| Materials processing by gas cluster ion beams I Yamada, J Matsuo, N Toyoda, A Kirkpatrick Materials Science and Engineering: R: Reports 34 (6), 231-295, 2001 | 606 | 2001 |
| Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams S Ninomiya, K Ichiki, H Yamada, Y Nakata, T Seki, T Aoki, J Matsuo Rapid Communications in Mass Spectrometry: An International Journal Devoted …, 2009 | 263 | 2009 |
| Measurements of secondary ions emitted from organic compounds bombarded with large gas cluster ions S Ninomiya, Y Nakata, K Ichiki, T Seki, T Aoki, J Matsuo Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2007 | 196 | 2007 |
| Organic depth profiling of a nanostructured delta layer reference material using large argon cluster ions JLS Lee, S Ninomiya, J Matsuo, IS Gilmore, MP Seah, AG Shard Analytical chemistry 82 (1), 98-105, 2010 | 184 | 2010 |
| Incident angle dependence of the sputtering effect of Ar-cluster-ion bombardment H Kitani, N Toyoda, J Matsuo, I Yamada Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997 | 120 | 1997 |
| Molecular depth profiling of multilayer structures of organic semiconductor materials by secondary ion mass spectrometry with large argon cluster ion beams S Ninomiya, K Ichiki, H Yamada, Y Nakata, T Seki, T Aoki, J Matsuo Rapid Communications in Mass Spectrometry: An International Journal Devoted …, 2009 | 114 | 2009 |
| Nano-processing with gas cluster ion beams I Yamada, J Matsuo, Z Insepov, T Aoki, T Seki, N Toyoda Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2000 | 112 | 2000 |
| Molecular dynamics simulation of damage formation by cluster ion impact T Aoki, J Matsuo, Z Insepov, I Yamada Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997 | 103 | 1997 |
| Generation of the large current cluster ion beam T Seki, J Matsuo, GH Takaoka, I Yamada Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2003 | 98 | 2003 |
| Progress and applications of cluster ion beam technology I Yamada, J Matsuo, N Toyoda, T Aoki, T Seki Current Opinion in Solid State and Materials Science 19 (1), 12-18, 2015 | 92 | 2015 |
| Characterization of structural dynamics of thin film on using in-air time-resolved x-ray diffraction M Hada, K Okimura, J Matsuo Physical Review B—Condensed Matter and Materials Physics 82 (15), 153401, 2010 | 88 | 2010 |
| Non-linear processes in the gas cluster ion beam modification of solid surfaces I Yamada, J Matsuo, N Toyoda, T Aoki, E Jones, Z Insepov Materials Science and Engineering: A 253 (1-2), 249-257, 1998 | 88 | 1998 |
| Angular distributions of the particles sputtered with Ar cluster ions N Toyoda, H Kitani, N Hagiwara, T Aoki, J Matsuo, I Yamada Materials chemistry and physics 54 (1-3), 262-265, 1998 | 84 | 1998 |
| Surface processing by gas cluster ion beams at the atomic (molecular) level I Yamada, J Matsuo, Z Insepov, D Takeuchi, M Akizuki, N Toyoda Journal of Vacuum Science and Technology-Section A-Vacuum Surfaces and Films …, 1996 | 83 | 1996 |
| Sputtering of elemental metals by Ar cluster ions J Matsuo, N Toyoda, M Akizuki, I Yamada Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997 | 80 | 1997 |
| STM observation of HOPG surfaces irradiated with Ar cluster ions T Seki, T Kaneko, D Takeuchi, T Aoki, J Matsuo, Z Insepov, I Yamada Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997 | 78 | 1997 |
| Cluster size dependence of sputtering yield by cluster ion beam irradiation T Seki, T Murase, J Matsuo Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2006 | 77 | 2006 |
| Smoothing of films by ion cluster beam bombardment WK Chu, YP Li, JR Liu, JZ Wu, SC Tidrow, N Toyoda, J Matsuo, I Yamada Applied physics letters 72 (2), 246-248, 1998 | 76 | 1998 |
| IEDM Tech. Dig. K Goto, J Matsuo, Y Tada, T Tanaka, Y Momiyama, T Sugii, I Yamada Tech. Dig, 435-439, 1996 | 76 | 1996 |
| Cluster ion beam process technology I Yamada, J Matsuo, N Toyoda Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2003 | 75 | 2003 |
