning effects in coherent Fourier scatterometry S Roy, O El Gawhary, N Kumar, SF Pereira, HP Urbach Journal of the European Optical Society-Rapid Publications 7, 12031, 2012 | 16 | 2012 |
| Determination of the full scattering matrix using coherent Fourier scatterometry N Kumar, L Cisotto, S Roy, GKP Ramanandan, SF Pereira, H Paul Urbach Applied optics 55 (16), 4408-4413, 2016 | 13 | 2016 |
| Optimizing an apparatus for multi-stage processing of product units N Jelle, A Ypma, D Gkorou, G Tsirogiannis, RJ Van Wijk, C Tzu-Chao, ... US Patent 11,150,562, 2021 | 11 | 2021 |
| Computational metrology based correction and control M Rijpstra, CJH Lambregts, WT Tel, ROY Sarathi, CD Grouwstra, ... US Patent 11,448,973, 2022 | 5 | 2022 |
| Phase information in coherent Fourier scatterometry N Kumar, O El Gawhary, S Roy, SF Pereira, HP Urbach Optical Measurement Systems for Industrial Inspection VIII 8788, 481-488, 2013 | 3 | 2013 |
| Sub-wavelength metrology using coherent Fourier scatterometry S Roy | 2 | 2016 |
| Determining a correction to a process ROY Sarathi, EM Hulsebos, R Werkman, R Junru US Patent App. 18/674,537, 2024 | 1 | 2024 |
| Methods using fingerprint and evolution analysis J Van Dongen, WT Tel, ROY Sarathi, Y Zhang, A Cavalli, BL Sjenitzer, ... US Patent 11,281,110, 2022 | 1 | 2022 |
| Method and apparatus for detecting substrate surface variations JFMDA Van, T Druzhinina, N Kumar, ROY Sarathi, YS Huang, ... US Patent 11,092,902, 2021 | 1 | 2021 |
| Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry S Roy, N Kumar, SF Pereira, HP Urbach Fringe 2013: 7th International Workshop on Advanced Optical Imaging and …, 2014 | 1 | 2014 |
| Towards Grating Reconstruction in Coherent Fourier Scatterometry N Kumar, S Roy, O El Gawhary, SF Pereira, WMJ Coene, HP Urbach Fringe 2013: 7th International Workshop on Advanced Optical Imaging and …, 2014 | 1 | 2014 |
| Computational metrology based sampling scheme WT Tel, Y Zhang, ROY Sarathi US Patent App. 18/749,556, 2024 | | 2024 |
Silvania F. PereiraAssociate Professor of Applied Physics, Delft University of TechnologyAdresse e-mail validée de tudelft.nl
