| A review of MEMS oscillators for frequency reference and timing applications JTM Van Beek, R Puers Journal of Micromechanics and Microengineering 22 (1), 013001, 2011 | 514 | 2011 |
| Modelling the dynamics of a MEMS resonator: simulations and experiments RMC Mestrom, RHB Fey, JTM Van Beek, KL Phan, H Nijmeijer Sensors and Actuators A: Physical 142 (1), 306-315, 2008 | 243 | 2008 |
| Piezoresistive heat engine and refrigerator PG Steeneken, K Le Phan, MJ Goossens, GEJ Koops, G Brom, ... Nature Physics 7 (4), 354-359, 2011 | 186 | 2011 |
| MEMS capacitive pressure sensor WFA Besling, M Goossens, JTM Van Beek, PG Steeneken, O Wunnicke US Patent 9,772,245, 2017 | 138 | 2017 |
| Touch sensitive display for a portable device GJA Destura, HEA Huitema, MHWM Van Delden, JTM Van Beek, ... US Patent 8,325,143, 2012 | 121 | 2012 |
| Dynamics and squeeze film gas damping of a capacitive RF MEMS switch PG Steeneken, TGSM Rijks, JTM Van Beek, MJE Ulenaers, J De Coster, ... Journal of Micromechanics and Microengineering 15 (1), 176, 2004 | 121 | 2004 |
| CMUTs with a high-k dielectric AL Roest, K Reimann, M Klee, JTM Van Beek, JD Fraser US Patent 8,203,912, 2012 | 119 | 2012 |
| Medium energy neutral atom (MENA) imager for the IMAGE mission CJ Pollock, K Asamura, J Baldonado, MM Balkey, P Barker, JL Burch, ... The Image Mission, 113-154, 2000 | 119 | 2000 |
| RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication HJ De Los Santos, G Fischer, HAC Tilmans, JTM Van Beek IEEE Microwave Magazine 5 (4), 36-49, 2004 | 105* | 2004 |
| RF MEMS tunable capacitors with large tuning ratio TGSM Rijks, JTM Van Beek, PG Steeneken, MJE Ulenaers, J De Coster, ... 17th IEEE International Conference on Micro Electro Mechanical Systems …, 2004 | 81 | 2004 |
| Touch Sensitive Display M Van Delden, J Van Beek, G Destura, A Kemmeren US Patent App. 10/599,827, 2007 | 79 | 2007 |
| A 10MHz piezoresistive MEMS resonator with high Q JTM Van Beek, PG Steeneken, B Giesbers 2006 IEEE International Frequency Control Symposium and Exposition, 475-480, 2006 | 78 | 2006 |
| Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator JTM Van Beek, G Verheijden, GEJ Koops, KL Phan, C Van der Avoort, ... 2007 IEEE International Electron Devices Meeting, 411-414, 2007 | 67 | 2007 |
| Amplitude saturation of MEMS resonators explained by autoparametric resonance C Van der Avoort, R Van der Hout, JJM Bontemps, PG Steeneken, ... Journal of Micromechanics and Microengineering 20 (10), 105012, 2010 | 64 | 2010 |
| RF MEMS for ubiquitous wireless connectivity. Part II. Application HJ De Los Santos, G Fischer, HAC Tilmans, JTM Van Beek IEEE microwave magazine 5 (4), 50-65, 2004 | 62 | 2004 |
| Microelectromechanical tunable capacitors for reconfigurable RF architectures TGSM Rijks, PG Steeneken, JTM Van Beek, MJE Ulenaers, A Jourdain, ... Journal of Micromechanics and Microengineering 16 (3), 601, 2006 | 56 | 2006 |
| The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches J De Coster, HAC Tilmans, JTM Van Beek, TGSM Rijks, R Puers Journal of Micromechanics and Microengineering 14 (9), S49, 2004 | 51 | 2004 |
| Elimination of accumulation charge effects for high-resistive silicon substrates ABM Jansman, JTM Van Beek, M Van Delden, A Kemmeren, ... ESSDERC'03. 33rd Conference on European Solid-State Device Research, 2003., 3-6, 2003 | 49 | 2003 |
| Parameter extraction and support-loss in MEMS resonators PG Steeneken, JJM Ruigrok, S Kang, JTM Van Beek, J Bontemps, ... arXiv preprint arXiv:1304.7953, 2013 | 40 | 2013 |
| Electromechanical transducer and electrical device JTM Van Beek, PG Steeneken US Patent 7,554,425, 2009 | 39 | 2009 |
