The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering A Anders, J Čapek, M Hála, L Martinu Journal of physics D: Applied physics 45 (1), 012003, 2011 | 123 | 2011 |
Hysteresis-free deposition of niobium oxide films by HiPIMS using different pulse management strategies M Hála, J Čapek, O Zabeida, JE Klemberg-Sapieha, L Martinu Journal of Physics D: Applied Physics 45 (5), 055204, 2012 | 102 | 2012 |
Deposition rate enhancement in HiPIMS without compromising the ionized fraction of the deposition flux J Čapek, M Hála, O Zabeida, JE Klemberg-Sapieha, L Martinu Journal of Physics D: Applied Physics 46 (20), 205205, 2013 | 100 | 2013 |
Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time-and space-resolved optical emission spectroscopy and fast imaging M Hala, N Viau, O Zabeida, JE Klemberg-Sapieha, L Martinu Journal of Applied Physics 107 (4), 2010 | 98 | 2010 |
Ordering kesterite improves solar cells: A low temperature post-deposition annealing study G Rey, TP Weiss, J Sendler, A Finger, C Spindler, F Werner, M Melchiorre, ... Solar Energy Materials and Solar Cells 151, 131-138, 2016 | 83 | 2016 |
Reactive HiPIMS deposition of SiO2/Ta2O5 optical interference filters M Hála, R Vernhes, O Zabeida, JE Klemberg-Sapieha, L Martinu Journal of Applied Physics 116 (21), 2014 | 53 | 2014 |
Steady state discharge optimization in high-power impulse magnetron sputtering through the control of the magnetic field J Čapek, M Hála, O Zabeida, JE Klemberg-Sapieha, L Martinu Journal of Applied Physics 111 (2), 2012 | 49 | 2012 |
Pulse management in high power pulsed magnetron sputtering of niobium M Hála, J Čapek, O Zabeida, JE Klemberg-Sapieha, L Martinu Surface and Coatings Technology 206 (19-20), 4186-4193, 2012 | 45 | 2012 |
Highly conductive ZnO films with high near infrared transparency M Hála, S Fujii, A Redinger, Y Inoue, G Rey, M Thevenin, V Deprédurand, ... Progress in Photovoltaics: Research and Applications 23 (11), 1630-1641, 2015 | 30 | 2015 |
Improved environmental stability of highly conductive nominally undoped ZnO layers suitable for n-type windows in thin film solar cells M Hala, H Kato, M Algasinger, Y Inoue, G Rey, F Werner, C Schubbert, ... Solar Energy Materials and Solar Cells 161, 232-239, 2017 | 28 | 2017 |
Growth and properties of high index Ta2O5 optical coatings prepared by HiPIMS and other methods M Hála, R Vernhes, O Zabeida, E Bousser, JE Klemberg-Sapieha, ... Surface and Coatings Technology 241, 33-37, 2014 | 27 | 2014 |
Time-and species-resolved plasma imaging as a new diagnostic approach for HiPIMS discharge characterization M Hala, O Zabeida, B Baloukas, JE Klemberg-Sapieha, L Martinu IEEE Transactions on plasma science 38 (11), 3035-3039, 2010 | 23 | 2010 |
Optimization of buffer layer/i-layer band alignment Y Inoue, M Hála, A Steigert, R Klenk, S Siebentritt 2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC), 1-5, 2015 | 16 | 2015 |
Dynamics of HiPIMS discharge operated in oxygen M Hála, O Zabeida, JE Klemberg-Sapieha, L Martinu IEEE Transactions on plasma science 39 (11), 2582-2583, 2011 | 11 | 2011 |
Klemberg-Sapieha JE and Martinu L M Hála, R Vernhes, O Zabeida J. Appl. Phys. 2014, 116, 2014 | 6 | 2014 |
Beyond 20% World Record Efficiency for Thin-Film Solar Modules H Elanzeery, M Stölzel, P Eraerds, P Borowski, H Aboulfadl, A Lomuscio, ... IEEE Journal of Photovoltaics, 2023 | 5 | 2023 |
Characterization of high power impulse magnetron sputtering discharges M Hala Ph. D. Thesis, 2011 | 4 | 2011 |
Time-and space-resolved optical emission spectroscopy study of reactive HIPIMS discharges M Hala, N Viau, O Zabeida, JE Klemberg-Sapieha, L Martinu 52nd Annual Technical Conference 2009, 2009 | 2 | 2009 |
Environmental stability of highly conductive nominally undoped ZnO layers M Hála, Y Inoue, H Kato, G Rey, F Werner, C Schubbert, M Algasinger, ... 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC), 1464-1468, 2016 | 1 | 2016 |
Passive and active optical coatings prepared by HiPIMS M Hala, R Vernhes, JP Fortier, B Baloukas, O Zabeida, ... Optical Interference Coatings, WC. 8, 2013 | 1 | 2013 |