Thick SiOxNy and SiO2 films obtained by PECVD technique at low temperatures MI Alayo, I Pereyra, MNP Carreno
Thin Solid Films 332 (1-2), 40-45, 1998
122 1998 Wide gap a-Si1− xCx: H thin films obtained under starving plasma deposition conditions I Pereyra, MNP Carreño
Journal of non-crystalline solids 201 (1-2), 110-118, 1996
83 1996 Wide optical band gap window layers for solar cells Z Yu, I Pereyra, MNP Carreno
Solar energy materials and solar cells 66 (1-4), 155-162, 2001
70 2001 The influence of “starving plasma” regime on carbon content and bonds in I Pereyra, MNP Carreno, MH Tabacniks, RJ Prado, MCA Fantini
Journal of applied physics 84 (5), 2371-2379, 1998
61 1998 Microvoids in diamond‐like amorphous silicon carbide MNP Carreno, I Pereyra, MCA Fantini, H Takahashi, R Landers
Journal of applied physics 75 (1), 538-542, 1994
61 1994 On the structural properties of a ‐Si1−x Cx V Mastelaro, AM Flank, MCA Fantini, DRS Bittencourt, MNP Carreño, ...
Journal of applied physics 79 (3), 1324-1329, 1996
60 1996 Low temperature plasma enhanced chemical vapour deposition boron nitride MNP Carreno, JP Bottecchia, I Pereyra
Thin Solid Films 308, 219-222, 1997
57 1997 Post thermal annealing crystallization and reactive ion etching of SiC films produced by PECVD AR Oliveira, MNP Carreno
Journal of Non-Crystalline Solids 352 (9-20), 1392-1397, 2006
50 2006 PECVD-SiOxNy films for large area self-sustained grids applications MNP Carreno, MI Alayo, I Pereyra, AT Lopes
Sensors and Actuators A: Physical 100 (2-3), 295-300, 2002
45 2002 Mechanical properties of boron nitride thin films obtained by RF-PECVD at low temperatures J Vilcarromero, MNP Carreño, I Pereyra
Thin Solid Films 373 (1-2), 273-276, 2000
37 2000 Self-sustained bridges of a-SiC: H films obtained by PECVD at low temperatures for MEMS applications MNP Carreño, AT Lopes
Journal of Non-Crystalline Solids 338, 490-495, 2004
34 2004 Fabrication of PECVD-silicon oxynitride-based optical waveguides MI Alayo, D Criado, MNP Carreño, I Pereyra
Materials Science and Engineering: B 112 (2-3), 154-159, 2004
32 2004 Directional random laser source consisting of a HC-ARROW reservoir connected to channels for spectroscopic analysis in microfluidic devices KC Jorge, MA Alvarado, EG Melo, MNP Carreño, MI Alayo, NU Wetter
Applied Optics 55 (20), 5393-5398, 2016
30 2016 N and p-type doping of PECVD a-SiC: H obtained under “silane starving plasma” condition with and without hydrogen dilution AR Oliveira, MNP Carreño
Materials Science and Engineering: B 128 (1-3), 44-49, 2006
28 2006 Evidence of quantum size effects in a-Si: H/a-SiCx: H superlattices. Observation of negative resistance in double barrier structures I Pereyra, MNP Carreno, RK Onmori, CA Sassaki, AM Andrade, F Alvarez
Journal of Non-Crystalline Solids 97, 871-874, 1987
28 1987 Membranes of SiOxNy with 3D topography formed by PECVD for MEMS applications AT Lopes, MNP Carreño
Journal of non-crystalline solids 338, 788-792, 2004
23 2004 Ultrasensitive microfluidic electrochemical immunosensor based on electrodeposited nanoporous gold for SOX-2 determination M Regiart, AM Gimenez, AT Lopes, MNP Carreno, M Bertotti
Analytica Chimica Acta 1127, 122-130, 2020
22 2020 Thermally actuated a-SiC: H MEMS fabricated by a PECVD process G Rehder, MNP Carreño
Journal of non-crystalline solids 352 (9-20), 1822-1828, 2006
19 2006 Highly ordered amorphous silicon-carbon alloys obtained by RF PECVD I Pereyra, CA Villacorta, MNP Carreño, RJ Prado, MCA Fantini
Brazilian Journal of Physics 30, 533-540, 2000
19 2000 Amorphous and excimer laser annealed SiC films for TFT fabrication B Garcia, M Estrada, KF Albertin, MNP Carreno, I Pereyra, L Resendiz
Solid-state electronics 50 (2), 241-247, 2006
17 2006 